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MTS Type Solid state switch Reed switch 3-wire: 100 A or less, 2-wire: 0.8 mA or less (4) Leakage current None MY Note 2) Operating time 1 ms or less (3) 1.2 ms Impact resistance 1000 m/s2 300 m/s2 CY 50 M or more at 500 M VDC (Between lead wire and case) Insulation resistance Note 3) MG 1000 VAC for 1 minute (Between lead wire and case) 1500 VAC for 1 minute (1) (Between lead wire and case

2

1500 0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) AR40-A Rc1/2 AR40-06-A Rc3/4 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 0 0 1000 2000 3000 Flow rate L/min (ANR) Flow rate L/min (ANR) 183 Regulator Series AR10-A to AR40-A Pressure Characteristics (Representative values) Conditions: Inlet pressure 0.7

LEC-OM069xx

0 to 300 1% 0 Immediately Tuning -1000 to 2 Anti-Resonance Filter Time Constant 1 Compensation Pn164 0.01 ms 0 Immediately Tuning 1000 -1000 to 2 Anti-Resonance Filter Time Constant 2 Compensation Pn165 0.01 ms 0 Immediately Tuning 1000 10-11 10 List of Parameters (contd) Parameter Name Setting Units Factory When Classification Reference Size No.

JXCx-OMT0002

Axis Movement Speed Position Acceleration Deceleration Pushing Area 1 Area 2 In-position mode (mm/s) (mm) (mm/s2) (mm/s2) Selection (mm) (mm) (mm) Axis 1 Absolute 100 200.00 1000 1000 0 6.0 12.0 0.5 Axis 2 Absolute 50 100.00 1000 1000 0 6.0 12.0 0.5 0 Axis 3 Absolute 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 4 Absolute 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 1 Relative 500 800.00 1000 1000

SFOD-OMT0010

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position mode (mm/s) (mm) (mm/s2) (mm/s2) Selection (mm) (mm) (mm) Axis 1 ABS 100 100.00 1000 1000 1 0 0 5.0 Axis 2 ABS 100 100.00 1000 1000 1 0 0 5.0 1 Axis 3 ABS 100 100.00 1000 1000 1 0 0 5.0 Axis 4 ABS 100 100.00 1000 1000 1 0 0 5.0 Axis 1 ABS 50 50.00 1000 1000 0 0 0 0.5 Axis 2 ABS 50 50.00 1000 1000 0 0 0 0.5 2

JXCx-OMU0026

Area 1 Area 2 In-position Axis Selection Speed Force No. mode (mm/s) (mm) (mm/s2) (mm/s2) (%) (mm) (mm) (mm) (%) (mm/s) (%) Axis 1 Relative 100 200.00 1000 1000 0 0 35 100 6.0 12.0 0.5 0 Axis 2 Relative 50 100.00 1000 1000 0 0 35 100 6.0 12.0 0.5 Axis 3 Relative 100 100.00 1000 1000 50 50 35 100 0.0 0.0 5.0 Positioning: In-position Pushing: Max.pushing distance 0: Positioning operation 1

Electric Actuator

]) (2000 [mm/s2]) (3000 [mm/s2]) Note 2) Work load [lb] Horizontal Vertical Actuator specifications Electric specifications Lock unit Pushing force [N] Note 3) 4) 5) Speed [mm/s] Note 5) Max. acceleration/deceleration [mm/s2] Pushing speed [mm/s] Note 6) 50 or less 30 or less 35 or less Positioning repeatability [mm] 0.02 Screw lead [mm] Impact/Vibration resistance [m/s2] Note 7) 10 5 2.5

Made to Order

CQ2 series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 L B + Stroke S1 L B + Stroke S2 L L B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of bore sizes 12 to 25 with auto switch, port directions are different.

