5-Port Solenoid Valve

-C8-WO-V02F. * 1(P), 5(EA), 3(EB), X, and PE ports are side ported. 286 SY3000/5000/7000 Series Dimensions: SY5000 Series Bottom Ported Plug-in Single Unit/Sub-plate SY5l0 0 1l-lll1-Wl-B02l (Bottom ported) For "F" marking (Thread type) 46.4 10.8 Plug M5 x 0.8 (X: External pilot port) M5 x 0.8 (PE: External pilot EXH port) 15.5 17.5 F 103.4 Manual override ( ) 71.3 (Max. 3) Push-turn locking

Metal Seal/Rubber Seal Series VQ Body Ported

P kitFlat cable connector T kitTerminal block C kitIndividual connector S kitSerial transmission unit C3 (3.2) C4 (4) M5 (M5 thread) VV5Q04VQ040 VQ041 VQ0 225 Side C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) Option Built-in silencer, direct exhaust F kitD-sub connector P kitFlat cable connector T kitTerminal block C kitIndividual connector S kitSerial transmission unit VQC VQ140

Vacuum Pad

Tightening torque Dimensions: With Buffer ZP2-T WK -B5 ZP2-T 20 WK -B5 Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 5 5 D E 13 D E 13 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) 3 3 3 3 M10 x 1 M10 x 1 (F) (F) M5 x 0.8 M5 x 0.8 6 6 a 8 8 Dimensions Model Dimensions Y Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x

Vacuum Pad

Tightening torque Dimensions: With Buffer ZP2-T WK -B5 ZP2-T 20 WK -B5 Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 5 5 D E 13 D E 13 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) 3 3 3 3 M10 x 1 M10 x 1 (F) (F) M5 x 0.8 M5 x 0.8 6 6 a 8 8 Dimensions Model Dimensions Y Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x

Vacuum Pad

Tightening torque Dimensions: With Buffer ZP2-T WK -B5 ZP2-T 20 WK -B5 Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 5 5 D E 13 D E 13 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) 3 3 3 3 M10 x 1 M10 x 1 (F) (F) M5 x 0.8 M5 x 0.8 6 6 a 8 8 Dimensions Model Dimensions Y Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x

Vacuum Pad

Tightening torque Dimensions: With Buffer ZP2-T WK -B5 ZP2-T 20 WK -B5 Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 5 5 D E 13 D E 13 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) 3 3 3 3 M10 x 1 M10 x 1 (F) (F) M5 x 0.8 M5 x 0.8 6 6 a 8 8 Dimensions Model Dimensions Y Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x

Base Mounted Metal Seal/Rubber Seal Series VQ

(For L kit) VVQ1000-2A-1-L Tie-rod (2 pcs.) and lead wire assembly for extensions are attached Port size Electrical entry With One-touch fitting for 3.2 With One-touch fitting for 4 With One-touch fitting for 6 M5 thread C3 C4 C6 M5 F kit for 2 to 12 stations/Double wiring F kit for 13 to 24 stations/Double wiring F kit for 2 to 24 stations/Single wiring P, J, S kit for 2 to 12 stations/Double

ZP

) Rc1/8 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) 20 29.5 25 6 6 60.5 25 6 6 4 x M5 x 12 59.5 70 F (G) 19 28.5 F (G) 50 Y X Y X 4 x M4 x 10 30 30 E B A D 34 4 E B A D 40 4 Dimensions Dimensions B 65 83 ZP2-TF63HB ZP2-TF80HB Model D 46 58 A 63 80 E 68 85 F 31.5 37 G 91 96.5 X 40.6 46.1 Y 21 27.5 B 103 129 ZP2-TF100HB ZP2-TF125HB Model D 69 89 A 100 125 E

Air Slide Table

J I Pilot port 2 x M5 x 0.8 7 5H9 ( ) depth 2 +0.030 0 43 7.3 (Maximum screw-in depth) 5.5 38.6 +0.030 0 5H9 ( ) depth 2 3.3 (Minimum screw-in depth) B 30 42 60 3 72 36 B N x M5 x 0.812 F N 2 1 x F 29 Cross-sectional view B-B 2 x M5 x 0.8 thread depth 7 27 16 36 48 M 0.5 7 ZZ Z J I Bottom view of MXQ20A-50Z Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) G (NN 1) x H 5H9 ( ) depth

