Table Accuracy: Basic Type, Size: 50, Max. Rotation Torque: J (Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6), Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 5 (5m)

Table Accuracy: Basic Type, Size: 50, Max. Rotation Torque: J (Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6), Motor Cable Entry: L (Entry of Left Side), Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 5 (5m)

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Entry on the Left Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable

Table Accuracy: Basic Type, Size: 50, Max. Rotation Torque: Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6, Motor Cable Entry: Entry of Left Side, Actuator Cable Type: Robotic Cable, Flexible Cable, Actuator Cable Length: 5m, Controller Type - JXC: -, Controller Mounting: -, Communication Plug Connector for DeviceNetâ„¢: -

Oscillation Angle A: 360°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Others, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 6.6, Size: 50, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type

Metal Seal/Rubber Seal Series VQ Body Ported

SI unit output no. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no.

Vacuum Module Series ZX

Vacuum release 3. Operation stop 3. Operation stop 931 Series ZX Made to Order Specifications: Please consult with SMC for detailed size, specifications and delivery.

Large Size Vacuum Module: Series ZR

Example) ZR100-K15MZ-EC (-Q) . 1 pc. 3 L 38 ZS VJ10-20-4A-6 . 3 pcs.

VQZ1000/2000/3000

(A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

2

Metal parts material Metric size Inch size Applicable tubing material Seal method Port size Body size 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 12 10 8 6 4 3.2 2 3 Gasket seal M5 x 0.8 1 3 10-32UNF 3 1/8 2 3 3 1/4 Sealant 2 R 1/4 NPT 3 Brass/ Nylon (Series T, TIA) 3/8 Steel wire 3 Stainless 1/2 4 steel Soft nylon (Series TS, TISA) 3 1/8 2 3 Polyurethane (Series T, TIUB) 1/4 Face seal 1/4 G 1 3

10

N P 5 Q Size 3 3 200 VAC N.C. 1/4 8 R 230 VAC 10 (N.C. only) 6 N.O.

For post-stoppage positioning and locking

Connector pin arrangement Type Connector pins and arrangement 1 2 3 4 E2E-X7D1-M1J-T10.3M OUT ( ) OUT () 1 Pallet Lock Cylinder W-R1/W-R3 Series Dimensions W-R1-S2Position of fulcrum 2 x 18.5 Proximity switch mounting bracket 68 Proximity switch (Option) 117 15 15 26 26 2 x Rc3/8 36.5 6.5 R5 30 50 190 117 250 220 200 140 30 60 2 x M8 x 1.25 thread depth 13 (External cover mounting screw

V100

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

Shock Absorbers and Rate Controls

19.0/ -3' 3t.zo.3' 38.0 t6.o'3' 73 38 38 35 26 N/A 23.0 2 1tl PfN2 | 00cxt(sl 408 r9.04'19.o7fr 3t.lo i., 38.0 r6.0'fi 73 38 38 35 26 N/A 23.0 P 2l50(flt(S) 537 r 9.07-3 ' r9.07'3' 3r.zo 3',38.0 t6.l)f 5 7 1 38 38 35 I O r,l/A 23.0 5.08 PRO| |o(n(Sl 2l I 5.oo tl 5.00 -3' 8.00 i, o.oo j., fi/A 28 N/A 22 l l l 3 5.0 t.0 0.54 PR0r 25(lt(sl 180 6.38 -35 6.38 -3' 12.70 il I?.

Vacuum

Digital Display (3% digit LCO) . Predicted Failure Function . 2 Setpoint Use . High Accuracy O Do not subiect body to excessive exiernal force. O Plping tightening to.ques How To Older (Exampre) 3 4 ( 3 1 3 1 7 ( 1 5 1 5 2 0 ( 1 7 NZXl Nozzle Diameter (Same as Std.) Eiector Exhaust Type (Same as Std.)

Vacuum

Digital Display (3% digit LCO) . Predicted Failure Function . 2 Setpoint Use . High Accuracy O Do not subiect body to excessive exiernal force. O Plping tightening to.ques How To Older (Exampre) 3 4 ( 3 1 3 1 7 ( 1 5 1 5 2 0 ( 1 7 NZXl Nozzle Diameter (Same as Std.) Eiector Exhaust Type (Same as Std.)

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

Title not found

8' one-tolch iiltino 5/16'one{ouch fitlinq 3/8" one-touch litling NPT 1/4 N PT 3/8 NPT:I/8 NPTF 1/4 NPTF 3/8 NPTF 38 A, B ports mixed 'ln case ofmixed speclrcalion (l',{1. ndicale separalely on a manlold specticalon sheet 3/8' one-louch litl ng sv4000 Rc 3/8 G 1/4 G 3/8 G 3/S A.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.