Table of Contents

Maximum acceleration: 2000mm/s2 Positioning distance (mm) 1 1000 500 100 10 10 0.5 100.5 50.5 10.5 1.5 100 0.5 10.5 5.5 1.5 0.6 Speed (mm/s) 500 0.5 2.7 1.7 0.9 0.6 1000 0.5 1.9 1.4 0.9 0.6 A B C D Values will vary slightly depending on the operating conditions.

e

) Standard Load (4.90 m/s2) 4.0 4.0 300 mm/s LJ1 LJ1 300 mm/s 3.5 3.5 LG1 LG1 400 400 500 LTF LTF 3.0 3.0 LC1 LC1 600 500 2.5 2.5 LC7 LC7 800 Tact time (sec) Tact time (sec) 600 1000 LC8 LC8 2.0 2.0 800 LXF LXF 1.5 1.5 LXP LXP LXS LXS 1000 1.0 1.0 1200 1600 2000 LC6m LC6m 0.5 0.5 LZm LZm LC3F2 LC3F2 0 0 500 1000 0 0 500 1000 Xm Xm Stroke (mm) Stroke (mm) D-m D-m Medium Load (9.80 m/s2) Light

V100

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

Metal Seal/Rubber Seal Series VQ Body Ported

Example) VQ1140-5L-C6-A A port, Plug 2-4-61 Body Ported Series VQ0/1000/2000 Manifold Option Parts Double check block (Separated type): For VQ0/1000 VQ1000-FPGIt is used on the outlet side piping to keep the cylinder in the intermediate position for a long time.

Digital Flow Switches

1 min. between external terminal and case Insulation resistance 50M or more (500 VDC Mega) between external terminal and case 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller. 4.9 m/s2 Vibration resistance 490 m/s2 in X, Y, Z directions 3 times each Impact resistance Noise resistance 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Weight Note 3) 410 g 470 g

1

COM. 13 (+) 13 () Voltage limit V, 1 minute, AC 1000 Positive common Negative common Insulation resistance M/km, 20C 5 or more Note) When using a valve with no polarity, either positive common or negative common can be used. Note) The minimum bending radius of the D-sub connector cable is 20 mm.

Electric Actuators

to 300 to 300 to 300 LJ1H202PA 8 50 to 500 124 112 106 LJ1H202NA 12 54 to 500 LJ1H303SE 126 114 22 64 to 500 to 500 to 500 LJ1H202PC 10 52 to 1000 to 740 to 930 to 600 to 500 145 124 112 106 LJ1H202NC 14 56 to 740 to 930 to 600 to 500 to 1000 LJ1H303PD 18 60 to 1000 to 1000 to 700 to 500 to 1000 126 114 108 LJ1H303ND 20 62 to 1000 to 1000 to 700 to 500 to 1000 LJ1H102PH-K 24 66 to 400

Mechanically Jointed Rodless Cylinder Series MY1

) (1000) (1000) (1000) MY1MW20 MY1MW20 30 30 (1000) (900) (1000) (900) (1000) (900) (1000) (900) Caution MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) (900) 20 20 1.

EX120/121/122

) Vibration resistance 98 m/s2 in each X, Y, Z direction, 3 times (De-energized) Impact resistance Standard CE marking, UL (CSA) Tie-rod 2 pcs.

LG1H

Maximum acceleration: 2000mm/s2 Positioning distance (mm) 1 1000 500 100 10 10 0.5 100.5 50.5 10.5 1.5 100 0.5 10.5 5.5 1.5 0.6 Speed (mm/s) 500 0.5 2.7 1.7 0.9 0.6 1000 0.5 1.9 1.4 0.9 0.6 A B C D Values will vary slightly depending on the operating conditions.

LG1H

Maximum acceleration: 2000 mm/s2 1 Positioning distance (mm) 10 100 500 1000 0.5 10 1.5 10.5 50.5 100.5 0.5 100 0.6 1.5 5.5 10.5 Speed (mm/s) 0.5 500 0.6 0.9 1.7 2.7 0.5 1000 0.6 0.9 1.4 1.9 A B C D Values will vary slightly depending on the operating conditions.

Table of Contents

Cylinder Speed Chart Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm Average speed (mm/s) System 50 63 80 100 125 140 160 180 200 250 300 1000 Perpendicular, upward actuation 900 800 700 600 500 400 300 200 100 VK Horizontal actuation A VZ VF 0 1000 VFR 900 800 700 600 500 400 300 200 100 0 VP4 Courtesy of Steven