0.4

Pressure sensor Outlet pressure side Pressure controller (Series ITV) Inlet pressure side Sensor connector box Self Diagnosis Function In combination with the Handheld Terminal, the following two functions are available.

LX Series Compact Electric Actuators

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Fieldbus System

Pressure sensor Outlet pressure side Pressure controller (Series ITV) Inlet pressure side Sensor connector box Self Diagnosis Function In combination with the Handheld Terminal, the following two functions are available.

70pvpump

TI/ TIL PA Maintenance Parts List PAX PA3000/Automatically Operated Type PA5000/Automatically Operated Type PAX1000 PB KT-PA3-31 Diaphragm kit (PTFE) KT-PA5-31 KT-PAX1-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA3-32 Diaphragm kit (NBR) KT-PA5-32 KT-PAX1-36 Diaphragm kit (NBR) Check valve kit KT-PA3-36 Check valve kit KT-PA5-36 KT-PAX1-37 Check valve kit Switching valve parts kit KT-PA3

PA3000/5000/PAX1000

KT-PA5-37 KT-PA3-37 KT-PA5-38 Switching valve parts kit Pilot valve kit Switching valve assembly kit KT-PA5-38 KT-PA5-38 KT-PAX1-39 Pilot valve kit Pulsation attenuator control valve kit Pilot valve kit PA5000/Air operated type PA3000/Air operated type PB1000 KT-PA3-31 KT-PA5-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PB1-2 Diaphragm kit KT-PA3-36 KT-PA5-36 Check valve kit Check valve

Process Pump Series PA3000/5000/PAX1000 Series PB1000

KT-PA5-37 KT-PA5-38 KT-PA3-37 Switching valve parts kit Pilot valve kit Switching valve assembly kit KT-PA5-38 KT-PAX1-39 KT-PA5-38 Pilot valve kit Pulsation attenuator control valve kit Pilot valve kit PA5000/Air operated type PA3000/Air operated type PB1000 KT-PA3-31 KT-PA5-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PB1-2 Diaphragm kit KT-PA3-36 KT-PA5-36 Check valve kit Check valve

Process Pump Series PA3000/5000/PAX1000 Series PB1000

KT-PA5-37 KT-PA3-37 KT-PA5-38 Switching valve parts kit Pilot valve kit Switching valve assembly kit KT-PA5-38 KT-PA5-38 KT-PAX1-39 Pilot valve kit Pulsation attenuator control valve kit Pilot valve kit PA5000/Air operated type PA3000/Air operated type PB1000 KT-PA3-31 KT-PA5-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PB1-2 Diaphragm kit KT-PA3-36 KT-PA5-36 Check valve kit Check valve

air-filter-e

KT-FGDC KT-FGDE KT-FGDT KT-FGDF Contents Applicable model FGDC FGDE FGDT FGDF Refer to pages 256 and 257 for the replacement element type. KT-FGDC KT-FGDE KT-FGDT KT-FGDF Replacement parts A 1 kit for each of each one of seals q to t and gasket.

Air Preparation Equipment

KT-FGDC KT-FGDE KT-FGDT KT-FGDF Contents Applicable model FGDC FGDE FGDT FGDF Refer to pages 256 and 257 for the replacement element type. KT-FGDC KT-FGDE KT-FGDT KT-FGDF Replacement parts A 1 kit for each of each one of seals q to t and gasket.

Booster Regulator/Air Tank

VBA43A VBA11A VBA42A VBA22A VBA40A VBA20A VBA10A KT-VBA10A-1 KT-VBA20A-1 KT-VBA40A-1 KT-VBA22A-1 KT-VBA42A-1 KT-VBA43A-1 KT-VBA11A-20 Model The kit includes the parts from q to u and a grease pack. VBA43A VBA11A VBA42A VBA22A VBA40A VBA20A VBA10A Quantity Model No.

smcmaintenancepartslist

KT-FGDC KT-FGDE KT-FGDT KT-FGDF Contents Applicable model FGDC FGDE FGDT FGDF Refer to pages 256 and 257 for the replacement element type. Replacement parts A 1 kit for each of each one of seals q to t and gasket.

Process Pump

Switching valve kit KT-PAF3-37 Note) KT-PAF5-37 Note) Pilot valve kit KT-PAF3-38 KT-PAF5-38 Foot kit KT-PAF3-40 KT-PAF5-40 Leakage sensor KT-PAF3-47 KT-PAF5-47 606 Process Pump Automatically Operated Type/Air Operated Type PAF Series Piping and Operation: Automatically Operated Type (PAF3410, 5410) Piping diagram Reset button Air operated reset port PA Pilot air supply port AIR SUP Discharge

Series AP500

leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume Mass 1) 14 to 194F (10 to 90 C) for Vespel seat. 2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). 3) Mass, including individual boxed weight, may vary depending on connections or options. 2 Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ AK KT

Pulse Valve

JSXFA(E, F, H)-10-BJSXF-10B-KT JSXFA(E, F, H)-10-B-A JSXF-10B-A-KT JSXFA(E, F)-14-BJSXF-14B-KT JSXF-14B-KT2 AN30-03 (14R, 14F), AN30-N03 (14N) Disassembly/Assembly Procedure Caution Port size: 06, 10 Port size: 14 1.

25

Description PB1000A series PB1011A KT-PB1A-9 PB1013A KT-PB1A-2 Diaphragm kit Check valve kit Port set Packing kit Foot kit Solenoid valve kit KT-PB1A-1 KT-PB1A-7 Note) Air supply port Suction port KT-PB1A-4 Air exhaust port KT-PB1-3 SYJ314M-5H-Q KT-PB1A-4 Note) One of Nil, F or N is entered as a thread symbol.

Series AP3500

(P.124) 100 Series AP3500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish

Process Pump

Description PA3310 PAP3310 Diaphragm kit KT-PA3-531 KT-PAP3-531 Check valve kit KT-PA3-536#1 KT-PAP3-536#1 Pilot valve kit KT-PA3-538 Manual cap assembly kit KT-PA3-545Note) Foot kit KT-PA3-40 KT-PAP3-40 The maintenance procedure is to be distributed individually. Please contact your SMC sales representative for details.

IR1000/2000/3000

Note 3) KT-IR1010 KT-IR3120 Service parts kit no.

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, C o D sub connector Kt l25P) w lh 1 5m cable 1 to 12 \24) The marmLm nlrbef olslalons drrrers dependng on the eeclrcal Nole) Leave tlre box b ank for llre Sl !

Process Pump

Description PA3313 PAP3313 Diaphragm kit KT-PA3-531 KT-PAP3-531 Check valve kit KT-PA3-536#1 KT-PAP3-536#1 Foot kit KT-PA3-40 KT-PAP3-40 The maintenance procedure is to be distributed individually. Please contact your SMC sales representative for details. 15 Piping and Operation Caution Maintain the proper tightening torque for fittings and mounting bolts, etc.