20

Flow-rate Characteristics Note) Values when the main valve is fully open Male thread nozzle High efficiency nozzle 1L = 0.035 SCFM 1L = 0.035 SCFM 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 1500 1400 1300 1200 1100 1000 900 800 700 600 500 400 300 200 100 400 VMG1-R02-400:4 KNH-R02-200 VMG1-R02-350:3.5 350 VMG1-R02-300:3 Flow rate [

Multistage Ejector (N)ZL Series

1 2 3 4 5 6 Time to reach vacuum [S] Time to reach vacuum [S] Viewing the graphs The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for work pieces, etc., starting from atmospheric pressure in a 1l sealed tank.

CLA

1l!l!

PA3000/5000/PAX1000

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (inlet air pressure at 0.7MPa).

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(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

FSQ seies

q o 9 l l / 10i11) 20\22) M 1 0 . 2 E Min. lead wire bending radius: 10 rNole 4lTh I our shows an o.rendedpisron tod .Note Jl Lor ( lare arhro. olF roLcF -.os re p'o{deo onr o_ rFe oo qde, lNole 1l Dimensions for moders wlhoutan aulo sw ich ar61he same as the above.

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Note 1l Withoul a valve functon. Note 2) For NPT rhread type Note 2) Dfan glde s G1/4 (app cab e ro AFD30 and 40). Port size Accessories li.

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(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

Multistage Ejector Series ZL112.212

The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1l sealed tank. Approximately 8.8 seconds are necessary to attain a vacuum pressure of 89 kPa.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (inlet air pressure at 0.7MPa).

Air Cylinder RSQ Series Stopper Cylinder

q o 9 l l / 10i11) 20\22) M 1 0 . 2 E Min. lead wire bending radius: 10 rNole 4lTh I our shows an o.rendedpisron tod .Note Jl Lor ( lare arhro. olF roLcF -.os re p'o{deo onr o_ rFe oo qde, lNole 1l Dimensions for moders wlhoutan aulo sw ich ar61he same as the above.

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L RR,IU1 E, A, L, t MM NX Part no A2 NDHIO boreSlzc D1l m l!:;;I~ '!I!

PF-OMM0004_C

L/min 0.0) 1.722.0 L/min ( 1.7 L/min 0.0) 0.355.50 L/min ( 0.35 L/min 0.00) 20350 L/min ( 20 L/min 0) 7140 L/min ( 7 L/min 0) 0.355.50 L/min 1.722.0 L/min 3.555.0 L/min 7140 L/min 20350 L/min 0.01 L/min 0.1 L/min 1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 090 () 070 ( ) L/minL 3F.S. 3F.S. 2F.S. 2 5%F.S.(25 ) 3 3 9.9 L 9 L 4 0.1L 0.5L 1L

FILTER REGULATOR

Too much air leaks from bleed hole Leakage more than Dust adheres to exhaust valve seat Remove bonnet and spec. [1L / min (ANR) ] with no cause of reverse flow diaphragm to remove dust of seat Air leak from drain cock Drain cock open?

HRX-OM-M005

The flow rate setting is allowed in 1L/min increments. Alarm is disabled if the selection is 0. 6 LOW FLOW 10LPM [SET] key Used to display the Ten-key screen on page 5-9, which allows numerical input and setting. The CH1(2) setting data screen 1, 2 are alternately displayed. The CH1(2) setting data screen 3 on page 5-8 is also displayed if the optional DI control kit is provided.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Control Unit Specifications Control Unit/Option VVFS2000-24A-1R (D side mounting) VVFS2000-24A-1L (U side mounting) VVFS2000-24A-2R (D side mounting) VVFS2000-24A-2L (U side mounting) Air filter (With auto-drain/With

-fl Seies

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Function | . l Seal type N/eta seal Low wanage lype (0 5W) Note) For rlbber sea type ony l.lo:e 1l Formela sea lype ony Note 2) When specl'rng more than one oplron enlersymbols nalphabelical Note3) Roplon.otavarabletor4poslion dua 3 port vares lTvpe oJ actLraton A , 8 C ) Also available VO5000 manifold Two 3 port valves built lnlo one body.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!