Table of Contents

VX21 0 1 2 3 VX021N-12A VX22 0 2 3 4 VX23 0 2 3 4 VX022N-12A Dimensions page 22 (Single unit) VX22 0 5 6 VX23 0 5 6 VX023N-12A-L 8 9 Series VX21/22/23 For Oil /Manifold Solenoid Valve for Manifold/Valve Specifications N.C. N.O.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

VX21 0 1 2 3 VX021N-12A Dimensions page 22 (Single unit) VX22 0 2 3 4 VX23 0 2 3 4 VX022N-12A VX22 0 5 6 VX23 0 5 6 VX023N-12A-L 4 5 Series VX21/22/23 For Water /Manifold Solenoid Valve for Manifold/Valve Specifications N.C. N.O.

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Model Voltage L (With light) Voltage symbol 5 6 24 VDC 12 VDC VXE21 0 1 2 3 VX021N-12A VXE22 0 2 3 4 VXE23 0 2 3 4 VX022N-12A VXE22 0 5 6 VXE23 0 5 6 VX023N-12A-L Dimensions P. 17 (Single unit) 8 Series VXE21/22/23 For Oil /Manifold Fluid and Ambient Temperature Solenoid Valve for Manifold/Valve Specifications N.C.

58

Series CS2 XC86B, XC86C H A L1 H1 Symbol Applicable knuckle joint part number Y type double knuckle Y-12A Y-14A Y-16A H1 L1 A H I type single knuckle I-12A I-14A I-16A Bore size (mm) 125 140 160 156.5 161.5 170.5 100 105 110 3.5 3.5 3.5 50 50 56 110 110 120 Series CS2 XC86D, XC86E H A L1 H2 H1 Symbol Applicable rod end nut Applicable knuckle joint part number Y type double knuckle Y-12A

Made to Order

Applicable rod end nut A L1 H1 H A L1 H1 H2 H I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A 125 140 160 125 140 160 NT-12 NT-12 NT-16 110 50 3.5 100 156.5 125 65 100 181 18 110 50 3.5 105 161.5 125 65 105 186 18 120 56 3.5 110 170.5 140 76 110 198 21 Symbol -XC87 Cylinder with

V100

VVQ100-12A-1 VVQ100-12A-2 VVQ100-12A-3 L dimension 1.5 m 3 m 5 m Mounting direction D side mounting U side mounting D U Note) The number of manifold stations cannot be changed.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

L R L R Body type Plug-in type Non plug-in type AXT625-12A Part no. Note) L: U side mount R: D side mount EXH block disk When valve exhaust affects the other stations in the circuit, insert EXH block disk in between stations to separate valve exhaust. Body type Plug-in type Non plug-in type AXT625-12A Part no.

5-Port Solenoid Valve

Part numbers of mounting screw (For repairs) SY3000: SY3000-23-12A (2 pcs.) SY5000: SY5000-221-2A (2 pcs.) SY7000: SY7000-221-2A (3 pcs.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

JSX021-12A-3 20 Stainless steel JSX022-12A-3 Size Port size Bracket assembly part no. (With screws) 30, 40 1/4, 3/8, 1/2 VXZ30S-14A-1 50, 60 3/4, 1 VXZ50S-14A-1 Brass, Stainless steel 1/8, 1/4, 3/8 JSX20-12A-4 30 1/4, 3/8 20 Aluminum 1/8, 1/4, 3/8 VX021N-12A 30 1/4, 3/8 VX022N-12A Stainless steel Piping 2.

