Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

M-E05-1-LQ1

Nut Insert bushing Nut Insert bushing LQ1U31-R3 3 4-10 LQ1-4N10 LQ1-4B10 2-04 LQ1-2N04 LQ1-2B04 LQ1U31-R4 3 4-10 LQ1-4N10 LQ1-4B10 2-03 LQ1-2N03 LQ1-2B03 LQ1U41-R2 4 4-12 LQ1-4N12 LQ1-4B12 3-08 LQ1-3N08 LQ1-3B08 LQ1U41-R3 4 4-12 LQ1-4N12 LQ1-4B12 2-06 LQ1-2N06 LQ1-2B06 LQ1U41-R4 4 4-12 LQ1-4N12 LQ1-4B12 2-04 LQ1-2N04 LQ1-2B04 LQ1U41-R5 4 4-12 LQ1-4N12 LQ1-4B12 2-03 LQ1-2N03 LQ1-2B03 LQ1U51

2-Color Display Digital Flow Switch Series PFM

Piping Variations With one-touch fittings (C4, C6, C8, N7) Female thread (01, 02, N01, N02, F01, F02) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) S 1 2 S 1 2 S S 1 1 2 2 IN 1 IN 1 IN IN With flow adjustment valve (S) S S 1 2 1 2 S S 1 1 2 2 IN IN 1 IN 1 IN 906 2-Color Display Digital Flow Switch Series PFM7 Option 1 Nil With lead wire with connector

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

Table of Contents

Series KKA Series KKA P.15-2-89 to 15-2-95 Stainless steel type Male thread type Port size Series KKA3 KKA4 KKA6 R1/8 R1/4 R3/8 R1/2 R3/4 Female thread type Port size Series KKA3 KKA4 KKA6 Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 Series KK13 15-2-74 3 Series KK S Couplers M5 size (Series KK2) is newly added.

KJ

Series KKA Series KKA P.15-2-89 to 15-2-95 Stainless steel type Male thread type Port size Series KKA3 KKA4 KKA6 R1/8 R1/4 R3/8 R1/2 R3/4 Female thread type Port size Series KKA3 KKA4 KKA6 Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 Series KK13 15-2-74 3 Series KK S Couplers M5 size (Series KK2) is newly added.

Stainless Steel 316

(mm) Model R3/8 4 6 8 10 12 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 R1/4 10 R3/8 R3/8 12 R1/2 Straight Union Straight Union Union Y Union Y Applicable tubing O.D. (mm) Model Applicable tubing O.D.

Table of Contents

Port size 02 03 04 R1/4 R3/8 R1/2 Flow valve: Series ASQ Model Model Applicable tubing O.D.

Battery-less

Size Order no. 20 16 LE-D-2-7 25 LE-D-2-2 32, 40 LE-D-2-3 Replacement Parts/Grease Pack Applied portion Order no.

ASR

Port size 02 03 04 R1/4 R3/8 R1/2 Flow valve: Series ASQ Model Model Applicable tubing O.D.

ASR

Port size 02 03 04 R1/4 R3/8 R1/2 Flow valve: Series ASQ Model Model Applicable tubing O.D.

Title not found

(mm) Model R3/8 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 4 6 8 10 12 R1/4 10 R3/8 R3/8 12 R1/2 Straight Union Straight Union Union "Y" Union "Y" Applicable tubing O.D. (mm) Model Applicable tubing O.D.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Applicable piping size Applicable tubing size (mm) 2 2 2 2 2 3 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 Size No.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10.3 2.8 depth 6.2 19 2-Color Display Digital Flow Switch PF2M7(-L) Series Dimensions PF2M7m-m1/2(-L) 48 A Width across flats B 18 OUT1 OUT2 DC(+) 10.2 DC() 1.4 38.5 (30.9) 13 3 2 x Female thread Port size: 1, 2 2 x 3.4 18 [mm] 28 Model A B P PF2M701/702/705/710/ 725/750-01(-L) 66 14 2.8 depth 8.4 8 PF2M701/702/705/710/ 725/750-N1(-L) 68 14 2.8 depth 8.4 2 x P PF2M701/702/705/710/ 725/750

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

2 !1 !0oi q w e r t y u i !1 !2 No.

For post-stoppage positioning and locking

Connector pin arrangement Type Connector pins and arrangement 1 2 3 4 E2E-X7D1-M1J-T10.3M OUT ( ) OUT () 1 Pallet Lock Cylinder W-R1/W-R3 Series Dimensions W-R1-S2Position of fulcrum 2 x 18.5 Proximity switch mounting bracket 68 Proximity switch (Option) 117 15 15 26 26 2 x Rc3/8 36.5 6.5 R5 30 50 190 117 250 220 200 140 30 60 2 x M8 x 1.25 thread depth 13 (External cover mounting screw

One-touch Fittings

Symbol Size 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 04 R1/2, Rc1/2 Thread connection Applicable tubing O.D.

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

Refrigerated Air Dryers

Applicable air dryer IDF-S0189 IDF22E IDF-S0147 IDF37E Applicable air dryer Symbol Thread type and port size Applicable air dryer Male thread A side Female thread B side 601 R1/2 NPT1/2 IDF4E, IDU4E 603 R3/4 NPT3/4 IDF6E to 11E, IDU6E to 11E 604 NPT1 Rc1 IDF22E, IDU22E 605 R1 NPT1 IDF15E1, IDU15E1 606 NPT1 1/2 Rc1 1/2 IDF37E, IDU37E 607 NPT2 Rc2 IDF100F to 150F 609 R3/8 NPT3/8 IDF1E to 3E

AHC System Series MA

1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 MA3 0-YNM5 MA3 0-YNM5-R1 MA3 0-YNM5-R2 MA3 0-YNM5-R3 MA3 0-YNM5-R4 MA3 0-YNM5-R5 MA3 0-YNM5-S6 MA3 0-YNM5-R6 MA3 0-AM3 MA3 0-AM5 440 Electrical contact points: 12 10 11 35 14 AHC unit 15 520 20 24 41 25 250 Tool adapter 270 750 AHC System Series MA3 AHC Unit and Tool Adapter/Double Acting Type 1 2 1 2 1 2 AHC Unit/MA3 1-YNM5 (Without robot adapter) AHC