Type: [Fitting] Pipe/Plug, Fitting Type: Other shapes, Body Material: 316 Stainless Steel, Application: Standard/Mini, Packing, Material of O-Ring: [Fluororubber] Fluorine Rubber, Shape: [Others] Sputtering Cover, Compatible Fluid: Water / Air, Applicable Fitting Size (mm): -, Applicable tube fitting size (inches): 3/8

Type: [Fitting] Pipe/Plug, Fitting Type: Other shapes, Body Material: 316 Stainless Steel, Application: Standard/Mini, Packing, Material of O-Ring: [Fluororubber] Fluorine Rubber, Shape: [Others] Sputtering Cover, Compatible Fluid: Water / Air, Applicable Fitting Size (mm): 12, Applicable tube fitting size (inches): -

Type: [Fitting] Pipe/Plug, Fitting Type: Other shapes, Body Material: 316 Stainless Steel, Application: Standard/Mini, Packing, Material of O-Ring: [Fluororubber] Fluorine Rubber, Shape: [Others] Sputtering Cover, Compatible Fluid: Water / Air, Applicable Fitting Size (mm): -, Applicable tube fitting size (inches): 1/2

Type: [Fitting] Pipe/Plug, Fitting Type: Other shapes, Body Material: 316 Stainless Steel, Application: Standard/Mini, Packing, Material of O-Ring: [Fluororubber] Fluorine Rubber, Shape: [Others] Sputtering Cover, Compatible Fluid: Water / Air, Applicable Fitting Size (mm): 16, Applicable tube fitting size (inches): -

1

23 3EB 2B 2B 1P (29.5) (For 12) 5EA 4A 4A One-touch fitting [4(A), 2(B) port] Applicable tube O.D.

2

-A C2SL-23-A C3SL-23-A C4SL-23-A With level gauge C3LL-38-A C4LL-38-A Note) Bowl seal is included for the AL20-A to AL60-A.

CATALOG

91 71 23 44 26 80 63 16.5 IS1000E-303 38 IS1000M-6 15 100 72.5 23 54 AC3000 IS1000E-304 12 40 80 63 17.5 *Without Yoke Clip.

Table of Contents

22 20 23 22 23 22 27 23 22 27 25 24 27 25 24 27 10 10 27.5 20.8 4 2.5 13 15.5 1.5 19.3 3 2-applicable tubing 10 27.2 20.5 13 19.3 10 12 3 6 15.2 4 12 30.2 23.5 23 23.3 12 14 15.7 16 17 15.7 16 17 15.7 17 15.7 18.8 17 15.7 18.8 19 17.7 18.8 19 17.7 18.8 30.2 23.5 4 24.3 23 23.3 24.3 23 24.3 23 27.3 24.3 23 27.3 27.5 26.2 27.3 27.5 26.2 27.3 5 19 30.2 23.5 16.2 8 12 14 16 30.2 23.5 5 6 25

Table of Contents

17.5 15 17.5 22 23 23 24 22 23 23 24 Note 2) 2 magnets for auto switches are equipped to the magnet mounting block.

Table of Contents

Port size VCB2 VCW20-12-01A 34 40 25 30 12.8 12.8 5 4.5 6 13 1/8, 1/4 VCW30-12-02A 42 52 30 40 19 19 6 5.5 7 19 1/4, 3/8 VCB3 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-02A 42 52 30 40 23 23 6 5.5 7 19 1/4, 3/8 VCB4 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-06A 56 65 44 53 28.2 28.2 6 5.5 7 26 3/4 2 mounting screws (for mounting bracket) are included

Fluoropolymer Piping Equipment

LQ1T21-ST1-R39 6 Body size 3 6 5 20 20 9 18 17 17 17 36.5 41.1 36.5 23 23 23 3.6 LQ1T21-ST2-R41 Body size 3 6 6 20 41.1 36.5 LQ1T32-ST1-R37 8 Body size 3 8 5 20 20 9 18 17 17 17 36.5 41.1 36.5 23 23 23 5.5 LQ1T32-ST2-R40 Body size 3 8 8 20 41.1 36.5 LQ1T41-ST1-R1 12 Body size 3 12 24 24 21 17 21 34 41.5 34 28 23 28 5.8 LQ1T41-ST1-R37 12 Body size 5 12 24 24 21 26 21 39.5 52.5

SY

Blanking plate assembly For types 20P, 23P Blanking plate assembly Type 20 Type 23 Type 20P Type 23P Series Assembly part no.

