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www.stevenengineering.com I 7.9 PRESSURE SENSORS SERIES PS1000/1100 PRESSURE SENSOR SERIES PS1000/1100 Very compact Lightweight and robust Vacuum or pressure Adjustable T E C H N I C A L SPECIFICATIONS SERIES PS1000/1100 Model No PS1000-R06L PS1100-RO6L Fluid Air Operating Pressure Range -0.1~1.0MPa (-14.5~145PSI) Setting Pressure Range -0.1~0.45MPa (-14.5~65PSI) -0.1~0.4MPa (-14.5~60PSI)

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

225 401 to 500 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 501 to 600 20 to 900 12 to 540 6 to 270 3 to 135 24 to 1100 16 to 750 8 to 400 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 601 to 700 20 to 630 12 to 420 6 to 230 3 to 115 24 to 930 16 to 620 8 to 310 4 to 125 30 to 1200 20 to 900 10 to 440 5 to 220

Slider type LEFB series 3.1 Specification LEFB25,32,40 AC servo motor (100W / 200W/400W/) Model LEFB25 LEFB32 LEFB40 300,400,500,600,700, 800,900,1000,(1100), 300,400,500,600,700, 800,900,1000,(1100), 300,400,500,600,700, 800,900,1000,(1100), 1200,(1300,1400),1500, (1600,1700,1800,1900), 1200,(1300,1400),1500, (1600,1700,1800,1900), 1200,(1300,1400),1500, (1600,1700,1800,1900), Stroke [mm

15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000 500 601 to 700 700 420 210 930 620 310 1410 940 470 Stroke 701 to 800 550 330 160 750 500 250 1140 760 380 Speed [mm/s] Note2) range 801 to 900 610 410 200 930 620 310 Actuator specification 90 to 1000 510 340 170 780 520 260 1001 to 1100

R1 1.5 RA 10 * R3 3 RB 15 * R5 5 RC 20 * Applicable Stroke Table *Produced upon receipt of order Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 Controller *Refer to catalog 16 25 32 40 Caution The actuator body and controller are sold as a package.

VBA200: Qb = 500 [l/min(ANR)] VBA400: Qb = 1100 [l/min(ANR)] Avoid pulsation Max. 0.05MPa NO VBA400 NO Judgement of flow rate Qb < Q YES VBA200 YES Can not get necessary pressure. L W Tc[s] = Select tank from table below.

) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1CW25 MY1CW25 (1000) (1000) (1000) (1000) MY1MW20 MY1MW20 30 30 (1000) (900) (1000) (900) (1000) (900) (1000) (900) Caution MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) (900) 20 20 1.

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

Unit Configuration Examples XYZ axes YZ axes Xaxis Yaxis Zaxis 1 Triple Axis P&P Unit How to Order Combination LG 240Z A0 50 20 X L E G J ZB D C Y Axis type X X axis Stroke(mm) 100 10 Ball screw specifications Axis type Z axis Rolled ball screw(mm) 15, lead 20 900 1000 1100 1200 1300 1400 1500 Symbol C 90 A0 B0 C0 D0 E0 F0 Motor specifications Motor specifications Mitsubisi Electric Corporation

Output 2 Output 3 HRR HRR Variations Model Cooling capacity [W] Heating capacity [W] (50/60 Hz) Cooling method Temperature stability Power supply Circulating fluid Option (pp. 32 to 35) Optional accessories (pp. 36 to 38) International standards (50/60 Hz) 950/1100 250/300 Air-cooled refrigeration Particle filter element for replacement Single-phase 200 to 230 VAC (50/60 Hz) HRR010

Support brackets are not for mounting; use them solely for providing support. m 100 90 (1500) (1500) (1500) (1500) 80 MY1M50 MY1M50 MY1M50 MY1M50 MY1M50 MY1M50 l l 70 MY1M40 MY1M40 MY1M40 MY1M40 (1300) (1300) (1300) (1300) 60 50 MY1M32 MY1M32 MY1M32 MY1M32 (1100) (1100) (1100) (1100) 40 MY1M25 MY1M25 MY1M25 MY1M25 MY1M25 MY1M25 30 (1000) (1000) (1000) (1000) MY1M20 MY1M20 MY1M20 MY1M20 MY1M20

www.stevenengineering.com I 7.9 PRESSURE SENSORS SERIES PS1000/1100 PRESSURE SENSOR SERIES PS1000/1100 Very compact Lightweight and robust Vacuum or pressure Adjustable T E C H N I C A L SPECIFICATIONS SERIES PS1000/1100 Model No PS1000-R06L PS1100-RO6L Fluid Air Operating Pressure Range -0.1~1.0MPa (-14.5~145PSI) Setting Pressure Range -0.1~0.45MPa (-14.5~65PSI) -0.1~0.4MPa (-14.5~60PSI)

Max. system pressure (MPa) Port size (Nominal diameter) Note 2) Body material Orifice diameter (mm) Weight (g) Effective area (mm2) C [dm3/(sbar)] b Cv AC DC (MPa) 10 6.2 1.7 Resin 3/8" 5.3 0.38 1.2 VXZ230 12 8.0 2.0 400 10 0.7 1/4 (8A) 8.5 0.44 2.4 0 1.0 1.5 Aluminum 3/8 (10A) 9.3 0.43 2.6 VXZ240 VXZ250 VXZ260 1/2 (15A) 23.0 0.34 6.0 720 15 C37, Stainless steel 3/4 (20A) 36.0 0.26 9.4 1100

stability: 0.1 C Temperature range setting: 5 to 40C High-lift pump available as standard (For HRS050) Options 592 mm With earth leakage breaker With automatic water supply function 377 mm Applicable to DI water (deionized water) piping Variations Cooling capacity (W) Cooling method Power supply International standards Model HRS012 Air-cooled refrigeration Water-cooled refrigeration 1100

MGGL Ball bushing 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Also, for long stroke operation involving vibration and impact, use of a side support is recommended even if the spacing value is within the allowable limits shown in the graph. 100 90 (1500) (1500) (1500) (1500) 80 MY1M50 MY1M50 MY1M50 MY1M50 l l 70 MY1M40 MY1M40 MY1M40 MY1M40 (1300) (1300) (1300) (1300) 60 50 MY1M32 MY1M32 MY1M32 MY1M32 (1100) (1100) (1100) (1100) 40 2.

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: G (High-performance Battery-less Absolute, Step Motor 24 VDC), Lead: A (Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 500mm