M-E05-1-LQ1

Nut Insert bushing Nut Insert bushing Nut Insert bushing LQ1T21-ST1 2 2-06 LQ1-2N06 LQ1-2B06 Applicable body size 2 2-06 LQ1-2N06 LQ1-2B06 LQ1T21-ST2 2 Applicable body size 2 2-06 LQ1-2N06 LQ1-2B06 2-06 LQ1-2N06 LQ1-2B06 LQ1T21-ST3 2 2-06 LQ1-2N06 LQ1-2B06 Applicable body size 2 LQ1T21-ST4 2 Applicable body size 2 2-06 LQ1-2N06 LQ1-2B06 LQ1T31-ST1 3 3-10 LQ1-3N10 LQ1-3B10 Applicable body

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 3 (External Stopper: 90°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 5 (5)

Table Accuracy: Basic Type, Size: 10, Max. Rotation Torque: J (Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6), Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 5 (5m)

Table Accuracy: Basic Type, Size: 10, Max. Rotation Torque: J (Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6), Motor Cable Entry: L (Entry of Left Side), Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 5 (5m)

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 90°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable

Table Accuracy: Basic Type, Size: 10, Max. Rotation Torque: Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Robotic Cable, Flexible Cable, Actuator Cable Length: 5m, Controller Type - JXC: -, Controller Mounting: -, Communication Plug Connector for DeviceNetâ„¢: -

Oscillation Angle A: 360°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Others, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.22, Size: 10, Motor cable entry direction: Entry on the left side, Actuator cable type: Robotic (flexible) cable, Actuator cable

Battery-less

Size Order no. 20 16 LE-D-2-7 25 LE-D-2-2 32, 40 LE-D-2-3 Replacement Parts/Grease Pack Applied portion Order no.

AHC System Series MA

1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 MA3 0-YNM5 MA3 0-YNM5-R1 MA3 0-YNM5-R2 MA3 0-YNM5-R3 MA3 0-YNM5-R4 MA3 0-YNM5-R5 MA3 0-YNM5-S6 MA3 0-YNM5-R6 MA3 0-AM3 MA3 0-AM5 440 Electrical contact points: 12 10 11 35 14 AHC unit 15 520 20 24 41 25 250 Tool adapter 270 750 AHC System Series MA3 AHC Unit and Tool Adapter/Double Acting Type 1 2 1 2 1 2 AHC Unit/MA3 1-YNM5 (Without robot adapter) AHC

Metal Seal/Rubber Seal Series VQ Body Ported

Series VQ1000 Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-80 P kit 2-4-4 Manifold Variations C S L Port size kit kit SUP EXH port Cylinder port Lead wire Serial transmission unit VQC P

Vacuum Module Series ZX

(VJA314) ZX1-VJA3 4 1 2 Z L 4 2 5 ZX1-VJ3 1 ZX1-VJ114K1, J1 AMV Manual override Type of actuation ZX1-VJ3 4 1 2 2 K3, J2 AEP N.C. (Normally closed) N.O.

Large Size Vacuum Module: Series ZR

X, Y, Z directions, for 2 hours each 2% F.S.

VQZ1000/2000/3000

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Circuit with Indicator Light AC circuit DC circuit 1 2 1 2 NL R R LED NL: Neon light R: Resister LED: Emitting diode R: Resister 2-7-33 Base Mounted 34 34 Series VQZ1000/2000/3000 Be sure to read before handling.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

2

(See Fig. 2.)

10

Applicable fluid 1 Model Air Water Oil Steam Medium vacuum For Air For Air VX2 0 Page 5 2 For Medium vacuum For Medium vacuum VX2 4 Page 10 2 For Water For Water VX2 2 Page 14 2 2 For Oil For Oil VX2 3 Page 16 Can be used with heated water. 2 2 2 For Steam For Steam VX2 5 Page 18 1 For details, refer to pages 45 and 46. 2 Refer to the individual specifications for each fluid.

For post-stoppage positioning and locking

4 3 Connector pin arrangement Type Connector pins and arrangement 1 2 3 4 E2E-X7D1-M1J-T10.3M OUT ( ) OUT () 1 Pallet Lock Cylinder W-R1/W-R3 Series Dimensions W-R1-S2Position of fulcrum 2 x 18.5 Proximity switch mounting bracket 68 Proximity switch (Option) 117 15 15 26 26 2 x Rc3/8 36.5 6.5 R5 30 50 190 117 250 220 200 140 30 60 2 x M8 x 1.25 thread depth 13 (External cover mounting

Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 2 (External Stopper: 180°)

Oscillation Angle A: [180°] External Stopper, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.22, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Without cable, Actuator cable

V100

actuation Port size {2(A) port} (A) 2 N.C.