LEC-OM071xx

D i s p l a y a n d SigmaWin+TM 2.

Electric Actuator

Table Displacement (Reference Value) W L 0.08 LEF32 (L = 30 mm) 0.06 Displacement [mm] LEF25 (L = 25 mm) 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 0.02 0 0 100 200 300 400 500 Load W [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Step Motor Controller

L DIN rail AXT100-DR-l 5.25 12.5 (Pitch) 7.5 For l, enter a number from the No. line in the table below.

CRBU

R73C 3m: L Ex.) R73CL 5m: Z Ex.) R73CZ : N Ex.)

Series SV

M12 52 l M12 M12 48 6 6 32.3 28.3 16 M12 31.3 31.3 l 14.9 Terminal no.

Table of Contents

L type plug connector is used for 3 position AS.

Electric Actuator

Table Displacement (Reference Value) L W 1 N = 0.224 lbf 0.02 LEJ;40 Displacement [mm] (L = 52.5 mm) LEJ;63 (L = 64.5 mm) 0.01 0 0 100 200 300 400 500 Load W [N] Note) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Table of Contents

Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

ZX

Supply pressure (MPa) Suction flow rate (l/min (ANR)) ZQ ZX1-W07 Exhaust Characteristics Flow Characteristics ZF Vacuum pressure Vacuum pressure ZP Air consumption Air consumption Air consumption Suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure (kPa) ZCU AMJ Suction flo Suction flow r w rate ate Suction flow rate Misc.

2

Auto Drain The Japan Refrigeration and Air Conditioning Industry Association JRA GL-02-1994 Cooling water system Circulation type Circulating water Caution Unit [S/cm] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] Item pH (at 25C ) Electrical conductivity (25C ) Chloride ion (Cl) Sulfuric acid ion (SO42) Standard value

Electric Actuator/Slider Type

(mm) T U Y V Without lock With lock F G W X Z W X Z 25 15 to 100 92 1 26.5 40 82.5 115.5 11 127.5 160.5 11 2 4 105 to 400 32 20 to 100 118 1 34 60 80 120 14 120 160 14 2 4 105 to 500 63 50 to 200 146 4 32.2 60 98.5 138.5 12.5 (13.5)138.5 178.5 12.5 (13.5) 4 8 205 to 500 505 to 800 L lead Motor left side parallel type: LEY L 25 32 63 Motor right side parallel type: LEY R 25 32 63 U S1 U S1

Series VQ Base Mounted Metal Seal/Rubber Seal

L plug connector C Kit only Except for AC.

Series VQ Metal Seal/Rubber Seal Body Ported

L=12.5 X n+10.5 L dimension 1 2 3 4 5 6 7 8 9 10 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 No. L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Environment

LEY LES Table Displacement (Reference Value) LEPY LEPS 0.08 LER W L LEF32 (L = 30 mm) LEH 0.06 Displacement [mm] LEY -X5 LEF25 (L = 25 mm) 11LEFS 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 11LEJS 0.02 25ALEC 0 0 100 200 300 400 500 LEC S Load W [N] LEC SS-T Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Step Motor Controller

L DIN rail AXT100-DR-l 5.25 12.5 (Pitch) 7.5 For l, enter a number from the No. line in the table below.

ITV

Series ITV0 Series ITV1000 IC Maximum flow rate 6 L/min (ANR) Set pressure: 0.6 MPa Supply pressure: 1.0 MPa Maximum flow rate 200 L/min (ANR) Set pressure: 0.6 MPa Supply pressure: 1.0 MPa ITVX PVQ VEF VEP Grease-free specification (wetted parts) VER Series ITV2000 Series ITV3000 VEA Maximum flow rate 1500 L/min (ANR) Set pressure: 0.6 MPa Supply pressure: 1.0 MPa Maximum flow rate 4000

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Title not found

L DIN rail AXT100-DR-l 5.25 12.5 (Pitch) 7.5 For l, enter a number from the No. line in the table below.

Programless Controller Series LECP1

[m] 1 3 5 (10) (11) (30) (60) 1.5 3 5 (L) Conductor size: AWG26 Terminal no.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

chart ON ON Output transistor Output transistor OFF OFF Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L Be sure to use the attached mounting screws.