Environment

LEY LES Table Displacement (Reference Value) LEPY LEPS 0.08 LER W L LEF32 (L = 30 mm) LEH 0.06 Displacement [mm] LEY -X5 LEF25 (L = 25 mm) 11LEFS 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 11LEJS 0.02 25ALEC 0 0 100 200 300 400 500 LEC S Load W [N] LEC SS-T Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Step Motor Controller

L DIN rail AXT100-DR-l 5.25 12.5 (Pitch) 7.5 For l, enter a number from the No. line in the table below.

ITV

Series ITV0 Series ITV1000 IC Maximum flow rate 6 L/min (ANR) Set pressure: 0.6 MPa Supply pressure: 1.0 MPa Maximum flow rate 200 L/min (ANR) Set pressure: 0.6 MPa Supply pressure: 1.0 MPa ITVX PVQ VEF VEP Grease-free specification (wetted parts) VER Series ITV2000 Series ITV3000 VEA Maximum flow rate 1500 L/min (ANR) Set pressure: 0.6 MPa Supply pressure: 1.0 MPa Maximum flow rate 4000

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Title not found

L DIN rail AXT100-DR-l 5.25 12.5 (Pitch) 7.5 For l, enter a number from the No. line in the table below.

Programless Controller Series LECP1

[m] 1 3 5 (10) (11) (30) (60) 1.5 3 5 (L) Conductor size: AWG26 Terminal no.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

chart ON ON Output transistor Output transistor OFF OFF Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L Be sure to use the attached mounting screws.

LJ1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

3 Port Solenoid Valve/

M12 Connector Cable (4 Pins) Made by OMRON Part number Cable length [mm] ZS-37-L 300 ZS-37-M 500 ZS-37-N 1000 ZS-37-P 2000 ZS-37-C 5000 Part number Cable length [mm] Changing the entry direction After separating the terminal block and housing, the cord entry can be changed by attaching the housing in the opposite direction 180.

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

0.4

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 57 F kit P kit J kit G kit T kit L kit S kit M kit Construction Semistandard Manifold Optional

SX

AXT100-DS25015 030 050 L Terminal no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

other than above For P kit For J kit For L kit For S kit Note) The !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

other than above For P kit For J kit For L kit For S kit Note) The !

Valve Single Unit

AXT100-DS25015 030 050 L Terminal no.

Valve Single Unit

AXT100-DS25015 030 050 L Terminal no.

Stability of suction position,

Formula examples with beams (Reference) L a b L a b L L L/2 L/2 L/2 L/2 Load/Shape conditions P P P P A C RA RB B A C RA RB B C A E D B RA RB RC RA=Pb/L RB=Pa/L W=P Formula (Reactive force: R, Total load: W) RA=RC=5Pb/16 RB=11P/8 RA=RB=P/2 W=P Mounting Position The basic mounting method is a horizontal lift.

CRB2/CRBU2/CRB1

h Model b (h9) h (h9) L !

Table of Contents

h Model b (h9) h (h9) l ***!