Compact Cylinder Series CQS

Cylinder model Mounting bolt size Mounting bolt size CQSKB12-5D -10D -15D -20D -25D -30D M3 x 25L x 30L x 35L x 40L x 45L x 50L M3 x 25L x 30L x 35L x 40L x 45L x 50L M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 30L x 35L x 40L

CQS

x 55l M3 x 30l x 35l x 40l x 45l x 50l x 55l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l M3 x 35l x 40l x 45l x 50l x 55l x 60l M3 x 35l x 40l x 45l x 50l x 55l x 60l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l M5 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l 6.5 6.5 Head side

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L CQ-M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L

Programless controller Step motor (servo 24 VDC)

LEY16A / LEYG16A LEY16B / LEYG16B LEY16C / LEYG16C Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 15 200 8 200 4 200 1 20 300 10 300 6 300 2 30 400 15 400 8 400 3 40 500 20 500 10 500 4 50 600 25 600 13 600 5 60 700 30 700 15 700 6 80 800 40 800 20 800 7 100 900 50 900 25 900 8 150 1000 75 1000 38 1000 9 200 1200 100 1200 50 1200 10

Compact Cylinder/Guide Rod Type Series CQM

x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 110L x 135L M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 115L x 140L M6 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 120L x

CQS

Mounting Bolt for CDQSW/With Auto Switch Mounting bolt M3 X 35l X 40l X 45l X 50l X 55l X 60l M3 X 35l X 40l X 45l X 50l X 55l X 60l M5 X 45l X 50l X 55l X 60l Mounting bolt M5 X 65l X 70l X 75l X 80l X 85l X 90l M5 X 45l X 50l X 55l X 60l X 65l X 70l X 75l X 80l X 85l X 90l Model C Model C D 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 D 35 40 45 50 55 60 35 40 45 50 55 60 45 50 55 60

Proposals for Energy Saving

Digital Flow Switch for Air Digital Flow Switch for Water Series PFA Series PFA Series PFW Series PFW New New 12000l 6000l 3000l Flow rate 40l 500l Photo Flow rate Photo 200l 100l 16l 50l Photo 4l Photo 10l Size (port size)) Size (port size) Maximum Flow Rate 3000, 6000, 12000l/min The addition of the high flow rate types supports energy saving measures.

Smooth Cylinder/Low Speed Cylinder

CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M5 x 30L x 35L x 40L x 45L Mounting bolt part no. CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L Mounting method: Mounting bolt for through-hole mounting style of CQSYB is available as an option.

Digital Flow Switch Series PFA For Air Series PFW For Water

Symbol 100 200 500 50 10 Rc NPT G 01 02 03 04 1/8 1/4 3/8 1/2 PFA510, 550 PFA511, 521 PFA551 Specifications PFA511 PFA521 PFA551 PFA510 PFA550 Model Measured fluid Dry air, N2 Detection type Heater type 20 to 200l/min 50 to 500l/min 10 to 100l/min 1 to 10l/min 5 to 50l/min Flow rate measurement range Operating pressure range 0 to 0.5MPa Withstand pressure 1.0MPa 3kPa (at 50l/min) 3kPa

Series IDG

Note IDG30, 30H, 30L IDG5, 50H, 50L IDG60, 60H, 60L, 60S IDG75, 75H, 75L, 75S IDG100, 100H, 100L, 100S 1 2 3 4 5 Body Aluminum alloy Platinum silver coating Case Stainless steel Orifice Stainless steel Holder Silencer Aluminum alloy Aluminum Resin + Copper alloy Replacement parts Part number No.

Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

Table of Contents

Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.

IDG

Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.

PFA/PFW

/min (0.18 to 1.77SCFM) 0.5l/min (0.02SCFM) l/min, CFM x 10-2 Instantaneous flow rate Cumulative flow rate Display units l, ft3 x 10-1 0 to 0.5MPa (0 to 72psi) 1.0MPa (145psi) 3kPa (50l/min) [0.44psi (1.77SCFM)] 0 to 9l (0 to 35,300 ft3) 0 to 50C (32 to 122F) with no condensation 5% F.S. or less 1% F.S. or less Operating pressure range Withstanding pressure Pressure loss Cumulative flow

PA3000/5000/PAX1000

Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 150mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type), I/O Cable Length for

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 50mm, Motor Option: B (w/Lock), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type), I/O Cable Length

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 100mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type), I/O Cable Length for