Aluminum High Vacuum Angle Valve

2-1 3 4 5 6 O-ring Part No.

1

spring pin 6-17-87 2 -XC30 Rod side trunnion 6-17-88 3 -XC34 Rod does not extend beyond non-rotating plate 6-17-90 4 -XC35 With coil scraper 6-17-91 5 -XC36 With boss in rod side 6-17-95 6 -XC37 Larger throttle diameter of connecting port 6-17-95 7 -XC38 Vacuum (Rod through-hole) 6-17-96 8 -XC42 Built-in shock absorber in head cover side 6-17-97 9 -XC51 With hose nipple 6-17-98 0 -

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

Electric Actuator

Mounting hole (Bearing surface thickness 5) CNP1 CNP2 130 120 CN1 CN3 CN2 6 5 5.5 LECSBm 40 6 Mounting hole 6 135 (Bearing surface thickness 4) 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 1 Battery included. 73 Incremental Type Series LECSA Absolute Type Series LECSB Specifications Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) AC Servo Motor Model Selection Specific

Base Mounted Metal Seal/Rubber Seal Series VQ

SI unit output and coil numbering 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.

LEC-OM071xx

1 6 Utility Functions (Fn) 6.

SV

Core wire colors 7 1 8 1 7 3 2 8 7 1 8 3 2 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 2 3 1 7 2 3 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 6 5 4 4 5 6 4 5 6 6 5 4 Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement Connections Connections

Electric Actuator

Cable color Signal Nil A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 S Standard cable Cable color Connector D terminal no. Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

Step Motor Controller

Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 57 1 Battery included.

CRBU

Model A C B D E(g6) F(h9) G J R S1 K S2 L T M N P U H Q1 V W X M5 X 0.8 M3 X 0.5 10.5 10.5 11 10 11.5 11 14 13 12 13 15.5 14 CRBUW15-lD CRBUW15-lDE CRBUW20-lD CRBUW20-lDE CRBUW30-lD CRBUW30-lDE -0.004 -0.012 0 -0.043 34 9 25 18 15.5 M3 X 0.5 6 3.5 10 M3 X 0.5 0.5 21 1.5 29 3 29 36 48 5 12 -0.004 -0.012 0 -0.043 6 14 34.5 42 10 20 17 M4 X 0.7 M5 X 0.8 7 4.5 10 M4 X 0.7 0.5 26 1.5 36 4 36 44

Series SV

Cable core wire colors 7 1 8 3 2 8 7 1 8 1 7 3 2 8 2 3 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Connections Connections Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement

Electric Actuator

connector Control circuit power supply connector Servo motor power connector 6 156 168 CNP3 CN1B CN2 CN4 Battery 6 Battery included. 27 AC Servo Motor Driver Series LECS; Specifications Series LECSA LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 Model Compatible motor capacity [W] 100 200 100 200 Incremental 17-bit encoder Compatible encoder (Resolution: 131072 pulse/rev) Power voltage [V] Allowable

Table of Contents

(3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2-4-84 Built-in silencer Built-in silencer 2-4-5 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-4-6 7 Cylinder Speed Chart Use as a guide for

Table of Contents

SUP port: 6 VAC port: 6 AMJ Misc.

PC Wiring System Series PCW

JAPAN 42 4 5 6 7 1 + *S2 S1 2 3 4 4 4 (28.5) 3 80 With cover (DIN rail mount compatible) With cover (DIN rail mount compatible) 16.7 + 28.3 CS0 CS1 YMX-F4 0 1 2 3 DC24V MADE IN JAPAN 45 4.1 4 5 6 7 1 + *S2 S1 2 3 4 5.1 (48.5) 83 10.5 10.5 (50) Branch output unit can be used for mixed connection PCW series.

ZX

VJ10-20-4A-6 2 pcs. 5A 10 ZS ZP (For DC) 4A 20 VJ10 6 Lead wire length ZCU Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 AMJ (For 110 VAC) Note) If ordering switch with 5 m lead wire, specify both switch and lead wire with connector part numbers. Ordering example) ZX100-K150Z-ECN1 pc. VJ10-20-4A-6 2 pcs. ZS-10-5A-50 1 pc. 3A 36 VJ10 6 Misc.

2

AD17-6-A AD27-6-A With bowl guard AD27-6C-A AD37-6-A AD47-6-A Normally open (N.O.)

Electric Actuator/Slider Type

0 #3 @3 @6 @7 @9 @4 #8 o t @0 @2 !6 !5 w r e #7!3!4 !7 #1 !8 #0 @5 @1 @8 !9 #6 #5 #2 Motor details Component Parts No. Description Material Note No.

Series VQ Base Mounted Metal Seal/Rubber Seal

Elbow One-touch fitting 4 for bottom piping Elbow One-touch fitting 6 for bottom piping Elbow M5 thread for bottom piping Mixed size for elbow piping Kit/Electrical entry/Cable length F Kit (D-sub connector) P Kit (Flat cable connector) Connector location Top (vertical) Side (horizontal) U0 U1 U2 U3 Connector location Top (vertical) Side (horizontal) P.1.10-170 P.1.10-174 S0 S1 S2 S3 S0 S1

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)