Table of Contents

21 23 21 23 23 24 23 24 23 24 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 6 8 6 8 8 10 8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension

Slide Unit Series CX2/CXWM/CXWL

Auto switch model Hw 23 Hs 12.5 Ht 15 Auto switch model Hw 23 Ht 15 Hv 10.5 D-A7, D-A8 D-F7, D-J79, D-J79W, D-F7PW, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V D-J79C D-F7LF D-A7, D-A8 D-F7, D-J79, D-J79W, D-F7PW, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V D-J79C D-F7LF 23 12.5 15 23 15 11.5 22 23 23 24 30 12.5 15 12.5 15 12.5 15 17.5 15 17.5 15 22 23 23 24

Slide Unit Series CX2/CXWM/CXWL

Auto switch model Hw 23 Hs 12.5 Ht 15 Auto switch model Hw 23 Ht 15 Hv 10.5 D-A7, D-A8 D-F7, D-J79, D-J79W, D-F7PW, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V D-J79C D-F7LF D-A7, D-A8 D-F7, D-J79, D-J79W, D-F7PW, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V D-J79C D-F7LF 23 12.5 15 23 15 11.5 22 23 23 24 30 12.5 15 12.5 15 12.5 15 17.5 15 17.5 15 22 23 23 24

5-Port Solenoid Valve

23 46.1 81.1 5 Refer to panel fitting dimensions for details.

AS

37.8 48 39.7 59 8 5/16" 15.2 12.9 20.6 28.2 18.5 23 40 45.4 40.4 35 3/8 69 AS331F-03-10 AS331F-02-11 18.5 43.7 53.9 21 23 32.6 16.2 43.7 52.4 63 10 3/8" 18.5 23 32.6 21 19 16.2 56 AS331F-03-12 AS331F-03-07 13.2 38.7 17 20.6 25.6 12.9 45.4 54.2 44.9 65 12 1/4" 20.9 23 34.4 22 59 AS431F-04-10 AS331F-03-09 15.2 28.2 40.2 35.2 39.7 45.4 40.4 18.5 20.6 48 12.9 23 57.1 49.4 104 10 3/8 5/16" 18.5

CXWM/CXWL

17.5 15 17.5 22 23 23 24 22 23 23 24 Note 2) 2 magnets for auto switches are equipped to the magnet mounting block.

KJ

22 20 23 22 23 22 27 23 22 27 25 24 27 25 24 27 10 10 27.5 20.8 4 2.5 13 15.5 1.5 19.3 3 2-applicable tubing 10 27.2 20.5 13 19.3 10 12 3 6 15.2 4 12 30.2 23.5 23 23.3 12 14 15.7 16 17 15.7 16 17 15.7 17 15.7 18.8 17 15.7 18.8 19 17.7 18.8 19 17.7 18.8 30.2 23.5 4 24.3 23 23.3 24.3 23 24.3 23 27.3 24.3 23 27.3 27.5 26.2 27.3 27.5 26.2 27.3 5 19 30.2 23.5 16.2 8 12 14 16 30.2 23.5 5 6 25

AC Servo Motor Driver (Pulse input type/Positioning type ）

When MBR is set for the CN1-23 pin, turning ABSM on will change the CN1-23 pin to ABSB1 (ABS transmission data bit 1). Therefore, configure an external sequence to generate the electromagnetic lock torque as soon as ABSM and MBR turn off.