Fluoropolymer Piping Equipment

-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 4 x 3 1/4" x 5/32" 2 1 TL TIL TLM TILM 6 x 4 2 3/8" x 1/4" 3 TD TID 1/4" x 5/32" TH TIH 10 x 8 3 1/2" x 3/8" 4 8 x 6 12 x 10 4 3/8" x 1/4" 19 x 16 5 25 x 22 6 3/4" x 5/8" Note) For details of the applicable tubing sizes, refer to page 945. 5 1/2" x 3/8" 3/8

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3T21-R1 LQ3T21-R2 LQ3T21-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 LQ3T2A-R1 LQ3T2A-R5 LQ3T3A-R1 LQ3T3A-R2 LQ3T3A-R5 LQ3T3A-R7 LQ3T3A-R9 LQ3T4A-R1 LQ3T4A-R2 LQ3T4A-R5 LQ3T4A-R6 LQ3T4A-R7 LQ3T4A-R8 LQ3T4A-R9 LQ3T5A-R1 LQ3T5A-R2 LQ3T5A-R3 LQ3T5A-R5 LQ3T5A-R6 LQ3T5A-R7 LQ3T5A-R9 LQ3T5A-R10 LQ3T5A-R11

M-E05-1-LQ1

LQ1-4B10 LQ1U61-R5 6 6-25 LQ1-6N25 LQ1-6B25 3-06 LQ1-3N06 LQ1-3B06 Inch size Model Size A side B side Insert pin/Name plate symbol Part no.

AHC System Series MA

M3 x 10 (4 pcs.) 11 14 15 20 740 AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC

Metal Seal/Rubber Seal Series VQ Body Ported

235.5 225 235.5 237.5 248 250 260.5 262.5 273 L3 L4 100 110.5 2-4-40 Body Ported Series VQ0/1000/2000 Plug Lead Unit: Flip Type VQ2000 55.5 (L plug connector) AC, Latching Manual override 50.5 (L plug connector) VQC L4 L3 49 (L plug connector) 5.2 AC, Latching L2 L1 52.5 SQ 44 (L plug connector) 48 Indicator light DIN rail clamp screw 5.5 31 VQ0 12 D-sub connector mounting screw VQ4 VQ5 R5

VQZ1000/2000/3000

5 (R)-M57 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 300 58.5 <63.5> 73.5 137.5 Indicator light 62 160 < >: AC 2-7-44 Base Mounted 45 45 Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ3000 2 position single Grommet (G): VQZ3150 1(R)-G-02 03 300 (Lead wire length) 95 58 28 10.5 10.5 (For Rc 3/8) (For Rc 3/8) 9 9 24.5 mounting hole (For Rc 1/4) (For Rc 1/4) 5 R5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M): VQZ2 5 (R)lMl 0 1 01 02 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 73.5 135.5<137.5> 300 61.5<62.5> 160 58.5<63.5> < >: AC 1.12-42 VQZ1000/2000/3000 Base Mounted VQZ3000 2 position single 0 1 02 03 Grommet(G): VQZ315 (R)lGl 300 95 58 28 (Lead wire length) 10.5 10.5 24.5Mounting holes (Rc(PT)3/8) (Rc(PT)3/8) 9 9 (Rc(PT)1/4) (Rc(PT)1/4) 5 R5

10

U side 7 6 5 4 3 2 D side Stations 1 Cable 6 to 12 G1/2 G1/2 (44) R3 R4 T E D R1, R6 R5 R2 F F n x 1/8,1/4 OUT port (For common SUP type) IN port (For individual SUP type) (mm) n (stations) Size Dimensions 2 3 4 5 6 7 8 9 10 86 100 90 108 103 121 L1 L2 L1 L2 L1 L2 122 136 126 144 144 162 158 172 162 180 185 203 194 208 198 216 226 244 230 244 234 252 267 285 266 280 270

For post-stoppage positioning and locking

green when turned ON Connector size M12 x 1 0 0.5 0.4 0.3 0.2 0.1 1 Supply pressure [MPa] 2 4 3 Connector pin arrangement Type Connector pins and arrangement 1 2 3 4 E2E-X7D1-M1J-T10.3M OUT ( ) OUT () 1 Pallet Lock Cylinder W-R1/W-R3 Series Dimensions W-R1-S2Position of fulcrum 2 x 18.5 Proximity switch mounting bracket 68 Proximity switch (Option) 117 15 15 26 26 2 x Rc3/8 36.5 6.5 R5

The LEF series slider type electric actuator features a low profile height of 46mm *. The actuators main body can be mounted without removing any exterior components, such as the cover, making installation easy. The standard equipped seal band covers the guide, ball screw and belt, preventing grease and external foreign matter from splashing and entering the LEF. There are 2 types of drivers

Electric Actuator/Slider Type

5000 2500 2500 0 0 0 10 20 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] 9 Model Selection Series LEFS This graph shows the amount of allowable overhang when the center of gravity of the workpiece overhangs in one direction.

