LEC-OM07605CN

(1) 0+55() 0+40() -20+65() -15+70() 90%RH() 80%RH() 90%RH() () 1000m LECSS2-T5 LECSS2-T7 LECSS2-T8 LECSS2-T9 () 5.9m/s2 XY49m/s2 (2) (FR-BIF) (UVW), A 5 (UVW)(UVW) U U U U V V M V M V W W W W DC DC 24 V DC 24 V DOCOM DOCOM RA RA U,V,WCN2 (3) (4) A 6 () (5) DC24V ALM()MBR( ) RA B U DC 24 V (6) 10 (7) A 7 () 1.(:) (1) (2) 2.(:) (1) 1 (2) (3) (4) , [](:) EEP-ROM

SMC Pneumatic Clean Series

With air cushion WA 2-M5 x 0.8 Relief port GB 2-P (Rc, NPT, G) GA GA RA MM H1 RA 10 10 Width across flats B1 MM H1 W W Width across flats B1 D D MAX.WH MAX.WH E-0.05 0 E-0.05 0 I AL H + Stroke K A AL C0.1 KA A K F F 8-J S + Stroke H ZZ + 2 Stroke NA (mm) MM NA P RA S WA WH 20 20 20 A AL Bore size B1 C D E F GA H H1 I M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 J K KA M14 x 1.5

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Driver Servo amplifier Servo amplifier Driver 24VDC 24VDC DOCOM DOCOM DICOM DICOM Control Control output output signal RA signal RA When the cable is not tightened enough to the terminal block (connector), the cable or terminal block (connector) may generate heat because of the poor contact.

SL5200

Specifications [Surface finish Ra] Surface finish of the inner surface (wetted parts). A standard for measuring surface roughness which averages the peak to valley of the surface profile over a given distance (stroke). Multiple readings on a part are also averaged for Ra, but for Ra max, the worst reading is the value for that part.

LEC-OM02904

A 5 (2) (FR-BIF-(H) ) (UVW) (UVW)(UVW) U U U U V V M V M V W W W W DC (EMG) DC24V DC24V DOCOM DOCOM DICOM DICOM RA RA A 6 (3) (4) () (5) (EMG) ON( RYn 0 ) O FF (ALM ) ( E MG ) (EMG) ON(Ryn0)OFF(ALM) (MBR ) EM G RA DC24V A 7 (6) 10 (7) () 1.(:) (1) (2) 2.(:) (1) 1 (2) (3) (4) , A 8 20041, (FR-BAL FR-BEL-(H)(())) EEP-ROM EEP-ROM1010 EEP-ROM EEP-ROM EEP-ROM EEP-ROM EC 1EC

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

With air cushion 2 x M5 x 0.8 Relief port RA GA WA RA GA WA Cushion valve (Width across flats WH) Cushion valve (Width across flats WH) 10 10 20 20 ZZ + 2 Stroke S + Stroke (mm) A AL Bore size Stroke range Standard Long B1 C D E F GA H H1 I J K KA MM NA P RA S 1 2 ZZ 20 20 20 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 13 17 17 19

1

-X M5 x 0.8 M5 x 0.8 2-Rc 3/8 20M6 x 1.0 GC GA GB FA FB 6H7 depth XL 32 40 50 63 M8 x 1.25 PB 16 2-Rc 3/8 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Data M8 x 1.25 (Plug) G K JA JB 10 PA + Stroke M10 x 1.5 S Q C + Stroke B + Stroke M10 x 1.5 MC (RA) 17 + Stroke J A+ Stroke x 2 Bore size (mm) ML OA OB OL P PA PB X XA YY YL Z NN PW Q S R T RR RB U RA XC XL VA VB XB 12 16 20 25

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

600 Gripping force N 0.5MPa 0.5MPa Gripping force N 0.4MPa 0.4MPa 400 400 0.3MPa 0.3MPa 0.2MPa 0.2MPa 200 200 0.1MPa 0.1MPa 0 0 20 20 40 40 60 60 Gripping point L mm Gripping point L mm 4 Series MHS2 2 Finger Air Gripper Dimensions (mm) 1in = 25.4mm MHS2-16D to 25D 2-3.4, counter bore dia. 6.5 Counter bore depth SC (mounting hole) WA, depth 1.5 AA RA 3 AB RA VA, depth VB B NA RB NB RB XA