VFS

2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

Speed Controller with One-touch Fitting

12 18.5 29.7 40.9 34.5 17 53 AS32m1F-G03-06A 6 10.4 21.8 33 36.4 1/4 21 16.6 50 48.4 43.5 41.9 13.3 38 AS32m1F-G03-08A 8 13.2 22.7 33.9 14.2 39 AS32m1F-G03-10A 10 15.9 26.7 37.9 28 15.6 40 AS32m1F-G03-12A 12 18.5 29.7 40.9 26.8 17 42 AS42m1F-G04-10A 10 10.4 21.8 33 28.7 3/8 21 16.6 42.3 40.7 34.8 33.2 15.6 72 AS42m1F-G04-12A 12 18.5 30.8 45.2 35.1 17 74 AS42m1F-G04-16A 16 23.8 34.8 49.2

VFR

VS4 ARBF5050-00-B-1 ARBF5050-00-B-2 B reduced pressure VQ7 EVS Body type Plug-in type AXT628-12A Non plug-in type Part no. VFN EXH block disk Use exhaust blocks to eliminate back flow to other stations. Use supply disks to operate two pressures on the same manifold.

Metal Seal/Rubber Seal Series VQ Body Ported

AXT661-12A AXT661-14A AXT661-14A-6 AXT661-14A-10 AXT661-14A-20 AXT661-14A-30 Lead wire length Single/3 position part no. AXT661-12A Double solenoid part no.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

EXH block plate: AXT625-12A Valve VFS210 (Single) Release valve spacer SUP port Block plate Note) VVFS2000-24A-12 R.

AC Servo Motor Driver (Network card type ）

Rising edge detection is enabled. 10 60BAh Touch probe position1 positive value does not change. 11 Turns on Touch Probe Signal (TPR1). 12 60B9h Bit 1 = 1 Turns on the Touch Probe1 negative edge stored status. 12a 60BAh Sets the latched position feedback for Touch probe position1 negative value. 13 60B8h Bit 0 = 0 Disables Touch Probe1. 14 60B9h Bit 0, 1, 2 = 0 Clears all the status Bit

One-touch Fittings

[mm] Model D1 D2 L Weight [g] 8 KQ2C-08A 12.8 9.2 2.6 0.1 10 KQ2C-10A 15.2 11.2 2.7 0.1 12 KQ2C-12A 17.6 13.2 2.7 0.1 16 KQ2C-16A 22.4 17.2 3.2 0.2 Applicable tubing O.D.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

12 18.5 29.7 40.9 34.5 17 53 AS32l1FG-G03-06A 6 10.4 21.8 33 36.4 1/4 21 16.6 50 48.4 43.5 41.9 13.3 37 AS32l1FG-G03-08A 8 13.2 22.7 33.9 14.2 38 AS32l1FG-G03-10A 10 15.9 26.7 37.9 28 15.6 39 AS32l1FG-G03-12A 12 18.5 29.7 40.9 26.8 17 41 AS42l1FG-G04-10A 10 10.4 21.8 33 28.7 3/8 21 16.6 42.3 40.7 34.8 33.2 15.6 69 AS42l1FG-G04-12A 12 18.5 30.8 45.2 35.1 17 71 AS42l1FG-G04-16A 16 23.8 34.8

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

12 18.5 29.7 40 34.5 17 42 AS32l1F-U03-06A 6 10.4 21.8 32.1 36.4 50 48.4 43.6 42 1/4 19 16.6 13.3 39 AS32l1F-U03-08A 8 13.2 22.7 33 14.2 AS32l1F-U03-10A 10 15.9 26.7 37 28 15.6 40 AS32l1F-U03-12A 12 18.5 29.7 40 26.8 17 42 AS42l1F-U04-10A 10 1/2 24 15.9 18.8 27.4 40.3 36.2 50.8 49.2 42.2 40.6 15.6 52 AS42l1F-U04-12A 12 18.5 30.8 43.7 35.1 17 54 AS42l1F-U04-16A 16 23.8 34.8 47.7 32.7 20.6

3 Port Solenoid Valve Series VQ100 1

VVQ100-12A-1 VVQ100-12A-2 VVQ100-12A-3 L dimension 1.5 m 3 m 5 m Mounting direction D side mounting U side mounting D U Note) The number of manifold stations cannot be changed.

3 Port Solenoid Valve Series VQ100

VVQ100-12A-1 VVQ100-12A-2 VVQ100-12A-3 L dimension 1.5 m 3 m 5 m Mounting direction D side mounting U side mounting D U Note) The number of manifold stations cannot be changed.