Step Motor Driver （ Pulse input type ）

/External stopper(-23) Max force 50 50 50 Para protect 1 1 1 Enable SW 2 2 2 Unit name Part no. of each product W-AREA1 0.00 0.00 0.00 W-AREA2 0.00 0.00 0.00 ORG Correct 0.00 0.00 0.00 Sensor type 1 1 1 Option set1 1 1 1 Undefined parameter11 1 1 1 Undefined parameter12 1 1 1 LER Return to origin parameter default Model LER10K LER10J LER30K LER30J LER50K LER50J ORIG direction 2 2 2 Return

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LER30J-1, I/O cable length / communication plug(m): Without I/O cable, Controller/driver mounting method: Screw mounting type

Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5)

Table Accuracy: Basic, Size: 30, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 1.5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable Length for

NCQ2/CQ2

Series CQ2 Stroke S2 Stroke S1 B L 1 B2 A Bore Size: 12, 16 (mm) Symbol L Stroke range B A 1 B2 S1 S2 Bore size 52.9 (63.9) + Stroke (S1 + S2) 58 (70) + Stroke (S1 + S2) 17 (28) + Stroke S1 18.5 (30.5) + Stroke S1 32.4 + Stroke S2 36 + Stroke S2 12 3.5 5 to 30 35 to 50 16 3.5 5 to 30 35 to 50 Bore Size: 20, 25 (mm) A B1 B2 Symbol Stroke range Stroke S2 55 to 75 80 to 100 Stroke S2 L Stroke

Compact Cylinder

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 Bore size 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) + Stroke S1 170.5 (180.5) + Stroke S1

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

JXCx-OMT0023

USB Note 1. The built-in regenerative resistor is not provided for LECSA-S1 2. For the specification of power supply, refer to section 1.3. 1 4 1.

Made to Order

CQS series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2) (mm) Bore size (mm) Stroke Both of S1, S2 A B L 12 3.5 41 (51) 17 (22) 5 to 30 16 17 (22) 3.5 41 (51) 20 19.5 (29.5) 4.5 48 (68) -X -X 5 to 50 25 22.5 (32.5) 5 55 (75) Note 1) ( ): Denotes the dimensions with auto switch.

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Vacuum Module Series ZX

) M3 Note) Dimensions : For mounting bracket A : For mounting spacer 1. 892 Ejector System Series ZX Vacuum Module: Adsorption confirmation switch (ZSP1) ZX1-J2-P Spacer 1 (ZX1-S1) (For side mounting) Spacer 1: ZX1-S1 ZA 41 1 2 x R1.8 ZX 51 ZR A: Release flow rate adjusting needle with lock nut Adjusting needle (Mounting hole) ZM 2 x R1.8 (Mounting hole) 1 10 3.6 (Mounting hole) 17.6 ZMA

Metal Seal/Rubber Seal Series VQ Body Ported

Note 3) Note 4) Kit/Electrical entry/Cable length F P kit (D-sub connector) kit (Flat ribbon cable connector) 25P Note 1) 26P Note 1) 25P Note 1) 26P Note 1) Top entry Side entry Top entry Side entry Connector entry direction Top entry Side entry U0 U1 U2 U3 Connector entry direction Top entry Side entry U0 U1 U2 U3 P. 2-4-38 P. 2-4-42 S0 S1 S2 S3 S0 S1 S2 S3 Without cable With cable (1.5

1

X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket MY2H X168 Bore size Stroke Auto switch Suffix X417 1 1 1 1 2 1 1 L, H, LS, HS Nil W Z L H LZ HZ Nil W L H With X416 (1 pc.) on only one side With X416 (2 pcs.) (With each 1pc. for both sides) With X416 on one side, X417 on the other side (1 pc.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

Electric Actuator

51 56.5 M8 x 1.25 31 22 18.5 40 10 60 118 1 56.4 68.4 95.4 34 13 101 to 500 178.5 160 Motor left side parallel type/LEY L 16 25 32 Motor right side parallel type/LEY R 16 25 32 U S1 U S1 T2 T2 (mm) S1 T2 U Size 16 25 32 35.5 67 0.5 47 91 1 61 117 1 Note) When the motor is mounted on the left or right side in parallel, the auto switch groove on the side to which the motor is mounted is

LEC-OM071xx

1 1 Outline 1.

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Base Mounted Metal Seal/Rubber Seal Series VQ

P (1) U S P kit J kit F kit w AXT100-1-J 20 (1) U S U S VQZ AXT100-1-F (1) e Note 1) Top (vertical) entry connector for FU, PU and JU while side (horizontal) entry connector for FS, JS and PS.

Electric Actuator

2 (ISO14644-1)!

Step Motor Controller

1 to !4.