3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Indicator light 3.5 to 7 : AC 82.5 75 01 02 M plug connecter (M): VQZ2l5(R)-lMl56.5 Cover dia 1.5 Cross section 0.23mm2 (Lead wire) 58(63) 300 77(78) 89 Indicator light : AC 2.10-29 VQZ100/200/300 Base Mounted VQZ300 Valve single unit Grommet (G): VQZ3l5(R)-lGl02 03 37 5 2-4.5Mounting holes 23.5 5 R5 Cover dia 1.6 Cross section 0.34mm2 Manual override 2 A 45 18 3 R 1 P 47 76 300 (Lead wire

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l \ l l / v \ d l / t , . 1 , \ 1 b d t / . , , . , \ 1 6 -;i;-5*1-rTNVZ3420 NVZ3440 ^^n+irrr. umiint^ 4r&.q+\rh *"s* NVZs120-OM-M5 NVZ3140-OM-017 NVZ3540 Wry NVZ352O Model Body type )a of aqtuation ry:,:' sl:c i 2 position Single N\23120-OO-n5 o.2 0.17 Double Nvzlt220-OO-r5 o.2 0.26 (120) 3 position Closed center N\rz3it20-OO-[|5 0.18 0.43 (195) 10-32 Nom.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

l \ l l / v \ d l / t , . 1 , \ 1 b d t / . , , . , \ 1 6 -;i;-5*1-rTNVZ3420 NVZ3440 ^^n+irrr. umiint^ 4r&.q+\rh *"s* NVZs120-OM-M5 NVZ3540 Wry NVZ3140-OM-017 NVZ352O Model Body type )a of aqtuation ry:,:' sl:c i 2 position Single N\23120-OO-n5 o.2 0.17 Double Nvzlt220-OO-r5 o.2 0.26 (120) 3 position Closed center N\rz3it20-OO-[|5 0.18 0.43 (195) 10-32 Nom.

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Momnt loading Conventional Systetn lHvatal ou dldebL Multipl mounting optims 30 Standard Strcke (mml 125 150 175 200 225 250 275 300 350 400 I ffi75 100 60 I s OF so 'a so =ooi ;slisawl[soww so I T sow lsawjl:ew11 a a a a a a a a a a a a a a a a a a a a a a a a a a a a a t a a a a a a a a a a a a a a a a a a a a a a a a a a '"?FF_PryFry4F!

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l b --" ,m'i$;:f, 4ra 20 Standard Stroke lmm) 30 40 50 60 75 100 125 175 200 225 250 275 300 350 400 150 Y f r N t * w -l Yw Y Ns a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a '*?

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 350, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: C61 (JXC61, Parallel I/O), Controller Mounting: 7 (Screw Mounting), Communication Plug Connector

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Table Displacement (Reference Value) 0.05 W L LEKFS32 (L = 30 mm) 0.04 Displacement [mm] LEKFS40 (L = 37 mm) 0.03 LEKFS25 (L = 25 mm) 0.02 0.01 0.00 0 50 100 150 200 250 300 350 400 450 500 Load W [N] * This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table. 9 10 Battery-less Absolute (Step Motor 24 VDC) Battery-less Absolute Encoder: Electric Actuator

Series: LEFS, Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 750mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: R5 (5m)

Fluoropolymer Piping Equipment

-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 4 x 3 1/4" x 5/32" 2 1 TL TIL TLM TILM 6 x 4 2 3/8" x 1/4" 3 TD TID 1/4" x 5/32" TH TIH 10 x 8 3 1/2" x 3/8" 4 8 x 6 12 x 10 4 3/8" x 1/4" 19 x 16 5 25 x 22 6 3/4" x 5/8" Note) For details of the applicable tubing sizes, refer to page 945. 5 1/2" x 3/8" 3/8

M-E05-1-LQ1

LQ1-4B10 LQ1U61-R5 6 6-25 LQ1-6N25 LQ1-6B25 3-06 LQ1-3N06 LQ1-3B06 Inch size Model Size A side B side Insert pin/Name plate symbol Part no.

AHC System Series MA

M3 x 10 (4 pcs.) 11 14 15 20 740 AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC

Vacuum Module Series ZX

ZX1-R1 R2 R3 R4 R5 R6 R7 R8 Symbol Part no. ZX1-R 9 R10 R11 R12 R13 R14 R15 R16 PS PS PS PS PV PV PV PV PV PV PV PV R1 R2 R3 R4 R5 R6 R7 R8 R 9 R10 R11 R12 R13 R14 R15 R16 PE PE Caution when ordering manifold PD PD PD PD PE PE The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted.

Large Size Vacuum Module: Series ZR

Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).

Size: 32, Motor Mounting: Top Mounting Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 350mm, Motor Option: w/o Option, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: R (Robot Cable, Flexible Cable), Cable Length: 5 (5m)

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 350mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: R (Robotic Cable, Flexible Cable)

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision), Size: 32, Motor Mounting Position: In-line, Motor Type: T7 (200W Output, Absolute Encoder), Lead: H (LEFS25, 20mm; LEFS32, 24mm; LEFS40, 30mm), Stroke: 350mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: R (Robotic Cable, Flexible Cable

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 350mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 5 (5m)

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 350mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable), Actuator Cable

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: R (Right Side Parallel), Motor: A [Servo Motor (24 VDC)], Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 350mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 25: 20mm, Size 32: 24mm, Size 40: 30mm, Stroke: 350mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 5m,