Table of Contents

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

ZP

Hexagon width across flats 8 Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width across flats 7 Hexagon width across flats 7 H: M5 x 0.8 H: M6 x 1 F H: M6 x 1 H: M8 x 1 A B K L Y Model A B C D E C D E L K Y Model F G G G G F F ZPY10B ZPY13B ZPY40B ZPY50B 10

ZP

E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 40 43 6.5 15 4.5 40.5 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 50 53 7.5 19.5 25.5 51.5 12.5 16 18 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(-F) M plug connector (M): 10-SYJ5123-M-M5(-F) DIN terminal (D, Y): 10-SYJ5123-M5(-F) M8 connector (WO): 10-SYJ5123-WO-M5(-F) D Y Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] 63.2 [65.4] 82.1 83 72.1 3 3 58.2 64.7 3 3 42.2 19.5 19.5 19.5 11 11 11 19.5 11 2 x 2.6

Table of Contents

NH NC DTT UU TT UU Auto switch magnet holder M5 x 0.8 (Port) -X GA GA 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) Cushion needle G G 20GB M5 x 0.8 (Hexagon socket head plug) N A M5 x 0.8 (Port) Data Z + Stroke M5 x 0.8 (WW) (WW) (Hexagon socket head plug) 2 x 2-J depth K M5 x 0.8 (Hexagon socket head plug) XX XX M5 x 0.8 (Port) VV VV 2-M5 x 0.8 (Hexagon socket

Table of Contents

F F E E B C Cross interface E: 4-Rc F: Without thread A D E (mm) Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC10 AC20 22 40 40 40 AC25, AC30 28 48 43 49 Caution on Mounting AC40 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use

Table of Contents

Fixed 4% F .S.

NCQ2/CQ2

Standard 59 (mm) CQ2 NCQ2 NCQ2 CQ2 NCQ2 P CQ2 P Bore size (mm) Stroke range (mm) W Q N F E M I J G K2 C H K1 Th9 H B C D L Z A inch 12 5 to 30 15 3.5 15.5 25 32 1.5 5.4 5.2 5 #8-32UNC 37.2 30.2 10 M3 x 0.5 3.5 6 6 15 0 0.043 M5 x 0.8 M5 x 0.8 16 5 to 30 15 3.5 29 20 1.5 38 5.4 6 6 38 31 10 M4 x 0.7 #8-32UNC 3.5 8 8 20 0 0.052 M5 x 0.8 M5 x 0.8 20 5 to 50 17.5 25.5 5.5 36 2 47 7 8

Compact Cylinder

Standard (mm) Bore size (mm) Stroke range (mm) A B C D E F G H I J K1 K2 L M N Q W Z Th9 P 12 16 20 25 0 0.043 37.2 30.2 6 6 25 10 1.5 M3 x 0.5 32 5.2 5 3.5 15.5 3.5 15 15 M5 x 0.8 5 to 30 0 0.052 38 31 20 8 8 29 10 1.5 M4 x 0.7 38 6 6 3.5 3.5 15 20 M5 x 0.8 5 to 30 0 0.043 25.5 17.5 43 34 7 10 36 9.5 2 M5 x 0.8 47 8 8 4.5 5.5 13 M5 x 0.8 5 to 50 0 28 19 47 37 12 12 40 11 2 M6 x

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(L): 10-SYJ52M-L-M5 (-F) M plug connector (M): 10-SYJ52M-M-M5 (-F) DIN Terminal (D): 10-SYJ52M-D-M5 (-F) M8 connector (WO): 10-SYJ52M-WO-M5 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 60.9 28.1[35.1] MAX.10 74.6 53.4 42.1 12.7 32.6 M8 x 1 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 65.5[67.7] 75.5 55.7[57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8 9 8 9 14.5 3 14.5 3

Table of Contents

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.