IZx-OMT0049

to 640 160 to 1300 7H / 7L 160 to 1300 160 to 2500 7H / 7L 160 to 2500 160 to 2500 9H / 9L 160 to 820 160 to 1900 9H / 9L 160 to 1900 160 to 2500 9H / 9L 160 to 2500 160 to 2500 BH / BL 160 to 1600 160 to 2500 BH / BL 160 to 2500 160 to 2500 BH / BL 160 to 2500 160 to 2500 3-1-4.

IZx-OMP0064

One-touch fitting symbol Applicable tube O.D. mm Bar length mm Single end piping Double ends piping 06 6 340 to 640 340 to 1300 08 8 340 to 1300 340 to 2500 10 10 340 to 2500 340 to 2500 06 6 340 to 1300 340 to 2500 08 8 340 to 2500 340 to 2500 10 10 340 to 2500 340 to 2500 06 6 340 to 2500 340 to 2500 08 8 340 to 2500 340 to 2500 10 10 340 to 2500 340 to 2500 High speed static neutralization

Programless controller Step motor (servo 24 VDC)

140 2500 325 2500 180 2500 15 300 3000 150 3000 350 3000 200 3000 65 No.

JXCx-OMU0004

700 2500 225 2500 1140 2500 800 2500 225 2500 15 1200 3000 800 3000 520 3000 1200 3000 1000 3000 300 3000 52 No.JXC-OMU0004-A 10.2 LEH LEH LEHF LEHS,Z [mm/s] 10 2] 2000 [mm/s [mm/s] 5 10 5 2] 1000 [mm/s [mm] 1 1 LEHF 3 5mm/s LEHF10 LEHF20 LEHF32 LEHF40 3 11 48 72 5 19.5 84 126 [N] 7 28 120 180 * LEHF10 30%F.S.LEHF20 25%F.S.LEHF3240 20%F.S.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

2500 0 0 0 1 2 3 4 0 2 4 6 8 10 Work load [kg] Work load [kg] LEFS25lV6A/Ball Screw Drive LEFS25lV6A/Ball Screw Drive Horizontal Vertical 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000 Duty ratio: 100% 12500 12500 10 10 7500 7500 Duty ratio: 100% 5000 5000 2500 2500 0 0 0 2

15

LEFB40 (100%) 20 0 500 1000 1500 2000 2500 3000 Acceleration/Deceleration [mm/s2] 17500 Stroke [mm] * Cycle time is for when maximum speed. * Maximum stroke: LEFB25: 2000 mm LEFB32: 2500 mm LEFB40: 3000 mm 15000 12500 10 7500 5000 2500 0 0 5 10 15 20 25 30 Work load [kg] These graphs are examples of when the standard motor is mounted.

HRX-OM-W002

Ambient temp. 3500 2500 2500 2500 2500 Ambient temp. Ambient temp. 3500 2500 2500 Ambient temp. Ambient temp. or 2500 or 2500 Ambient temp. Ambient temp. or or Ambient temp. or or Facility water temp. 3000 Facility water temp. or or Facility water temp. 3000 Facility water temp. or Facility water temp. Facility water temp. 2000 2000 2000 2000 Facility water temp.

Environment

LEJ 17500 Work load: W [kg] 15000 LEFB32 LEL 15 12500 LEM 10 7500 LEFB25 LEY 5 5000 2500 LES 0 0 1000 2000 2500 0 5 10 0 LEPY LEPS Speed: V [mm/s] Work load [kg] * The shaded area in the graph requires the regeneration option (LEC-MR-RB-032).

Thermo-con/Rack Mount Type

2500 2000 2000 Heating capacity [W] Heating capacity [W] Ambient temperature 35C 1500 1500 Ambient temperature 25C Ambient temperature 25C 1000 1000 Ambient temperature 15C 500 500 0 0 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 HECR010-A Circulating fluid: Ethylene glycol 20% Circulating fluid: Tap water 2500 2500 Ambient