SYJ3000/5000/7000

P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5

5 Port Solenoid Valve

L T Kit q w r !

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): 10-SYJ3243-L-M5 M8 connector (WO): 10-SYJ3243-WO-M5 M plug connector (M): 10-SYJ3243-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 M8 x 1 46 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 98.6 [103] R1 P R2 R1 P R2 R1 P R2 79 [83.4] 10 10 10 10 10 10 96.8 28 28 69 28 82 14 14 14 5 5 5 Refer to page 375 for dimensions with connector

Table of Contents

ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. F G T NPTF (Ordering example) ZXX106-R1 pc. (Manifold base) ZX1101-K15LZ-EC5 pcs. (Vacuum single unit) ZX1-BM11 pc.

5 Port Solenoid Valve

N.C. 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) N.O. N.O. 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) N.C.

0.4

(R2) (R1)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQC2301 VQC2401 VQC2300 VQC2400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQC2501 VQC2500 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC2A01 VQC2B01 2(B) 4(A) 4(A) 2(B) r 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) VQC2C01 2(B) 4(A) 1(P) 5(R1) 3(R2)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

5 port 3 Port for mixture mounting (B) 2 (A) 4 0.6 0.7 5 (R1) 1 (P) 3 (R2) Indicator light and surge voltage suppressor 3 Position exhaust center L plug connector (L) (A) 4 (B) 2 VQZ3000 (standard) 12V DC 24V DC 5 (R1) 1 (P) 3 (R2) Base Mounted Non-locking push style (Flush) 3 Position pressure center 0.9 1.2 (A) 4 (B) 2 L plug connector (L) (Option) 100V AC 200V AC 110V AC 220V AC 5 (R1

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (Mounting hole) 17.5 14 28 L plug connector (L): 10-SYJ3143-L-M5 M8 Connector (WO): 10-SYJ3143-WO-M5 M plug connector (M): 10-SYJ3143-M-M5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 64.3[66.5] 54.5[56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5

VQ5000

Note 3) When specifying more than one option, enter symbols in alphabetical order. 23 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Lead Wire Kit) L 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R2 5 R1 3 1 P SMC 2-G1 (electrical entry) 6-3/4 Ports P(SUP), R(EXH) Cable length L 0: 600mm L 1: 1500mm L 2: 3000mm U D U D U D 179 106 46.8 59.2 83.5 55.5 M5 ground screw

VQ7-6/7-8

R2 SMC R1 R2 Dimensions inside ( ) are for sub plate Dimensions inside ( ) are for sub plate Throttle valve spacer Silencer box AXT503-23A AXT503-60A Throttle valve spacer (AXT503-23A) SMC 191.5 (163.5) 179.5 (151.5) SMC 165.5 153.5 114 R1 EA S L O W B 12 PB 14 PA 1 91 (63) 65 (37) 12 PB B 1 14 PA PA PA 5 3 R 5 3 R 62 A A P P SMC SMC R1 R2 R1 R2 Dimensions inside ( ) are for sub plate 15

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

M1 1/4 3 4 3 8 6 6 4 10 8 12 10 19 12 4 LQ3U11-R1 LQ3U21-R1 LQ3U21-R2 LQ3U31-R1 LQ3U31-R2 LQ3U32-R1 LQ3U32-R2 LQ3U41-R1 LQ3U41-R2 LQ3U51-R1 LQ3U51-R2 LQ3U61-R1 LQ3U61-R2 10 9 10 9 46.5 44.5 11 14 11 14 10 M (E2,E2) (E1,E1) L,L 6 17 16 10 9 51 48.5 16 20 11 14 14 H 22.5 19.5 79 73 21 16 16 11 25 20 20 14 10 22.5 19.5 21 25 18 17 16 66.5 62 KK 17 16 66.5 62 (E1,E1,E2,E2): Reference dimension

VQ4000

R1 R2 n VQC B A VVQ4000 -10A-1 SQ 7 VQ0 B A 6 VQ440 0 1 VQ4 B A VQ5 1. Electrical entry of manifold (except L and C kit) is individual wiring. For details, refer to internal wiring figure of each kit. Cable length is 0.6 m for L kit.

VFS

L R L R Note) L: U side mount R: D side mount For details, refer to page 3-8-47. EXH block disk When valve exhaust affects the other stations on the circuit or when the reverse pressure valve is used to standard manifold valve, insert EXH block disk in between stations to separate valve exhaust.

VQ7-6/7-8

(3 position) 94 139 14 12 P PB PA 80.5 R2 R1 67 (Pilot pressure EXH port) 4-1/8 40(41.5) 38(27) 1 3 5 SMC 6-1/2, 3/4 32(35) 32(35) 35 35 L Dimension Formula L n 10 9 8 7 6 5 4 3 1 2 P , R1, R2 port n: Stations L1 = 56n + 64 L2 = 56n + 80 n: Stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 232 120 176 1/2 L2 640 584 528 472 416 360 304 248 136 192 L1 650 594 538 482 426

VQ7-6/7-8

62 B A B A R1 (L 500) Cable with connector R2 P R2 R1 P (L 500) Cable with connector Mounting hole 2-6.5 42.5 42.5 Mounting hole 2-6.5 42.5 42.5 Indicator light Indicator light 93 93 25 (X port) 25 (X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 X(PE) port 1/8 R1, R2 port 2-3/8 1/8 P Port 1/4, 3/8 R1, R2 port 2-3/8 P port 1/4, 3/8 X(PE) port 3-10-9 Series VQ7-6 Construction DIN Terminal

0.4

(R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQ1A01 VQ1B01 4 (A) 2 (B) 4 (A) 2 (B) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) 1 (P) r VQ1C01 4 (A) 2 (B) 5 (R1) 3 (R2) 1 (P) Component

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note 3) When specifying more than one option, enter symbols in alphabetical order. 23 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Lead Wire Kit) L 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R2 5 R1 3 1 P SMC 2-G1 (electrical entry) 6-3/4 Ports P(SUP), R(EXH) Cable length L 0: 600mm L 1: 1500mm L 2: 3000mm U D U D U D 179 106 46.8 59.2 83.5 55.5 M5 ground screw

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Vacuum Module Series ZX

PV PS PD PE R16 PV PS PD PE R1 ZMA Dummy spacer ZX1-R16 Individual air supply port PV ZQ Pressure sensor Pressure sensor Dummy spacer ZX1-R16 Dummy spacer R16 R1 ZH Individual spacer ZX1-R1 39.9 ZU ZL A cross section Dummy spacer R16 ZY External release port External release port Pilot pressure EXH port (PE) M3 ZF Pilot port Pilot port + + ZP Individual spacer R1 Individual spacer R1 SMC

Plug-in/Plug Lead: Single Unit

Note 3) 2-6-23 Base Mounted Series VQ5000 Kit (Lead wire cable) L 83 29.5 29.5 2-Rc 1/8 (Pilot EXH port) 12 21 47.5 36 PE R2 5 R1 3 1 P 2-G1 (Electrical entry) SMC 6-Rc 3/4 1(P), 5(R1), 3(R2) port Cable length L 0: 600 mm L 1: 1500 mm L 2: 3000 mm U D U D U D 179 106 46.8 59.2 83.5 U side Station number 55.5 M5 ground screw 9 9 Electrical entry on U side (LU) 19 34.5 n 12 X 2n-Rc 3/8, 1/2