10

Grommet (With surge voltage suppressor) Other option Low concentration ozone resistant and applicable to deionized water/ Oil-free/Port thread Grommet Grommet (With surge voltage suppressor) 1E 12 VDC Symbol Low concentration ozone resistant and applicable to deionized water1 1F 1G 1H 1V 1J 1K 1L 1M 1W 1N 1P 1Q 1R 1Y 1S 1T (Seal material: FKM) Port thread Oil-free 48 VAC 220 VAC 240 VAC

SMC Basic Pneumatics

The second exhaust port in 5,/2 valves was thn named S, or the former "R1" and the lattr "R2". The pilol port initiating the power connection to port A has originally been coded "Z (the two elitreme bners in lhe alphabet belongs together) and the other .y'.

7

VX2 Table (1) Indication of Flow Rate Characteristics VXK Indication by international standard Corresponding equipment Other indications Conformed standard VXD VXD ISO 6358: 1989 JIS B 8390: 2000 C, b VXZ Pneumatic equipment JIS B 8390: 2000 Equipment: JIS B 8379, 8381-1, 8381-2 VXS S Cv VXB ANSI/(NFPA)T3.21.3 R1-2008 IEC60534-1: 2005 IEC60534-2-3: 1997 JIS B 2005-1: 2012 JIS B 2005-2-3

3

VX2 Table (1) Indication of Flow Rate Characteristics VXK Indication by international standard Corresponding equipment Other indications Conformed standard VXD ISO 6358: 1989 JIS B 8390: 2000 C, b VXZ Pneumatic equipment JIS B 8390: 2000 Equipment: JIS B 8379, 8381-1, 8381-2 VXS VXS S Cv VXB ANSI/(NFPA)T3.21.3 R1-2008 IEC60534-1: 2005 IEC60534-2-3: 1997 JIS B 2005-1: 2012 JIS B 2005-2-3

VFR

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Control Unit Specifications Control Unit/Option VVFS2000-24A-1R (D side mounting) VVFS2000-24A-1L (U side mounting) VVFS2000-24A-2R (D side mounting) VVFS2000-24A-2L (U side mounting) Air filter (With auto-drain/With

ZL3-OM00801

N.C. 24 No.ZL3-OM00801-A 11. ,, 11.1 25 No.ZL3-OM00801-A 11.2 11.3 (V),0, Pmax () (P1 Q1 ) (Qmax) 0() , 1L ZL3H ,-90kPa ,4.0 ,Pmax Qmax , 26 No.ZL3-OM00801-A 12. 12.1 12.2 0 27 No.ZL3-OM00801-A 13.

Compact 5-Port Solenoid Valve

Type r Valve stations q Series 1 JSY1000 3 JSY3000 5 JSY5000 10 Side ported Symbol Stations Note 02 2 stations Double wiring*1 08 8 stations 02 2 stations Specified layout*2 (Up to 16 solenoids available) t P, E port entry e SI unit 16 16 stations U U side (2 to 10 stations) D D side (2 to 10 stations) B Both sides (2 to 16 stations) 0 Without SI unit Q DeviceNet (Positive common NPN) R1

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 1 (1.5)

Oscillation Angle A: 320°, Torque (Range)(N⋅m): 10 to Less than 20, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 10, Size: 50, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LER50K-2, I/O cable length / communication plug(m): 5, Controller/driver mounting method: DIN rail mounting type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LER50K-1, I/O cable length / communication plug(m): Without I/O cable, Controller/driver mounting method: Screw mounting type

Table Accuracy: Basic Type, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.32; LER30: 1.2; LER50: 10, Motor Cable Entry: Entry of Left Side, Actuator Cable Type: Robotic Cable, Flexible Cable, Actuator Cable Length: 5m, Controller Type: LECP6, Step Data Input Type, PNP, I/O Cable Length: 5m, Communication Plug Connector: -, Controller Mounting: -

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: 2 (External Stopper: 180°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 1 (1.5)

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: External Stopper: 180°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 1.5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/

Series IDG

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (0.035SCFM) (inlet air pressure at 0.7MPa) (101.5psi).

0.55

/Dimensions 3/8, 1/2 2(A) port Standard/VPA744-1l 03 04 A B 40 16 64 24 3/8, 1/2 3(R) port 1/8 12(PA) port 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 12 3R NC 1P (1/8) 12(PA) port 11.5 16 115.1 107.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 3/8, 1/2 1(P) port 80 03 04 A B For vacuum/VPA744V-1l 3/8, 1/2 2(A) port 40 16 64 3/8, 1/2 3(R) port 24 18 67 2 x 6.2 (For mounting) NO

Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

Tamper Proof and Flat Head Screw

JIS symbol 1/8, 5/32 3/16, 1/4 3/8 5/16 3/16, 1/4 1/4 3/16 1/4, 5/16 1/2 Inch sizes 3/8 5/32 Flow rate l/min (ANR) {Nl/min} 920 660 230 420 1390 290 460 1050 100 130 Controlled (Free) Effective area mm flow 14 10 3.5 6.5 21 4.5 7 16 2 1.5 1l/min=0.035SCFM 18mm2=1Cv Note 1) Flow rate values are at a pressure of 0.5MPa (72.5psi) and temperature of 20C (68F).

Digital Flow Switches, Series PF2A, Series PF2W

/min 1l/pulse 10 to 210l/min 10 to 210l/min 20 to 200l/min 2l/min 2l/pulse 25 to 525l/min 25 to 525l/min 50 to 500l/min 5l/min 5l/pulse Accumulated pulse flow rate exchange value (Pluse width: 50ms) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Accumulated flow Display units Note 1, 2) l, ft3 x 10-1 Operating fluid temperature Linearity Repeatability Temperature characteristics

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (inlet air pressure at 0.7MPa).