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Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Thread type Nil R N NPT G G INDEX 498 Series AS-FS Needle Valve/Flow-rate Characteristics AS1201FS-M5, AS1211FS-M5 AS2201FS-01, AS2211FS-01 AS2201FS-02, AS2211FS-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 06, 07, 08, 09, 10 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

FH440-04 FH440-06 FH440-08 FH440-10 FH440-12 FH640-03 FH640-04 FH640-06 FH640-08 FH640-10 FH640-12 3/8 3/8 10 10 FH441-04 FH441-06 FH441-08 FH441-10 FH441-12 FH441-16 FH441-20 FH441-24 FH641-04 FH641-06 FH641-08 FH641-10 FH641-12 FH641-16 15 (1/2B) 15 (1/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4

Toggle lever VM1010-4N-08 VM1010-4NU-08 VM1110-4N-08 VM1110-4NU-08 JIS Symbol/2 port 3 port Panel mounting hole T.T. (Total Travel) 40 Lock nut thick 2 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4N-08 VM1010-4N-08 Bottom ported 3 port 2 port VM1110-4NU-08 VM1010-4NU-08 Applicable tube 4 N F.O.F. 40 T.T.

Toggle lever VM1010-4N-08 VM1010-4NU-08 VM1110-4N-08 VM1110-4NU-08 JIS Symbol/2 port 3 port Panel mounting hole T.T. (Total Travel) 40 Lock nut thick 2 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4N-08 VM1010-4N-08 Bottom ported 3 port 2 port VM1110-4NU-08 VM1010-4NU-08 Applicable tube 4 N F.O.F. 40 T.T.

76.5 77 78 8 6 KM14-06-08-01S-3 31 39 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 43 44 66 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 94 95 98.5 88 89 90.5 10 8 KM14-08-10-02S-3 47 19 70 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19 15.2 52.6 18.5 12.8 21 KM15 Precautions

, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Toggle Lever/VM1000-4N-08, VM1000-4NU-08 VM1100-4N-08, VM1100-4NU-08 JIS Symbol/2 port 3 port Panel mounted hole Applicable tube 0.5MPa supply T0425 TU0425, T0403, TS0425 Side piping 3 ports 2 ports VM1100-4NU-08 VM1000-4NU-08 VM1100-4N-08 VM1000-4N-08 4N F.O.F. 40 P.T.

Toggle lever VM1010-4N-08 VM1010-4NU-08 VM1110-4N-08 VM1110-4NU-08 JIS Symbol/2 port 3 port Panel mounting hole T.T. (Total Travel) 40 Lock nut thick 2 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4N-08 VM1010-4N-08 Bottom ported 3 port 2 port VM1110-4NU-08 VM1010-4NU-08 Applicable tube 4 N F.O.F. 40 T.T.

Symbol Type Note Nil Without option Symbol Vacuum (V) port 06 6 08 8 07 1/4" 09 5/16" When R is selected for q, P needs to be selected.

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D