2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

AC Servo Motor Driver (Pulse input type/Positioning type ）

/symbol/ Setting mode digit Function name [unit] P S T PD03 *DI1L Input device selection 1L Any input device can be assigned to the CN1-15 pin. _ _ x x Position control mode Device selection 02h Refer to table 5.10. x x _ _ Speed control mode Device selection 02h Refer to table 5.10.

HEC_001W-E

Fig. 5-6 Cooling capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 1000 Cooling capacity W 5 Radiating water flow rate L/min 800 1 3 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.

20

Flow-rate Characteristics Note) Values when the main valve is fully open Male thread nozzle High efficiency nozzle 1L = 0.035 SCFM 1L = 0.035 SCFM 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 1500 1400 1300 1200 1100 1000 900 800 700 600 500 400 300 200 100 400 VMG1-R02-400:4 KNH-R02-200 VMG1-R02-350:3.5 350 VMG1-R02-300:3 Flow rate [

Multistage Ejector (N)ZL Series

1 2 3 4 5 6 Time to reach vacuum [S] Time to reach vacuum [S] Viewing the graphs The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for work pieces, etc., starting from atmospheric pressure in a 1l sealed tank.

CLA

1l!l!

PA3000/5000/PAX1000

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (inlet air pressure at 0.7MPa).

o

(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

FSQ seies

q o 9 l l / 10i11) 20\22) M 1 0 . 2 E Min. lead wire bending radius: 10 rNole 4lTh I our shows an o.rendedpisron tod .Note Jl Lor ( lare arhro. olF roLcF -.os re p'o{deo onr o_ rFe oo qde, lNole 1l Dimensions for moders wlhoutan aulo sw ich ar61he same as the above.

Title not found

Note 1l Withoul a valve functon. Note 2) For NPT rhread type Note 2) Dfan glde s G1/4 (app cab e ro AFD30 and 40). Port size Accessories li.

o

(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

Multistage Ejector Series ZL112.212

The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1l sealed tank. Approximately 8.8 seconds are necessary to attain a vacuum pressure of 89 kPa.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (inlet air pressure at 0.7MPa).

Air Cylinder RSQ Series Stopper Cylinder

q o 9 l l / 10i11) 20\22) M 1 0 . 2 E Min. lead wire bending radius: 10 rNole 4lTh I our shows an o.rendedpisron tod .Note Jl Lor ( lare arhro. olF roLcF -.os re p'o{deo onr o_ rFe oo qde, lNole 1l Dimensions for moders wlhoutan aulo sw ich ar61he same as the above.

•

L RR,IU1 E, A, L, t MM NX Part no A2 NDHIO boreSlzc D1l m l!:;;I~ '!I!

SMCs series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320 (310 on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed of

Size: 40, Bearing Type: L ( Ball Bushing Bearing), Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 200mm, Motor Option: C (with Motor Cover), Guide Option: w/o Guide, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type for (LEC, JXC): CM1 (JXCM1 CC-Link, Direct Input

Size: 40, Bearing Type: L ( Ball Bushing Bearing), Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 300mm, Motor Option: B (with Lock), Guide Option: w/o Guide, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type for (LEC, JXC): CM1 (JXCM1 CC-Link, Direct Input Type),

Size: 6, Motor Size: Standard, Lead Screw Type, mm: K (LEP*6: 4; LEP*10: 5), Stroke: 50mm, Motor Cable Mounting Direction: Top Entry, Actuator Cable Type: S (Standard Cable), Actuator Cable Length, m: 3, Controller Type - LEC, JXC: CM1 (JXCM1 CC-Link, Direct Input Type), I/O Cable Length for LEC: No Cable, Controller Mounting: 8 (DIN Rail Mounting), Communication Plug Connector or I/O Cable