HRX-OM-Z002

Model No.HRLE090-20/40 * This pump capacity is flow rate of CH1 when flow rate of CH2 is 2L/min. Fig. 6-1 Pump capacity diagram (standard product) Model No.HRLE090-20/40-P * This pump capacity is flow rate of CH1 when flow rate of CH2 is 2L/min.

JXCx-OMT0023

Internal torque control mode Position control mode Position control mode Internal speed control mode PD05 *DI2-1 Input signal device selection 2L (CN1-4) 0202h Refer to Any input signal can be assigned to the CN1-4 pin. The devices that can be assigned and the setting method are the same as in parameter No. PD03. the name and function field. Select the input device of the CN14 pin.

HRX-OM-M005

If the product is under no or light load, it is operational at approx. 1 to 2L/min of facility water. *10: The rated flow is a required flow rate to maintain cooling capacity and temperature stability.

Digital Flow Switches, Series PF2A, Series PF2W

PF2A711 PF2A721 PF2A751 Air, Nitrogen Model Measured fluid Flow rate measurement range Set flow rate range Flow rate measuring range Minimum set unit 0.5 to 10.5l/min 0.5 to 10.5l/min 1 to 10l/min 0.1l/min 0.1l/pulse 2.5 to 52.5l/min 2.5 to 52.5l/min 5 to 50l/min 0.5l/min 0.5 l/pulse 5 to 105l/min 5 to 105l/min 10 to 100l/min 1l/min 1l/pulse 10 to 210l/min 10 to 210l/min 20 to 200l/min 2l

Fluoropolymer Piping Equipment

LQ1E41-R4 LQ1E51-R2 LQ1E51-R3 LQ1E51-R4 LQ1E51-R5 LQ1E61-R2 LQ1E61-R3 LQ1E61-R4 LQ1E61-R5 3 8 x 6 6 x 4 4 x 2 10 x 8 8 x 6 6 x 4 4 x 3 12 x 10 10 x 8 8 x 6 6 x 4 LQ1E3A-R3 LQ1E4A-R2 LQ1E4A-R3 LQ1E4A-R4 LQ1E5A-R2 LQ1E5A-R3 LQ1E5A-R4 LQ1E6A-R2 LQ1E6A-R3 LQ1E6A-R4 LQ1E6A-R5 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/16" x 0.127" 1/2" x 3/8" 3/8" x 1/4

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

M-E05-1-LQ1

Nut Insert bushing Nut Insert bushing LQ1E3A-R3 3 4-11 LQ1-4N11 LQ1-4B11 2-03 LQ1-2N03 LQ1-2B03 LQ1E4A-R2 4 4-13 LQ1-4N13 LQ1-4B13 3-07 LQ1-3N07 LQ1-3B07 LQ1E4A-R3 4 4-13 LQ1-4N13 LQ1-4B13 2-05 LQ1-2N05 LQ1-2B05 LQ1E4A-R4 4 4-13 LQ1-4N13 LQ1-4B13 2-03 LQ1-2N03 LQ1-2B03 LQ1E5A-R2 5 6-19 LQ1-6N19 LQ1-6B19 3-11 LQ1-3N11 LQ1-3B11 LQ1E5A-R3 5 6-19 LQ1-6N19 LQ1-6B19 3-07 LQ1-3N07 LQ1-3B07 LQ1E5A-R4

2-Color Display Digital Flow Switch Series PFM

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom side piping.

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

KJ

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model

Table of Contents

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model

Stainless Steel 316

(mm) Model R3/8 4 6 8 10 12 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 R1/4 10 R3/8 R3/8 12 R1/2 Straight Union Straight Union Union Y Union Y Applicable tubing O.D. (mm) Model Applicable tubing O.D.

HEC_001W-E

Select piping length and size in order to have a recirculating fluid flow more than 2L/min. If the flow is less than 2L/min the temperature stability will be poor. The product may be damaged from continually changing between cooling and heating. 6-3 Operation 6.2 Wiring 6.2.1 Power supply The power supply shall be connected with supplied power supply cable.

CATALOG

2 80 3.14 100 4 0.16 0.16 NCRB50 2.64 3.38 0.77 1.55 0.47 0.98 1.18 M6x1x10 NPT 1/8 0.79 0.12 0.39 0.51 0.20 0.53 1.34 1.97 0.20 0.20 NCRB80 3.74 4.06 0.93 2.11 0.67 1.18 1.77 M8x1.25x13 NPT 1/4 1.42 0.12 0.51 0.63 0.20 0.75 1.57 2.75 0.28 0.28 NCRB100 4.92 4.92 1.18 2.56 0.98 1.77 1.97 M10x1.5x13 NPT 1/4 1.57 0.16 0.75 0.87 0.20 1.10 1.97 3.15 Model Bracket No Includes NCRB50 CRB50-Y-1 2L

Title not found

Supply/Exhaust block assembly specif ication Internal prloi specihcal on Internal pilot/Bu 1-rn srlencer Exlerna piol specif cahon o. a man fcd slato.s Nole 2l Specr,cd ayoul l.d,cate v/r ig spec hca:ons on a man Ioa spec rrca:on shecl Nole thal Co!be arc 3 los lron vaves cannol bc uscd vrnere s nq e so eno o !ufrng Wfer llie bL I ii s eicer lype s !

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MB1 CA2 l l CS1 C76 With rod boot (Both sides) C85 Width across flats KA Width across flats KA C95 CP95 e E NCM NCA l l l + Stroke h + l + Stroke S + Stroke ZZ + 2l + 2 stroke D-X Stroke range (mm) Bore size (mm) Type C D E EA F P FA G A AL B K KA

Title not found

(mm) Model R3/8 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 4 6 8 10 12 R1/4 10 R3/8 R3/8 12 R1/2 Straight Union Straight Union Union "Y" Union "Y" Applicable tubing O.D. (mm) Model Applicable tubing O.D.

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3

Table of Contents

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3