2

) Note 12) Note 12) Note 12) Note 12) Note 12) 221 Air Combination Series AC20-B to AC60-B Modular F.R.L.

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

M-E05-1-LQ1

LQ1-4N12 LQ1-4B12 3-08 LQ1-3N08 LQ1-3B08 4-12 LQ1-4N12 LQ1-4B12 LQ1T41-R3 4 4-12 LQ1-4N12 LQ1-4B12 2-06 LQ1-2N06 LQ1-2B06 4-12 LQ1-4N12 LQ1-4B12 LQ1T41-R5 4 4-10 LQ1-4N10 LQ1-4B10 4-12 LQ1-4N12 LQ1-4B12 4-12 LQ1-4N12 LQ1-4B12 LQ1T41-R7 4 4-10 LQ1-4N10 LQ1-4B10 4-10 LQ1-4N10 LQ1-4B10 4-12 LQ1-4N12 LQ1-4B12 LQ1T41-R11 4 3-06 LQ1-3N06 LQ1-3B06 3-10 LQ1-3N10 LQ1-3B10 5-12 LQ1-5N12 LQ1-5B12 LQ1T41

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Stainless Steel 316

(mm) Model R3/8 4 6 8 10 12 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 R1/4 10 R3/8 R3/8 12 R1/2 Straight Union Straight Union Union Y Union Y Applicable tubing O.D. (mm) Model Applicable tubing O.D.

2-Color Display Digital Flow Switch Series PFM

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom side piping.

Table of Contents

137 160 17 36.5 62.9 6 140 163 18.5 37.5 63.9 18.5 8 67.3 25.3 24.3 21 R3/8 49.2 57.4 52.4 25.9 51 46 20 130 153 21 32.6 59 10 133 156 22 34.4 60.8 20.9 12 219 237 21 32.6 62.8 18.5 10 86.3 30 29.7 25 R3/8 65.5 67.6 60.1 27.7 61.2 53.7 20.6 221 239 22 34.4 64.6 20.9 12 239 257 21 32.6 62.8 18.5 10 86.3 30 29.7 25 R1/2 65.5 71.1 63.6 27.7 62.9 55.4 24.1 239 259 22 34.4 64.6 20.9 12 Note 1

Battery-less

LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 a1 a a1 a2 b a2 a I = m1 + m2 3 a12 3 a22 I = m 12 a2 I = m 12 a2 I = m1 12 4a12 + b2 12 4a22 + b2 + m2 5. Thin rectangular plate (cuboid) Position of the rotation shaft: Passes through the center of gravity of the plate and perpendicular to the plate. (The same applies to thicker cuboids.) 6.

Title not found

(mm) Model R3/8 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 4 6 8 10 12 R1/4 10 R3/8 R3/8 12 R1/2 Straight Union Straight Union Union "Y" Union "Y" Applicable tubing O.D. (mm) Model Applicable tubing O.D.

ASR

20.9 160 137 36.5 17 62.9 6 140 163 18.5 37.5 18.5 63.9 8 67.3 25.3 24.3 21 R3/8 49.2 57.4 52.4 25.9 51 46 20 130 21 153 59 32.6 10 133 156 22 34.4 60.8 12 20.9 237 219 32.6 21 18.5 62.8 10 86.3 30 29.7 25 R3/8 65.5 67.6 60.1 27.7 61.2 53.7 20.6 221 239 22 34.4 20.9 64.6 12 239 21 257 62.8 32.6 18.5 10 86.3 30 29.7 25 R1/2 65.5 71.1 63.6 27.7 62.9 55.4 24.1 239 259 22 34.4 64.6 12 20.9 Note

ASR

137 160 17 36.5 62.9 6 140 163 18.5 37.5 63.9 18.5 8 67.3 25.3 24.3 21 R3/8 49.2 57.4 52.4 25.9 51 46 20 130 153 21 32.6 59 10 133 156 22 34.4 60.8 20.9 12 219 237 21 32.6 62.8 18.5 10 86.3 30 29.7 25 R3/8 65.5 67.6 60.1 27.7 61.2 53.7 20.6 221 239 22 34.4 64.6 20.9 12 239 257 21 32.6 62.8 18.5 10 86.3 30 29.7 25 R1/2 65.5 71.1 63.6 27.7 62.9 55.4 24.1 239 259 22 34.4 64.6 20.9 12 Note 1

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3T11-R1 LQ3T11-R5 LQ3T21-R1 LQ3T21-R2 LQ3T21-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 Applicable tubing O.D. 4 3 6 6 4 3 10 10 8 6 8 6 12 10 19 12 25 19 3 4 4 3 6 6 8 6 10 10 6 8 10 12 12 19 19 25 LQ 10 4 3.5 10 9 9 9 9.5 11 11 11 28.5 27.5 28.5 27.5 28.5 27.5 14 14 14 4.8 10 9 16 11 16 30.5 29.5

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm 1 This is the minimum value when the rear ported type is selected for the piping entry direction.

One-touch Fittings

[mm] Weight [g] X Y Nylon Urethane D1 M L1 4 1/8 KQ2K04-01mP1 12 8.2 7.7 10 10 14.4 12 19.5 13.3 4.8 3.4 3 5.1 1/4 KQ2K04-02mP1 17 8.2 7.7 10 10 14.4 15.4 20.5 13.3 4.8 3.4 3 14.3 6 1/8 KQ2K06-01mP1 12 10.4 9.7 12 10 14.7 14.1 22.5 13.3 8.7 6.9 4.5 5.5 1/4 KQ2K06-02mP1 17 10.4 9.7 12 10 14.7 17.5 23.5 13.3 8.7 6.9 4.5 14.7 3/8 KQ2K06-03mP1 21 10.4 9.7 12 10 14.7 19.5 25.5 13.3 8.7 6.9 4.5

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom piping.

KB

1 8 Branch Elbow Module: KBZ Rc Applicable tubing KBV3-10 10 Applicable tubing O.D. 4 6 KBZ2-08 8 KBZ3-10 10 KBZ3-12 12 KBZ4-12 KBV3-12 12 KBV4-12 KBV4-16 Rc 1 4 Model KBZ1-04 KBZ1-06 16 Rc 3 8 Applicable tubing Bulkhead Female Connector: KBE Female Connector Union: KBH T Connection thread Applicable tubing O.D. 4 Model Model KBH1-R1S KBH2-R1S KBH2-R2S KBE1-04 KBE1-06 KBE2-06 R 1 8 Air Supply

AHC System Series MA

Pull up the AHC unit 12 mm or more. 1. Supply compressed air: 0.4 to 0.7 MPa to the operating port. 2. Pull up the AHC unit 12 mm or more. 1. Supply compressed air: 0.4 to 0.7 MPa to the operating port. 2. Pull up the AHC unit 12 mm or more.

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 12 for changed part. Number corresponds with the parts number on the construction drawing.