0.4

(R2) (R1)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQC2301 VQC2401 VQC2300 VQC2400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQC2501 VQC2500 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC2A01 VQC2B01 2(B) 4(A) 4(A) 2(B) r 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) VQC2C01 2(B) 4(A) 1(P) 5(R1) 3(R2)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

45 (M5) 10.5 (C3, C4, C6) (Lead wire length) Cover diameter 1.6 Cross section 0.34mm2 47 1 P (20) 13 R1 R2 5 3 PE port 8.5 4-Rc(PT)1/8 R1, R2(EXH) port 2-Rc(PT)1/8 P(SUP) port 16.5 16.5 (23.5) 47 L plug connector (L) M plug connector (M) 117 (3 Position) <119> 129 (3 Position) <131> 300 (Lead wire length) 54.5 <59.5> 300 (Lead wire length) 108 (Double) <110> 120.5 (Double) <122.5> 76

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Port Symbol Caution VF1000 VF3000 VF5000 Supply P P (SUP) P Cylinder A, B A (CYL2) B (CYL1) A, B Connector R1 (EXH2) R2 (EXH1) R1, R2 EXH outlet EA, EB Lead wire JIS symbol Single solenoid Socket Hook 1: P (SUP) 2: B (CYL.1) 3: R2 (EXH.1) 4: A (CYL.2) 5: R1 (EXH.2) 1: P 2: B 3: R2 4: A 5: R1 Plug Connector Lead Wire Length 1: P 4: A 2: B 5: R1 3: R2 Standard length is 300 mm, but the following

4/5 Port Air Operated Valve Series SYJA3000

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

0.4

) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1) 1(P) 3(R2) 5(

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1 (P) (A) 4 (B) 2 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 70% AS2201F -01-08 AS2200-01 SV 200 SYJ 100 70% 50% 30% 10% SZ 0 400 MB 40 VP4 300 AS2201F -02-08 AS2200-02 S0700 200 VQ 100 VQ4 0 SV200 ANA1 -C10 T0806 VQ5 400 MB 50 300 VQC AS3201F -02-08 AS3000-02 200 VQZ 100 SQ 0 VFS MB 63 400 VFR 300 VQ7 AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

0.4

) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQ1A01

VZS

(External pilot port) Not machined K plug connector: VZS2150-KZ-01 L plug connector: VZS2150-L(Z)-01 (Lead wire length) With light/ surge voltage suppressor 300 (Lead wire length) 300 Other dimensions are the same as the grommet type.

Metal Seal/Rubber Seal Series VQ Body Ported

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

-M5 M type plug connector (M) : SYJ3140M -M5 33.5 33.5 23.2 (Mounting holes) 22 4 23.2 (Mounting holes) 22 4 B A B A 11 2.5 17.5 11 2.5 17.5 A B A B (Lead wire length) 50.7 64.3 About 300 52.6 [59.1] About 300 54.7 [56] (Lead wire length) 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1 P 13 13 5 5 10 10 10 10 5-M5 0.8 (Piping port) 5-M5 0.8 (Piping port) 14 14 14 14 15 15 [ ]

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

4 2.5 Manual override B A 11 A B 1 G: Approx. 300 H: Approx. 600 (Lead wire length) 54.4 [56.6] (Light/surge voltage suppressor) 41.5 [48.5] + 35.6 28.5 26.1 R1 P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (W0): SYJ3140-W0-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5

Fieldbus System

) 4 (B) 2 (A) 4 (B) 2 Metal 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Light/surge voltage suppressor 2 2-position double 3-position pressure center Nil With E Without light, with surge voltage suppressor (A) 4 (B) 2 Rubber (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Coil voltage 3-position double check 5 24 VDC (A) 4 (B) 2 Note) 6 Function 1 (P) 5 (R1) 3 (R2) Nil Standard (0.95

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 1-5-79 for dimentions with connector cable. 1-5-11 Series SYJ3000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ3240-M5 M5 x 0.8

Base Mounted Metal Seal/Rubber Seal Series VQ

5.5 9 (4(A), 2(B) port) 9 9 9 SMC 5 3-C4, M5(1(P), 4(A), 2(B) port) M5(5(R1) , 3(R2) port) 8.7 8.7 C4: One-touch fitting for 4 M5: M5 thread < >: AC 2 position double: VQ025 0 1 15.2 15.8 12.3 5 5 Manual override A B A B (For C4) 31.5 10.5 25 18 A A B B ~ = ~ = EB P EA EB EB P EA EA 23.4 mounting holes 38 31 Lead wire length = 300 121<131> M plug connector 108<118.5> L plug connector 51 (

VQ7-6/7-8

(Values at the initial period) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-7 8 Series VQ7-6 DIN Terminal Type 2 position single : VQ7-6-FG-S single (Reverse pressure): VQ7-6-YZ-S 120.5 120.5 68.5 52 68.5 Mounting hole 2-6.5 50 50 42.5 42.5 25 25 13 (A port) 13 (B port) Manual override (R1, R2) 2-3/8 P R2 R1 A B 14 11 50 62 12 9 62