Fluoropolymer Piping Equipment

-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 4 x 3 1/4" x 5/32" 2 1 TL TIL TLM TILM 6 x 4 2 3/8" x 1/4" 3 TD TID 1/4" x 5/32" TH TIH 10 x 8 3 1/2" x 3/8" 4 8 x 6 12 x 10 4 3/8" x 1/4" 19 x 16 5 25 x 22 6 3/4" x 5/8" Note) For details of the applicable tubing sizes, refer to page 945. 5 1/2" x 3/8" 3/8

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3T21-R1 LQ3T21-R2 LQ3T21-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 LQ3T2A-R1 LQ3T2A-R5 LQ3T3A-R1 LQ3T3A-R2 LQ3T3A-R5 LQ3T3A-R7 LQ3T3A-R9 LQ3T4A-R1 LQ3T4A-R2 LQ3T4A-R5 LQ3T4A-R6 LQ3T4A-R7 LQ3T4A-R8 LQ3T4A-R9 LQ3T5A-R1 LQ3T5A-R2 LQ3T5A-R3 LQ3T5A-R5 LQ3T5A-R6 LQ3T5A-R7 LQ3T5A-R9 LQ3T5A-R10 LQ3T5A-R11

M-E05-1-LQ1

LQ1-4B10 LQ1U61-R5 6 6-25 LQ1-6N25 LQ1-6B25 3-06 LQ1-3N06 LQ1-3B06 Inch size Model Size A side B side Insert pin/Name plate symbol Part no.

AHC System Series MA

M3 x 10 (4 pcs.) 11 14 15 20 740 AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC

Vacuum Module Series ZX

ZX1-R1 R2 R3 R4 R5 R6 R7 R8 Symbol Part no. ZX1-R 9 R10 R11 R12 R13 R14 R15 R16 PS PS PS PS PV PV PV PV PV PV PV PV R1 R2 R3 R4 R5 R6 R7 R8 R 9 R10 R11 R12 R13 R14 R15 R16 PE PE Caution when ordering manifold PD PD PD PD PE PE The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted.

Large Size Vacuum Module: Series ZR

Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).

Metal Seal/Rubber Seal Series VQ Body Ported

235.5 225 235.5 237.5 248 250 260.5 262.5 273 L3 L4 100 110.5 2-4-40 Body Ported Series VQ0/1000/2000 Plug Lead Unit: Flip Type VQ2000 55.5 (L plug connector) AC, Latching Manual override 50.5 (L plug connector) VQC L4 L3 49 (L plug connector) 5.2 AC, Latching L2 L1 52.5 SQ 44 (L plug connector) 48 Indicator light DIN rail clamp screw 5.5 31 VQ0 12 D-sub connector mounting screw VQ4 VQ5 R5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M): VQZ2 5 (R)lMl 0 1 01 02 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 73.5 135.5<137.5> 300 61.5<62.5> 160 58.5<63.5> < >: AC 1.12-42 VQZ1000/2000/3000 Base Mounted VQZ3000 2 position single 0 1 02 03 Grommet(G): VQZ315 (R)lGl 300 95 58 28 (Lead wire length) 10.5 10.5 24.5Mounting holes (Rc(PT)3/8) (Rc(PT)3/8) 9 9 (Rc(PT)1/4) (Rc(PT)1/4) 5 R5

CATALOG

Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

Table of Contents

Example) For REAS25-650 (1) Maximum load weight = 20 kg (2) Load weight for 650 st = 13.6 kg 13.6 (3) = = 0.68 is the result. 20 1.

Table of Contents

Example) CY1L25-650 (1) Maximum load weight = 20 kg (2) Load weight for 650 st = 13.6 kg 13.6 (3) = = 0.68 is the result. 20 Maximum Load Weight (Center of slide block) (kg) Bore size (mm) Calculation Formula for ( 1) 6 10 15 20 25 32 40 ST: Stroke (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area:

Table of Contents

0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com y i t o w !

Table of Contents

Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS MHC MHT MHY MHW MRHQ Misc.

Table of Contents

A B C D Maximum Speeds for Each Transfer Load Unit (mm/s) Transfer load (kg) 10 20 30 40 50 60 1000 700 500 1000 700 500 Model Note LJ1H3031PD-200 to 1000LJ1H3031PD-1200LJ1H3031PD-1500LJ1H3032PD-200 to 1000LJ1H3032PD-1200LJ1H3032PD-15001000 700 500 900 700 500 1000 700 500 800 700 500 1000 700 500 700 700 500 900 700 500 650 650 500 800 700 500 600 600 500 Power supply: 100/110(V)AC 10% Compatible

Table of Contents

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 4 2 3 Specifications 5 Double check spacer part no.

Table of Contents

ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 1(PV PS PD) PD Table (2) PE ZY Part no.

Table of Contents

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option Material Description No.

A

Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

Table of Contents

Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1% F.S. 1% F.S.

Table of Contents

MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T VMG Applicable tubing O.D.