3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.
3 !8 !6!7 i q A A !1 !2 u @1 Section AA Parts list Material Note No. Description No.
3 e w t !3 A A !0 !2 !7 !6 o !5 !1 i !4 Section A-A u Parts list Material Note No. Description No.
Metal parts material Metric size Inch size Applicable tubing material Seal method Port size Body size 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 12 10 8 6 4 3.2 2 3 Gasket seal M5 x 0.8 1 3 10-32UNF 3 1/8 2 3 3 1/4 Sealant 2 R 1/4 NPT 3 Brass/ Nylon (Series T, TIA) 3/8 Steel wire 3 Stainless 1/2 4 steel Soft nylon (Series TS, TISA) 3 1/8 2 3 Polyurethane (Series T, TIUB) 1/4 Face seal 1/4 G 1 3
plug connector*3 MJ LECPMJ*2 *3 !
LECSS-S5 200 to 1500 *3 Refer to the applicable stroke table for details.
LECSA-S3 63 200 Without lock Nil With lock B LECSB-S5 LECSC-S5 LECSS-S5 40 AC servo motor (absolute encoder) S6 100 *3 (6) Vacuum port direction Left side Nil LECSB-S7 LECSC-S7 LECSS-S7 AC servo motor (absolute encoder) S7 Right side R 63 200 Both side D *1 Fo r mo tor type S 2 and S6, note that the com patible driv er part number suffix is S1, S5. *3When v acuum ov er 50L/m in( ANR), select
63 200 to 1500 LECSB;-S5 LECSC;-S5 LECSS;-S5 LECSB;-S7 LECSC;-S7 LECSS;-S7 3: Refer to the table below for details.
3 SY 3 5 C6 1 0 3 1 Valve Replacement Parts Top ported !
Servo-on SON DICOM (Note 3) ALM Trouble RA DOCOM 3 3 3.
Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2
4 @3 o !7 !8 !2 !6 !9 !5 @1 !3 !0 !1 80, 100 80, 100 @2 Component Parts Replacement Parts/Seal Kit (Single rod) Bore size [mm] Kit no. Contents 32 CK95-32 No.
Load voltage Auto switch model Lead wire length (m) Indicator light Electrical entry Wiring (Output) Pre-wired connector Applicable load DC Type Special function 0.5 (Nil) 1 (M) 3 (L) 5 (Z) AC M9N M9P M9B M9NW M9PW M9BW M9NA1 M9PA1 M9BA1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Reed auto switch Solid state auto switch IC 5 V, 12 V
4 @3 o !7 !8 !2 !6 !9 !5 @1 !3 !0 !1 80, 100 80, 100 @2 Component Parts Replacement Parts/Seal Kit (Single rod) Bore size [mm] Kit no. Contents 32 CK95-32 No.
of auto switches Auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.