Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1 220 LE-CA-3 420 LE-CA-5 700 LE-CA-8 1100 LE-CA-A 1370 LE-CA-B 2050 LE-CA-C 2720 Connector B terminal no.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 10 Max acceleration/deceleration [mm/s2] 5000 Positioning repeatability [mm] 0.01 (Lead H0.02) Lost motion[mm] Note3) 0.05 Lead [mm] 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2] Note4) 50/20 Actuation type Ball screw(LEKFS), Ball screw + Belt(LEKFSR L) Guide type Linear guide Operating temperature []

IZx-OMP0064

50 to 2000 50 to 2000 20 150 to 250 150 to 1300 100 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 30 50 to 200 50 to 1300 50 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 Energy saving static neutralization cartridge High speed static neutralization cartridge Energy saving static neutralization cartridge Energy saving high-efficiency cartridge Energy saving

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 Max acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.01 (Lead H0.02) Lost motion[mm] *2 0.05 Lead [mm] 10 5 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2] *3 50/20 Actuation type Ball screw Guide type Linear guide Operating temperature [] 5 to 40 Operating humidity [%RH] 90 or less

Thermo-chiller/Rack Mount Type

Output 2 Output 3 HRR HRR Variations Model Cooling capacity [W] Heating capacity [W] (50/60 Hz) Cooling method Temperature stability Power supply Circulating fluid Option (pp. 32 to 35) Optional accessories (pp. 36 to 38) International standards (50/60 Hz) 950/1100 250/300 Air-cooled refrigeration Particle filter element for replacement Single-phase 200 to 230 VAC (50/60 Hz) HRR010

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

gravity [mm] Model LEF LEJS40 LEJS63 LEJB40 LEJB63 LEJ LEJ 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 2000 2000 1000 1000 800 800 1500 1500 LEL L1 L1 [mm] L1 [mm] L1 [mm] L1 [mm] 600 600 1000 1000 X m Me LEM 400 400 500 500 200 200 LEY 0 0 0 0 0 10 5 15 20 0 10 5 15 20

Programless controller Step motor (servo 24 VDC)

LEFS16A LEFS16B LEFS25H LEFS25A Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s] [mm/s2] [mm/s2] 0 10 200 5 200 20 200 12 200 1 20 300 10 300 30 300 20 300 2 30 400 15 400 40 400 30 400 3 40 500 20 500 50 500 40 500 4 50 600 25 600 60 600 50 600 5 60 700 30 700 80 700 60 700 6 80 800 40 800 100 800 80 800 7 100 900 50

Table of Contents

Impact/Vibration resistance (m/s2) 150/50 Note) Manifold Possible Use dry air (Dew point: 20C or less). If using a lubricant, be sure to use a lubricant for low temperatures.

1

Mounting orientation Note 2) 150/30 IP67 (Based on IEC60529) Impact/Vibration resistance Note 2) (m/s2) Enclosure Coil rated voltage (DC) Allowable voltage fluctuation (V) 24, 12 V 10% of rated voltage Note 3) Standard 0.35 (With indicator light: 0.4) 0.9 (With indicator light: 0.95) High pressure type, Quick response type Power consumption (W) Standard: 0.1 Note 4) (With indicator light

Magnetically Coupled Rodless Cylinder

Do not drop, bump or apply excessive impacts (300m/s2 or more for reed switches and 1000m/s2 or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 2. Do not carry a cylinder by the auto switch lead wires. Never carry a cylinder by its lead wires.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

MY1

) (1100) (1100) (1100) L L 40 40 (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1CW25 MY1CW25 (1000) (1000) (1000) (1000) MY1MW20 MY1MW20 30 30 (1000) (900) (1000) (900) (1000) (1000) Caution MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1CW16 (900) (900) (900) (900) (900) (900) 20 20 1.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

1.1

242 342 402 452 115 230 400 560 242 342 402 452 115 230 400 560 850 1100 23 Series HRG Operation Panel Display HRG001/002/005 No.

OMU0023

Address Description of bytes tion unit range Input Mode D0410 4 Target position [m] Note 1) 1 Note 1) No D0412 2 Positioning time [0.01s] 1 0 to 6000 No D0413 2 Speed [mm/s] 1 0 to 400 No D0414 2 Acceleration [mm/s2] 1 0 to 60 No D0415 2 Deceleration [mm/s2] 1 0 to 60 No 1 to 20, Pushing speed [mm/s] D0416 2 1 No 32768 to Note2) 32788 Thrust setting value Note 3) More than D0417 2 1 Yes [

Basic type / Direct mount type Series CY3B/CY3R

Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 120 in vacuum environments (1.3 x 104 Pa) low leakage, and low outgassing.

Rotary Table/

Do not drop, bump or apply excessive impacts (300m/s2 or more for reed switches and 1000m/s2 or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 2. Do not carry a cylinder by the auto switch lead wires. Never carry a cylinder by its lead wires.

Compact Rotary Actuator Series CRQ2

Do not drop, bump or apply excessive impacts (300 m/s2 or more for reed auto switches and 1000 m/s2 or more for solid state auto switches) while handling. Although the body of the auto switch may not be damaged, the inside of the auto switch could be damaged and cause malfunction. 2. Observe the proper tightening torque for mounting an auto switch.

MONOSASHI-KUN WITH BRAKE CONTROLLER

Program P1 P2 P3 P16 S1 S1 S1 S1 S2 S2 S2 S2 Step S32 S32 S32 S32 Following are CEU2s special feature: 1. Predictive Control & Learning Function (Allow High Repeatability and Precision, 0.5mm) With learning function, after every execution, brake point will be amended, according to the deviation of stopping position from setting position.

CEx-OMQ0013

P16 s1 s1 s1 s1 s2 s2 s2 s2 ... ... ... ... s32 s32 s32 s32 0.5mm) 1 2 , 2. 30mm 30mm 3.