Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Battery-less

Work load [kg]2 Horizontal 14 15 12 25 30 20 45 50 25 55 65 Vertical 2 4 0.5 7.5 15 4 10 20 2 2 23 Up to 450 10 to 700 5 to 360 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 451 to 500 10 to 600 5 to 300 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 1200

CATALOG

1200 1000 1000 6 12 14 20 22 Starting Torque Nm x 10-3 An ambient atmosphere that causes rust is non permissible.

A

, 1400, 1600, 1800, 2000 32 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1200, 1400, 1600, 1800, 2000 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1200, 1400, 1600, 1800, 2000 O P T I O N S T R O K E A D J U S T M E N T U N I T Stroke Adjustment Unit 25 MY-A25L 32 MY-A32L 40 MY-A40L 25 MY-S25L MY-S25B 32 MY-S32L MY-S25B 40 MY-S40L MY-S32B M O R E H O W T O O R D E R S E E N

Interface Regulator for VQ4000 5 Port Solenoid Valve

R1 59 PE 4 A 55.5 25 218.5 SMC Pneumatics, Inc. 2 Series ARBQ4000 Flow Rate Characteristics Conditions Upstream pressure: 0.7MPa (101 psi) ARBQ4000-00-A ARBQ4000-00-B 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (

Air Cylinder NCA1 Series

R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult P/A Customer Service for larger sizes.

NCA1

R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult SMC Customer Service for larger sizes.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

CE-compliant EX122-SDN1 EX122-SCS1 EX122-SCS2 EX122-SMJ1 Q R1 R2 V F1 H J1 J2 X90 Main valve fluoro rubber (Refer to page 332.)

VZS2000

VVZS2000-22A-1 VVZS2000-22A-2 VFN G L M KZ D Cylinder side pressure (P2) Check valve Applicable valve model VZS2450-FZ VZS24504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 100 Ncm3/ min or less Solenoid one side 1(P) de-energized Leakage (Supply pressure: 0.5 MPa 100 Ncm3/ min or less Solenoid both sides de-energized 1(P) Piston SUP side pressure (P1) SUP side pressure P1 (MPa) 0 Operating

5

or less 1200 or less 1600 or less -XC68 Made of stainless steel (with hard chrome plated piston rod) -XC86 With rod end bracket Accessories/For details, refer to page 221.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Plug-in type Non plug-in type VVZS3000-22A-1 VVZS3000-22A-2 VFN G L M KZ D Cylinder side pressure Check valve Applicable valve model VZS3450-FZ VZS34504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 210 Ncm3/ min or less Solenoid one side energized 1(P) 210 Ncm3/ min or less Leakage 0.5 MPa Solenoid both sides energized 1(P) Piston SUP side pressure P1 SUP side pressure P1 (MPa) 0 Operating

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 1 (P) 3 (R2) Nil R Metal seal (B) (A) Rubber seal 2 4 FPG 3 5 1 (R2) (R1)(P) Available for 7-6 and 7-8 only A02 VS7 1 Sub-plate Size 1 2 3 Specifications Size 1 Size 2 Piping specifications Weight (kg) Model Size 3 Piping direction Port size for 3(R2), 5(R1) Port size for 1(P), 2(B), 4(A) Port size VS7-1-A02 VS7-1-A03 VS7-1-B02 VS7-1-B03 VS7-2-A03 VS7-2-A04 VS7-2-A06 VS7-2-B03 VS7-2-B04

Digital Flow Switch

or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 24 or more 31 0 0.4 4 x R2 or less Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 19 PF3A7 H Series Function Details For setting of functions and operation method, refer to the Operation Manual from the

Air Cylinder Series CM2

MM ND hole H10 Axis d9 NX2 L R2 U2 A H Z (Min.)

Refrigerated Air Dryers Series IDF/IDU

Air-cooled type Water-cooled type Rc3/8 Rc1/2 35oC 0.7 MPa Rc3/4 Rated inlet condition Applicable air compressor (kW) Port size Model Rc1 R1 R1 1/2 IDF:E IDF100F IDF125F IDF150F 100 125 150 R2 65A flange 80A flange 40oC 0.7 MPa 40oC R2 0.7 MPa The separate catalog for dryer models conforming with foreign standards (CE) is available.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 LEF Work load [kg] Note 2) Horizontal 15 30 55 30 45 85 Vertical 3 5 10 6 10 20 LEJ Up to 500 1800 1200 600 1800 1200 600 501 to 600 1580 1050 520 1800 1200 600 601 to 700 1170 780 390 1800 1200 600 701 to 800 910 600 300 1390 930 460 801 to 900 720 480 240 1110 740 370 901 to 1000 580 390 190 900 600 300 1001 to 1100 480 320 160 750 500

Table of Contents

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

Cylinder with Lock

88 9 20 120 58 144 67 6 30 76 241 58 19 66 1/4 stroke 240 52 1001 to 1200 1001 to 1200 105 11.5 23 140 64 170 71 10 40 92 263 58 19 66 258 1/4 stroke 52 1001 to 1200 1001 to 1400 124 13.5 28 164 84 198 87 12 45 112 317 80 21 80 1/4 stroke 310 65 1001 to 1400 1001 to 1500 140 13.5 29 180 100 220 89 12 50 136 347 80 21 81 339 1/4 stroke 65 1001 to 1500 When machining a hole to put a bellows

Compact Rotary Actuator Series CRQ2

Thin round plate Position of rotational axis: Passing through the diameter r a CRB2 CRBU2 r2 a2 4 = m 12 = m CRB1 MSU 7. Cylindrical Position of rotational axis: Passing through the diameter and the center of gravity 2.

Direct Solenoid

OPEFATING: Maximum Cycle Rate 1200 1200 360 360 360 360 115/50 12U.5o 150 150 Continuous Opration: (cycles per minute) Maximum Amtient Temperature (At maximum cycle rate and continuous run. For slou/er cyde rates and intermittent duty, consult factory) iiOUNTIiIG: Inlended for loot mounting or are llght enough to hang in a pipe line May be mounted in any posllion. 140.