ASR

6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Applicable piping size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size No.

Title not found

(mm) Model KQGE04-00 KQGE06-00 KQGE08-00 KQGE10-00 KQGE12-00 4 6 8 10 12 KQGL04-M5 KQGL04-01S KQGL06-M5 KQGL06-01S KQGL06-02S KQGL08-01S KQGL08-02S KQGL08-03S KQGL10-02S KQGL10-03S KQGL12-03S KQGL12-04S M5 4 R1/8 M5 6 R1/8 R1/4 R1/8 8 R1/4 R3/8 R1/4 10 R3/8 R3/8 12 R1/2

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12

One-touch Fittings

[mm] 4 1/8 KQ2D04-01lS 10 8.2 15.8 23.3 24.3 13.3 5.7 6 3.2 8.2 6 6 3.6 9.2 1/4 KQ2D04-02lS 14 8.2 15.8 27.7 27.1 13.3 5.7 6 3.2 8.2 6 6 3.6 19 O N L1 M 6 1/8 KQ2D06-01lS 12 10.4 16.8 24.3 26.4 13.3 6.7 6 3.2 10.4 13.9 11 5.4 10.2 1/4 KQ2D06-02lS 14 10.4 16.8 28.7 29.2 13.3 6.7 6 3.2 10.4 13.9 11 5.4 19.1 3/8 KQ2D06-03lS 17 10.4 16.8 30.1 30.2 13.3 6.7 6 3.2 10.4 13.9 11 5.4 31 Q 8 1/8 KQ2D08

Refrigerated Air Dryers

*1 Values obtained from Correction Factors on page 6. 3 Check the coefficient.

AHC System Series MA

3.5 6 x M2 x 0.4 thread depth 4 (A, B, C common view) 3 0 0.02 3 Open: 22, Closed 14 0 0.02 Open: 16, Closed: 10 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 15: MHR2-15-A210 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) Hexagon socket head cap screw M3 x 12 (3 included) Mass: 130 g Mass: 210 g +0.022 0 depth 6 3 x 3 (A, B, C common view) 6 x M3 x 0.5 thread

VQZ1000/2000/3000

One-touch fitting assembly for 4 (22.5) 0.5 2n-C3, C4, C6, M5 C3: One-touch fitting assembly for 3.2 C4: One-touch fitting assembly for 4 C6: One-touch fitting assembly for 6 C6: One-touch fitting assembly for 6 45.5 2.5 M5: M5 thread M5: M5 thread 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24 stations) 21.5 L n 1 2 7.5 3 4 5 6 7 8 11 9 10 12 29 18 31 42 53 64 75 86 97

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom piping.

KB

Union: KBL Tube size/Connection thread size Body size T Connection thread Model KBL1-R1S KBL2-R1S KBL2-R2S R1 8 Male Connector Socket: KBB Female Connector Socket: KBS KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S R1 2 R3 8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-

Refrigerated Air Dryers Series IDF/IDU

Select accessories sold separately. 6 Refer to page 12.

IDX-OM-W017

. i-5 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 / . i-8 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 IDFA Series 1 6-3 . 6-3 6-4 .

S Couplers

/O.D. 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Applicable hose I.D.

155

52.3 27 32 30 42 40 50 48 63 14 17 17 22 22 27 27 36 R1/4 R3/8 R3/8 R1/2 R1/2 R3/4 R3/4 R1 D H1 A L1 Reference dimension of "R" thread after installation.

High Vacuum Angle Valve

Use within the operating temperature range. 6. The actuating piston chamber and the bellows chamber are directly connected to atmosphere. Use in an environment where dust emissions will not cause problems. (Please consult with SMC if the release of dust must be avoided.) 7.

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

SET POS. 6 6 4-R3 PB 6 6 4-R3 4-R3 191 (MAX.91) (MAX.91) 325 87 60 87 60 112 112 17-5-129 34 Series LQ 1 2 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

S Couplers Series KK/KKH/KK13

KK2P-23E -04E -06E KK3P-04E -06E -08E -10E KK4P-06E -08E -10E -12E KK6P-12E -16E KK2S-23E -04E -06E KK3S-04E -06E -08E -10E KK4S-06E -08E -10E -12E KK6S-12E -16E 3.2 4 6 4 6 8 10 6 8 10 12 12 16 3.2 4 6 4 6 8 10 6 8 10 12 12 16 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 166 S Couplers Series KK Specifications K M Fluid Air, Water KK2: 100 kPa to 1 MPa KK3: 90 kPa to 1 MPa KK4/6: 0 to 1 MPa H Operating

K35-OMW0030

Switch No. 0 (Default) 1 2 3 4 5 6 7 8 9 Slower (Speeds up gradually.) Faster 6-4-1.

IDX-OM-M051

/4 R3/4 20 50 165 475 9902 1030 950 Facility water outlet 1.3 Name and function of parts Terminal block for signal (Symbol: W5) (Symbol: W5) R3/4 R3/4 Refer to 6.3 Outer dimensions 6 5 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.