Metal Seal/Rubber Seal Series VQ Body Ported

9.5) 45 65.5 (41.5) (33) (59.5) 58 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting for 6 Residual pressure release manual override C8: One-touch fitting for 8 C8: One-touch fitting assembly for 8 C6: One-touch fitting for 6 2-Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 4 4 4 25 B 2 (1.5) 37.5 17.5 A Dimensions Formula L1 = 22n + 24 n: Station 7.5 4 L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 46 75

Vacuum Module Series ZX

(Needle fully open) 57.4 79.1 11.5 20 1 20 1 11.5 7 7 8 8 Manual override (Push and turn the locking type override.)

Large Size Vacuum Module: Series ZR

Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).

VQZ1000/2000/3000

Note 2) Except VQZ1000 VQD Cylinder port N1 N3 N7 N9 N11 M5 02 Symbol 1/8" 5/32" 1/4" 5/16" 3/8" 1/4 thread M5 thread Applicable tubing O.D.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(Rc(PT)3/8) 9 9 (Rc(PT)1/4) (Rc(PT)1/4) 5 R5 SY A 4 B 2 SYJ 45 18 SMC B A Manual override Cover diameter 1.6 Cross section 0.34mm2 SX R1 R2 5 1 P 3 66 56 5 VK (58) VZ VF SMC VFR 56.5 54.5 A, B port VP7 26.5 20.5 13.5 13.5 11.5 SMC 9 9 VP4 18 18 M5 X 0.8 Rc(PT)1/4,3/8 PE port P port 2-Rc(PT)1/4, 3/8 R1, R2 port (Rc(PT)1/4) (Rc(PT)1/4) (Not applicable to standard.) 21 21 (Rc(PT)3/8) (Rc(PT

2

Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3

10

Size Size 1 Size 2 Size 3 2 mm 3 mm 4 mm 5 mm 7 mm 8 mm 10 mm 1/8, 1/4 6, 8 Voltage in ( ) indicates special voltage.

Protocol: L (IO-Link), Number of Axes, Special Specifications: F (1 Axis, w/STO Sub-function), Mounting: 7 (Screw Mounting), Actuator: LEH, Type: S (3 Finger), Dust Cover: None, Body Size: 32, Motor Size: Basic, Lead: K (basic), Finger Type: 3, Stroke: 8mm

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LEH, Type: S (3 Finger), Dust Cover: None, Body Size: 32, Motor Size: Basic, Finger Type: 3, Stroke: 8mm

Parallel I/O Type: 6 (PNP), Mounting: 7 (Screw Mounting), Cable Connector: None, Actuator: LEH, Type: S (3 Finger), Dust Cover: None, Body Size: 32, Motor Size: Basic, Finger Type: 3, Stroke: 8mm

Parallel I/O Type: P (PNP), I/O Cable Length, m: w/o Cable, Option: Screw Mounting, Type: S, Dust Cover: None, Body Size: 32, Motor Size: Standard, Finger Type: 3, Stroke: 8mm

Body Size: 32, Motor Size: Standard, Stroke: 8mm, Motor Cable Entry: Basic, Entry on the Left Side, Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: AP (LECPA, Pulse Input Type, PNP), I/O Cable Length for LEC: 3 (3m), Controller Mounting: D (DIN Rail)

Body Size: 32, Motor Size: Standard, Stroke: 8mm, Motor Cable Entry: Basic, Entry on the Left Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5m)

Body Size: 32, Motor Size: Standard, Stroke: 8mm, Motor Cable Entry: Basic, Entry on the Left Side, Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: Without Cable, Controller Mounting: 8 (DIN Rail Mounting)

Body Size: 32, Motor Size: Standard, Stroke: 8mm, Motor Cable Entry: Basic, Entry on the Left Side, Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 8 (8m), Controller Type - LEC, JXC: CD1 (JXCD1, DeviceNetâ„¢), I/O Cable Length for LEC: Without Cable, Controller Mounting: 8 (DIN Rail Mounting), Communication Plug Connector or I/O Cable Length for JXC: S (Straight, for DeviceNetâ

Body Size: 32, Motor Size: Standard, Stroke: 8mm, Motor Cable Entry: Basic, Entry on the Left Side, Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 1N (LECP1, Programless Type, NPN), I/O Cable Length for LEC: 1 (1.5m), Controller Mounting: D (DIN Rail)

Body Size: 32, Motor Size: Standard, Stroke: 8mm, Motor Cable Entry: Basic, Entry on the Left Side, Actuator Cable: Without Cable, Actuator Cable Length: Without Cable, Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: Without Cable, Controller Mounting: 7 (Screw Mounting)

Body Size: 32, Motor Size: Standard, Stroke: 8mm, Motor Cable Entry: Basic, Entry on the Left Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: AP (LECPA, Pulse Input Type, PNP), I/O Cable Length for LEC: 3 (3m), Controller Mounting: D (DIN Rail)

Body Size: 32, Motor Size: Standard, Stroke: 8mm, Motor Cable Entry: Basic, Entry on the Left Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: C61 (JXC61, Parallel PNP, Step Data Input Type), I/O Cable Length for LEC: Without Cable, Controller Mounting: 8 (DIN Rail Mounting), Communication Plug Connector or I/O Cable Length for JXC: 1

Body Size: 32, Motor Size: Standard, Stroke: 8mm, Motor Cable Entry: Basic, Entry on the Left Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: Without Cable, Controller Mounting: 8 (DIN Rail Mounting)