600 1800 175 1800 930 1800 620 1800 175 1800 13 930 2000 620 2000 200 2000 1000 2000 760 2000 200 2000 14 1000 2500 700 2500 225 2500 1140 2500 800 2500 225 2500 15 1200 3000 800 3000 520 3000 1200 3000 1000 3000 300 3000 52 No.JXC-OMU0004-A 10.2 LEH LEH LEHF LEHS,Z [mm/s] 10 2] 2000 [mm/s [mm/s] 5 10 5 2] 1000 [mm/s [mm] 1 1 LEHF 3 5mm/s LEHF10 LEHF20 LEHF32 LEHF40 3 11 48 72 5
75 1800 90 1800 110 1800 15 70 2000 80 2000 100 2000 120 2000 57 No.
40 28 65 1401 to 1800 50 33 75 1401 to 1800 63 43 90 1501 to 1800 80 100 Applicable to Series CH2E, CH2F and CH2H.
40 65 28 1401 to 1800 50 75 33 1401 to 1800 63 90 43 1501 to 1800 80 100 The maximum stroke is 1500mm for series CH2G only.
58 RY 40 28 1401 to 1800 65 50 33 1401 to 1800 75 63 43 1501 to 1800 90 80 100 Applicable to Series CH2E, CH2F and CH2H.
40 28 65 1401 to 1800 50 33 75 1401 to 1800 63 43 90 1501 to 1800 80 100 Applicable to the CH2E, CH2F and CH2H series.
) (4500 rpm) (3938 rpm) (2925 rpm) (2250 rpm) (1800 rpm) (1463 rpm) (1200 rpm) (1013 rpm) H 30 1800 1390 1110 900 750 630 540 470 410 A 20 1200 930 740 600 500 420 360 310 270 LEJS63 200 W equivalent B 10 600 460 370 300 250 210 180 150 130 (Motor rotation speed) (3600 rpm) (2790 rpm) (2220 rpm) (1800 rpm) (1500 rpm) (1260 rpm) (1080 rpm) (930 rpm) (810 rpm) 825 LEJS Series Motorless
1200 600 1800 1200 600 501 to 600 1580 1050 520 1800 1200 600 601 to 700 1170 780 390 1800 1200 600 701 to 800 910 600 300 1390 930 460 801 to 900 720 480 240 1110 740 370 901 to 1000 580 390 190 900 600 300 1001 to 1100 480 320 160 750 500 250 1101 to 1200 410 270 130 630 420 210 1201 to 1300 540 360 180 1301 to 1400 470 310 150 1401 to 1500 410 270 130 Max. acceleration/deceleration [mm
1200 600 1800 1200 600 501 to 600 1580 1050 520 1800 1200 600 601 to 700 1170 780 390 1800 1200 600 701 to 800 910 600 300 1390 930 460 801 to 900 720 480 240 1110 740 370 901 to 1000 580 390 190 900 600 300 1001 to 1100 480 320 160 750 500 250 1101 to 1200 410 270 130 630 420 210 1201 to 1300 540 360 180 1301 to 1400 470 310 150 1401 to 1500 410 270 130 Max. acceleration/deceleration [mm
The spacing (l) of the support must be no more than the values shown in the graph on the right. 200 (kg) m 190 (2100) (2100) (2100) (2100) 180 170 l 160 150 140 130 (1800) (1800) (1800) (1800) Caution m l 120 Weight (m) 110 MY1M63 MY1M63 MY1M63 MY1M63 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation.
), (1900), 2000 50, 100, 150, 200, 250 300, 350, 400, 450, 500 550, 600, 700, 800, 900 1000, (1100), 1200, (1300) (1400), 1500, (1600), (1700) (1800), (1900), 2000 Stroke [mm] Note 1) Work load [kg] Note 2) Horizontal 10 20 Speed [mm/s] Note 2) 48 to 1000 (Refer to Table 1 for set values when LECP1 or 2 is selected.)
MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 m 160 160 150 150 140 140 (2400) (2400) (2400) (2400) (2400) (2400) l 130 130 (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) m l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600
) (3938 rpm) (2925 rpm) (2250 rpm) (1800 rpm) (1463 rpm) (1200 rpm) (1013 rpm) H 30 1800 1390 1110 900 750 630 540 470 410 A 20 1200 930 740 600 500 420 360 310 270 LEJS63 200 W/ m60 B 10 600 460 370 300 250 210 180 150 130 (Motor rotation speed) (3600 rpm) (2790 rpm) (2220 rpm) (1800 rpm) (1500 rpm) (1260 rpm) (1080 rpm) (930 rpm) (810 rpm) 121 LEJ Series AC Servo Motor Clean Room Specication
Water-cooled Refrigeration HRR U 012 W 10 (UL Standards) Cooling capacity Option 2 (p. 35) 012 1000/1200 W (50/60 Hz) 018 1600/1800 W (50/60 Hz) Nil None Y With feet/Without rack mounting brackets Z*1 Without either a flow sensor, water leakage sensor, particle filter, bypass valve or retaining clip Cooling method W Water-cooled refrigeration Z1*1 Without either a flow sensor or retaining
) (3938 rpm) (2925 rpm) (2250 rpm) (1800 rpm) (1463 rpm) (1200 rpm) (1013 rpm) H 30 1800 1390 1110 900 750 630 540 470 410 A 20 1200 930 740 600 500 420 360 310 270 LEJS63 200 W/ m60 B 10 600 460 370 300 250 210 180 150 130 (Motor rotation speed) (3600 rpm) (2790 rpm) (2220 rpm) (1800 rpm) (1500 rpm) (1260 rpm) (1080 rpm) (930 rpm) (810 rpm) 121 LEJ Series AC Servo Motor Clean Room Specication
The spacing (l) of the support must be no more than the values shown in the graph on the right. 200 kg m 190 (2100) (2100) (2100) (2100) 180 170 l 160 150 140 130 Weight m (1800) (1800) (1800) (1800) m l 120 Caution 110 MY1M63 MY1M63 MY1M63 MY1M63 m 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation.
, 2000 32 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1200, 1400, 1600, 1800, 2000 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1200, 1400, 1600, 1800, 2000 O P T I O N S T R O K E A D J U S T M E N T U N I T Stroke Adjustment Unit 25 MY-A25L 32 MY-A32L 40 MY-A40L 25 MY-S25L MY-S25B 32 MY-S32L MY-S25B 40 MY-S40L MY-S32B M O R E H O W T O O R D E R S E E N E X T P A G E Courtesy
New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2
1801 to 2000 30 63 60 204 106 36 167 195 3/8 162 45 115 70 48 17 18.5 149 86 135 20 41 24 125 398 10 132 320 35 5 M18 x 1.5 16 118 Up to 1800 1801 to 2000 34 63 60 226 124 40.5 187 216 3/8 182 50 115 74 48 17 18.5 165 97 135 20 46 24 132 418 10 150 348 35 5.5 M20 x 1.5 21 131 Up to 2000 2001 to 2400 42 71 67 277 152 58 237 261.5 1/2 225 60 140 86 60 20 23 200 117 160 25 56 29 160 538
Up to 1500 M40 x 1.5 M12 x 1.75 0.2 stroke 257 111 523 90 153 541 120 427 30 to 1800 Up to 998 M45 x 1.5 M16 x 2 0.2 stroke 325 141 658 105 176 674 30 to 2000 M56 x 2 M20 x 2.5 0.17 stroke 9-9-13 14 Series CLS Dimensions Rod side flange style (F): CLSF BC CLS125 MODEL SMC BD FREE LOCK CHECK Cylinder With Locking Mechanism T Rc BP Unlocking port (Unlocked when pressurized) V GC Plug with