Vacuum Module Series ZX

ZX1-R1 R2 R3 R4 R5 R6 R7 R8 Symbol Part no. ZX1-R 9 R10 R11 R12 R13 R14 R15 R16 PS PS PS PS PV PV PV PV PV PV PV PV R1 R2 R3 R4 R5 R6 R7 R8 R 9 R10 R11 R12 R13 R14 R15 R16 PE PE Caution when ordering manifold PD PD PD PD PE PE The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted.

Large Size Vacuum Module: Series ZR

Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).

Metal Seal/Rubber Seal Series VQ Body Ported

235.5 225 235.5 237.5 248 250 260.5 262.5 273 L3 L4 100 110.5 2-4-40 Body Ported Series VQ0/1000/2000 Plug Lead Unit: Flip Type VQ2000 55.5 (L plug connector) AC, Latching Manual override 50.5 (L plug connector) VQC L4 L3 49 (L plug connector) 5.2 AC, Latching L2 L1 52.5 SQ 44 (L plug connector) 48 Indicator light DIN rail clamp screw 5.5 31 VQ0 12 D-sub connector mounting screw VQ4 VQ5 R5

VQZ1000/2000/3000

5 (R)-M57 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 300 58.5 <63.5> 73.5 137.5 Indicator light 62 160 < >: AC 2-7-44 Base Mounted 45 45 Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ3000 2 position single Grommet (G): VQZ3150 1(R)-G-02 03 300 (Lead wire length) 95 58 28 10.5 10.5 (For Rc 3/8) (For Rc 3/8) 9 9 24.5 mounting hole (For Rc 1/4) (For Rc 1/4) 5 R5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M): VQZ2 5 (R)lMl 0 1 01 02 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 73.5 135.5<137.5> 300 61.5<62.5> 160 58.5<63.5> < >: AC 1.12-42 VQZ1000/2000/3000 Base Mounted VQZ3000 2 position single 0 1 02 03 Grommet(G): VQZ315 (R)lGl 300 95 58 28 (Lead wire length) 10.5 10.5 24.5Mounting holes (Rc(PT)3/8) (Rc(PT)3/8) 9 9 (Rc(PT)1/4) (Rc(PT)1/4) 5 R5

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: V8 (400W Output, Absolute Encoder), Lead: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 150mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: C (w/1pc, Included), Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: S (Standard Cable), Cable

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: 400W Output, Absolute Encoder, Lead: LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 150mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: w/1pc, Included, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: Standard Cable, Cable Length: 3m, Driver Type

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

10

U side 7 6 5 4 3 2 D side Stations 1 Cable 6 to 12 G1/2 G1/2 (44) R3 R4 T E D R1, R6 R5 R2 F F n x 1/8,1/4 OUT port (For common SUP type) IN port (For individual SUP type) (mm) n (stations) Size Dimensions 2 3 4 5 6 7 8 9 10 86 100 90 108 103 121 L1 L2 L1 L2 L1 L2 122 136 126 144 144 162 158 172 162 180 185 203 194 208 198 216 226 244 230 244 234 252 267 285 266 280 270

For post-stoppage positioning and locking

green when turned ON Connector size M12 x 1 0 0.5 0.4 0.3 0.2 0.1 1 Supply pressure [MPa] 2 4 3 Connector pin arrangement Type Connector pins and arrangement 1 2 3 4 E2E-X7D1-M1J-T10.3M OUT ( ) OUT () 1 Pallet Lock Cylinder W-R1/W-R3 Series Dimensions W-R1-S2Position of fulcrum 2 x 18.5 Proximity switch mounting bracket 68 Proximity switch (Option) 117 15 15 26 26 2 x Rc3/8 36.5 6.5 R5

The LEF series slider type electric actuator features a low profile height of 46mm *. The actuators main body can be mounted without removing any exterior components, such as the cover, making installation easy. The standard equipped seal band covers the guide, ball screw and belt, preventing grease and external foreign matter from splashing and entering the LEF. There are 2 types of drivers

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Nil With R3 3 RB 15 N Without (Roller specification) R5 5 RC 20 Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 Controller Nil Without controller CH With controller C 5 H 7 T (Communication protocal Interface Communication plug connector I/O cable*2 /Input/Output) Symbol Type Applicable interface 5 Parallel inputNPN) Nil Without

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

Actuator cable type/length Stroke [mm] Robotic cable [m] Stroke Note Nil None R8 87 Size Applicable stroke R1 1.5 RA 107 50 500 16 50,100,150,200,250,300,350,400, R3 3 RB 157 450,500 R5 5 RC 207 50 800 25 50,100,150,200,250,300,350,400, 450,500,550,600,650,700,750,800 Controller 50,100,150,200,250,300,350,400, 450,500,550,600,650,700,750,800, 850,900,950,1000 50 1000 32 Nil Without controller

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

G 32 M D G B 30 C R1 C5H73 Size Motor type Motor mounting position Bearing type 25 32 40 Symbol Motor Compatible Nil Top mounting M Sliding bearing controller D In-line JXC5H JXC6H JXC9H JXCPH JXCEH High performance G Battery-less absolute Step motor 24 VDC Lead [mm] Actuator cable type/length [m] Symbol LEG25 LEG32/40 Robotic cable[mm] 6 8 Nil None R1 1.5 Stroke [mm] R3 3 30 30 50 50 R5

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

JXCD1 JXC61 D4 Lower side R Right side parallel (4)Lead [mm] L Left side parallel Size *For size 8 8 16 25 10 12 16 (2)Motor mouting position 5 6 8 In-line D C 2.5 Right side parallel R Left side parallel L *For size 16/25 (5)Storke [mm] (7)Actuator cable type/length Robotic cable [m] (8)Controller Size #Please refer to the catalog for the controller part. 8 16 25 Without cable Nil R1 R3 R5

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

R1 1.5 RA 10 * R3 3 RB 15 * R5 5 RC 20 * Applicable Stroke Table *Produced upon receipt of order Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 Controller *Refer to catalog 16 25 32 40 Caution The actuator body and controller are sold as a package.

V100

Indicator light 3.5 to 7 < >: AC 82.5 75 M plug connector (M): VQZ25(R)-M01 02 56.5 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 77.5 58 <63> 300 89 Indicator light < >: AC 4-14-31 Base Mounted 32 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ35(R)-G02 03 37 5 2-4.5 mounting hole 23.5 5 R5 Cover dia. 1.6 Manual override Cross section 0.34 mm2 2 A 45

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Indicator light 3.5 to 7 < >: AC 82.5 75 M plug connector (M): VQZ25(R)-M01 02 56.5 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 77.5 58 <63> 300 89 Indicator light < >: AC 4-14-31 Base Mounted 32 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ35(R)-G02 03 37 5 2-4.5 mounting hole 23.5 5 R5 Cover dia. 1.6 Manual override Cross section 0.34 mm2 2 A 45

(High-precision Type), Size: 25, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 400mm, Motor Option: w/o Option, Auto Switch Compatibility: C (with Includes 1 Mounting Bracket), Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: R5

Series: LEY, Size: 25, Motor Mounting Position: Top Side Parallel, Motor Type: G (High Performance Battery-less Absolute, Step Motor, 24 VDC), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 40: 8mm), Stroke: 400mm, Motor Option: W (w/Lock/Motor Cover), Rod End Thread: Rod End, Female Thread, Mounting: D (Double Clevis, Parallel), Actuator Cable Type, Length: R5 (5m), Controller: C9H (EhterNet/