Table of Contents

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Max. speed (mm/s) Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 (5) (6) (7) 6 10 15 Selection graph (8) (9) (10) (11) (12) (13) (14) (15) 20 25 32 The maximum speeds for 6 to 32 are: 6, 10: Up to 800 mm/s; 15, 20: Up to 700 mm/s; 25, 32: Up to 600 mm/s Caution

AC Servo Motor Driver (Pulse input type/Positioning type)

Driver Servo amp lifier (Note 7) (Note 7) (Note 4, 9) (Note 2) 24VDC CN1 CN1 1 DICOM 9 ALM Trouble (Note 6) RA1 13 DOCOM 10 SA Speed reached (Note 3, 5) Forced stop RA 2 EM1 SON RES 8 4 3 (Note 9, 11) Servo-on 11 RD Ready RA 3 (Note 9, 10, 12) Reset Electromagnetic brake interlock 12 MBR Speed selection 1 RA 4 SP1 5 6 Forward rotation start Reverse rotation start ST1 ST2 7 10m max. 10m max

2

Applicable air dryer IDF100F IDF125F, 150F IDF190D, 240D IDF370D Capacity Type 360 400 400 400 7 kVA 9 kVA 14 kVA 18 kVA 540 650 650 650 400 450 450 450 260 300 300 300 300 350 350 350 11 13 13 13 30 40 40 40 94 kg Three220, 240, 380, 400, 415, 440 V (50/60 Hz) phase 109 kg 200V (50/60 Hz) D 4 x F A Double152 kg turn (mm) 179 kg 43 Optional Accessories Series IDF/IDU Air Preparation Equipment

BP1000

Specifications [Surface finish Ra] Surface finish of the inner surface (wetted parts). A standard for measuring surface roughness which averages the peak to valley of the surface profile over a given distance (stroke). Multiple readings on a part are also averaged for Ra, but for Ra max, the worst reading is the value for that part.

NCQ2/CQ2

Minimum lead wire bending radius 10 Auto switch 2 x H thread effective depth C (Also back cover) 2 x 4 x OB counterbore depth RB Q Q (Port size) 2 x P (Rc, NPT, G) (Also back cover) Width across flat K D D 25 M E 2.5 through-hole 2 x 4 x OA thread depth RA K 4 pcs.

Compact Cylinder

Specifications 12 16 20 25 32 40 50 63 80 100 Bore size (mm) Action Double acting, Single rod Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Cushion None Note) Piston speed 30 to 400 mm/s 30 to 300 mm/s Mounting Through-hole Note) 12 with auto switch: With rubber bumper (Standard) For details, refer to the separate catalog (CAT.E02-23), Pneumatics Equipment for Clean Room.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

B + Stroke A + Stroke K M E J 2 x 4-OA counterbore depth RA L S Rod end male thread Rod End Male Thread H1 Bore siz e (m m) A C1 1 H1 L1 X 125 140 160 141 141 155 42 42 47 M30 x 1.5 M30 x 1.5 M36 x 1.5 58 58 64 45 45 50 Rod end nut C1 X L1 Switches in the above figure are the case for the reed switches D-A73 type and D-A80 type.

Low Friction Cylinders Series MQ

2 x 4 x OB Depth of counterbore RB Q Y F I 4 x N through 0.2 D E M B + Stroke L K 0.2 A + Stroke M E 25, 30, 40 2 x P H effective thread depth C Q Y F 2 x 4 x OB Depth of counterbore RB 2 x 4 x OA effective depth RA J I 4 x N through 0.2 D W E M K B + Stroke L 0.2 A + Stroke M E (mm) Bore size (mm) P Stroke range (mm) RB Note) H OA A B C D E F W I Y J K L M N OB Q RA TN TF 10 39.5 M3 x

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Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

2 x 4-OB Depth of counterbore RB F Q Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5

Smooth Cylinder/Low Speed Cylinder

, 450, 500 40 Symbol Specifications Change of rod end shape 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 -XA -XC6 Made of stainless steel 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 Tie-rod, cushion valve and tie-rod nut made of stainless steel -XC7 Note 1) Intermediate strokes not listed above are also available.