SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

Step Motor Driver （ Pulse input type ）

/External stopper(-23) Max force 50 50 50 Para protect 1 1 1 Enable SW 2 2 2 Unit name Part no. of each product W-AREA1 0.00 0.00 0.00 W-AREA2 0.00 0.00 0.00 ORG Correct 0.00 0.00 0.00 Sensor type 1 1 1 Option set1 1 1 1 Undefined parameter11 1 1 1 Undefined parameter12 1 1 1 LER Return to origin parameter default Model LER10K LER10J LER30K LER30J LER50K LER50J ORIG direction 2 2 2 Return

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LER30J-1, I/O cable length / communication plug(m): Without I/O cable, Controller/driver mounting method: Screw mounting type

Table Accuracy: Basic, Size: 30, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 3 (3)

Oscillation Angle A: 320°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.8, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable, Actuator

Table Accuracy: Basic, Size: 30, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 2 (External Stopper: 180°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 3 (3)

Oscillation Angle A: [180°] External Stopper, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.8, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible

Fluoropolymer Piping Equipment

x 4 4 x 3 12 x 10 10 x 8 8 x 6 6 x 4 LQ1E3A-R3 LQ1E4A-R2 LQ1E4A-R3 LQ1E4A-R4 LQ1E5A-R2 LQ1E5A-R3 LQ1E5A-R4 LQ1E6A-R2 LQ1E6A-R3 LQ1E6A-R4 LQ1E6A-R5 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/16" x 0.127" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 3/16" x 0.127" 3/8" x 1/4" LQHB 4 12 x 10 TL TIL 4 1/2" x 3/8" TLM TILM 19 x 16 5 5 3/4" x 5/8" TD TID TH TIH

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

2

Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

M-E05-1-LQ1

Seat AXT1094-1-1A Table 2 Tubing size symbols Tubing O.D. Metric size Inch size 3 4 6 8 10 12 19 25 1/8" 3/16" 1/4" 3/8" 1/2" 3/4" 1" Type Body class Seat Applicable tubing size Body class Metric size 1, 2 03 (3) 5, 6 19 (19) 6 25 (25) 1 Note) 03 04 Note) 03 Tubing O.D.

2-Color Display Digital Flow Switch Series PFM

3.2 Panel thickness 1 to 3.2 Panel Fitting Dimensions Panel Fitting Dimensions 94 or more Note) 94 or more Note) 24 +0.5 0 54 +0.5 0 74 +0.5 0 24 +0.5 0 34 or more 34 or more 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom side piping

S Couplers Series KKA

Body size Port size KKA3 S-01 M-1 R1 / 8 KKA3 P-01 M-1 R1 / 8 1 / 8 1 / 8 KKA3 S-02M-1 R1 / 4 KKA3 P-02M-1 R1 / 4 KKA3 S-03 M-1 R3 / 8 KKA3 P-03 M-1 R3 / 8 KKA4 S-02M-1 R1 / 4 KKA4 P-02M-1 R1 / 4 1 / 4 1 / 4 KKA4 S-03 M-1 R3 / 8 KKA4 P-03 M-1 R3 / 8 KKA4 S-04 M-1 R1 / 2 KKA4 P-04 M-1 R1 / 2 KKA6S-03 M-1 KKA6P-03 M-1 R3 / 8 R3 / 8 1 / 2 1 / 2 KKA6S-04 M-1 KKA6P-04 M-1 R1 / 2 R1 / 2 KKA6S-06M

Table of Contents

Port size KKA3P-01M-1 -02M-1 -03M-1 KKA4P-02M-1 -03M-1 -04M-1 KKA6P-03M-1 -04M-1 -06M-1 KKA3S-01M-1 -02M-1 -03M-1 KKA4S-02M-1 -03M-1 -04M-1 KKA6S-03M-1 -04M-1 -06M-1 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Port size Body size Part no.

KJ

Port size KKA3P-01M-1 -02M-1 -03M-1 KKA4P-02M-1 -03M-1 -04M-1 KKA6P-03M-1 -04M-1 -06M-1 KKA3S-01M-1 -02M-1 -03M-1 KKA4S-02M-1 -03M-1 -04M-1 KKA6S-03M-1 -04M-1 -06M-1 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Port size Body size Part no.

Stainless Steel 316

(mm) Model 4 6 8 10 12 KQGE04-00 KQGE06-00 KQGE08-00 KQGE10-00 KQGE12-00 KQGL04-M5 KQGL04-01S KQGL06-M5 KQGL06-01S KQGL06-02S KQGL08-01S KQGL08-02S KQGL08-03S KQGL10-02S KQGL10-03S KQGL12-03S KQGL12-04S M5 4 R1/8 M5 6 R1/8 R1/4 R1/8 8 R1/4 R3/8 R1/4 10 R3/8 R3/8 12 R1/2 Features 1 Stainless Steel 316 One-touch Fittings Applicable tubing: Metric size/Connection thread: M, R Series KQG Applicable