Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

V 100, 110, 200, 220 10% of rated voltage 2 position double solenoid 2 position double Allowable voltage fluctuation (B) 2 (A) 4 (A) 4 (B) 2 Standard 0.35 {With indicator light: 0.4 (DIN connector with indicator light: 0.45)} 0.1 (With indicator light only) DC Power consumption (W) With power saving circuit 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) 100V 110V [115V] 200V 220V [230V] 0.78 (

0.4

)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1)

0.4

) 3 (R2) 1 (P) 5 (R1) e q w e w q VQC1200 VQC1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQC1301 VQC1401 VQC1300 VQC1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQC1500 VQC1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQC1A01 VQC1B01

Fluoropolymer Piping Equipment

LQ3U21-R1 LQ3U21-R2 LQ3U31-R1 LQ3U31-R2 LQ3U32-R1 LQ3U32-R2 LQ3U41-R1 LQ3U41-R2 LQ3U51-R1 LQ3U51-R2 LQ3U61-R1 LQ3U61-R2 LQ3U2A-R1 LQ3U3A-R1 LQ3U3A-R2 LQ3U4A-R1 LQ3U4A-R2 LQ3U5A-R1 LQ3U5A-R2 LQ3U5A-R3 LQ3U6A-R1 LQ3U6A-R2 LQ3U7A-R1 LQ1 6 x 4 3/8" x 1/4" 2 3 LQ3 LQ3 10 x 8 1/2" x 3/8" 4 3 LVN 8 x 6 3/4" x 5/8" 5 LQHB 12 x 10 4 1" x 7/8" TL TIL 6 19 x 16 5 1 1/4" x 1.1" 7 TLM TILM Note) For

High Vacuum Angle Valve

100 160 Switch Heater Indicator High-temperature type XLA-100/160-X152 Single acting (N.C.) 106 to atmospheric pressure 1010 1011 XLC-100/160-1-X152 Double acting 1 When the standard seal material (FKM) is used XLA/C-100/160(-1)-X152 18-E692 Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal XLA-100/160-X152 How to Order XLA 100 w e r q X152 A M9N u t y Improved durability of

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

5 Port Solenoid Valve

N.C. 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) N.O. N.O. 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) N.C.

0.4

) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQ1A01 VQ1B01 4 (A)

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Port Symbol Caution VF1000 VF3000 VF5000 Supply P P (SUP) P Cylinder A, B A (CYL2) B (CYL1) A, B Connector R1 (EXH2) R2 (EXH1) R1, R2 EXH outlet EA, EB Lead wire JIS symbol Single solenoid Socket Hook 1: P (SUP) 2: B (CYL.1) 3: R2 (EXH.1) 4: A (CYL.2) 5: R1 (EXH.2) 1: P 2: B 3: R2 4: A 5: R1 Plug Connector Lead Wire Length 1: P 4: A 2: B 5: R1 3: R2 Standard length is 300 mm, but the following

Aluminum High Vacuum Angle Valve

Note 2) For other rated voltages (48, 100 VDC), please consult with SMC.

VQ4000

) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position double check

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3U21-R1 LQ3U21-R2 LQ3U31-R1 LQ3U31-R2 LQ3U32-R1 LQ3U32-R2 LQ3U41-R1 LQ3U41-R2 LQ3U51-R1 LQ3U51-R2 LQ3U61-R1 LQ3U61-R2 LQ3U2A-R1 LQ3U3A-R1 LQ3U3A-R2 LQ3U4A-R1 LQ3U4A-R2 LQ3U5A-R1 LQ3U5A-R2 LQ3U5A-R3 LQ3U6A-R1 LQ3U6A-R2 LQ3U7A-R1 4 x 3 1/4" x 5/32" 3 x 2 4 x 3 3 x 2 8 x 6 6 x 4 6 x 4 4 x 3 10 x 8 8 x 6 12 x 10 10 x 8 19 x 16 12 x 10 1/8" x 0.086" 1/4" x 5/32" 1/8" x 0.086" 3/8" x 1/4" 1/

Table of Contents

KB 1 H S Model With sealant (Male thread only) Standard specifications Female Connector Elbow Union: KBL Tube size/Connection thread size Body size T Connection thread Model KBL1-R1S KBL2-R1S KBL2-R2S R1 8 Male Connector Socket: KBB Female Connector Socket: KBS KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S R1 2 R3 8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-

Refrigerated Air Dryers

IDF1E 0.75 Rc3/8 IDF2E 1.5 IDF3E 2.2 IDF4E 3.7 Rc1/2 IDF6E 5.5 Rc3/4 IDF8E 7.5 IDF11E 11 IDF15E1 15 Rc1 IDF22E 22 R1 IDF37E 37 R1 1/2 IDF55E 40C 0.7 MPa 55 R2 IDF75E 75 35C 0.7 MPa Model Rated inlet condition Applicable air compressor [kW] Port size IDF100F 100 R2 IDF125F 125 65 (2 1/2B) Flange IDF150F 150 80 (3B) Flange IDF190D 190 IDF240D 240 100 (4B) Flange IDFlE 40C 0.7 MPa IDF370D 35C

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

kPa 100 kPa 100 kPa IO-Link compatible/ L type 0 0 0 0 100 kPa 101 kPa 100 kPa 100 kPa 100 kPa 101 kPa 100 kPa 100 kPa 100 kPa 500 kPa 500 kPa 1.5 MPa 500 kPa 500 kPa 2 MPa 4 MPa 2 outputs (NPN/PNP)/IO-Link4 2 outputs (NPN/PNP) Analog (Voltage/Current)5 Analog (Voltage/Current) IP65 IP65 M5 female thread, R1/8, NPT1/8 R1/41, NPT1/41, G1/41, Rc1/8, URJ1/42, TSJ1/43 Copy function5, Auto-shift

Vacuum Module Series ZX

PV PS PD PE R16 PV PS PD PE R1 ZMA Dummy spacer ZX1-R16 Individual air supply port PV ZQ Pressure sensor Pressure sensor Dummy spacer ZX1-R16 Dummy spacer R16 R1 ZH Individual spacer ZX1-R1 39.9 ZU ZL A cross section Dummy spacer R16 ZY External release port External release port Pilot pressure EXH port (PE) M3 ZF Pilot port Pilot port + + ZP Individual spacer R1 Individual spacer R1 SMC

One-touch Fittings

/8 02 R1/4 03 R3/8 04 R1/2 Applicable tubing O.D.

Plug-in/Plug Lead: Single Unit

with AMC610-10 installed ( 105 with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159(172.5) 159(172.5) 118 (135) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) 158.7 158.7 6-Rc 3/4 1(P), 5(R1), 3(R2) port 6-Rc 3/4 1(P), 5(R1), 3(R2) port 2-G1 (Electrical entry) 47.5

5 Port Solenoid Valve Series SV1000/2000/3000/4000

1.0 1.2 1.4 1.6 1.8 2.0 400 MB 50 10% 30% 70% 300 Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 50% AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 AS3201F -03-10 200 100 0 SV300 ANA1 -C12 T1075 400 MB 80 300 AS4000-03 200 100 0 400 MB 100 300 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s

ZX

ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. F G T NPTF (Ordering example) ZXX106-R1 pc. (Manifold base) ZX1101-K15LZ-EC5 pcs. (Vacuum single unit) ZX1-BM11 pc.