5 Port Solenoid Valve Series VQZ1000/2000/3000

VFS VFR VQ7 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (A) (B) 2 4 (R2) (P) (R1) 5 1 3 (R2) (P) (R1) 3 5 1 (R2) (P) (R1) 3 1 5 (R2) (P) (R1) 5 1 3 (R2) (P) (R1) 3 5 1 (R2) (P) (R1) 3 1 5 Note) Except metal seal type of

VQZ1000/2000/3000

(A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

0.

Blanking plug KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 L Dimensions (mm) A Applicable fitting size d Model A L D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 D L DIN rail AXT100-DR-l 7.5 As for l, enter the number from the DIN rail dimensions table.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

AKH/AKB Series

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

AKH/AKB Series Check Valve with One-touch Fitting

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

2

)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve Note 6) VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter Note 6) E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06 10 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter Note 6) 01-A IS10E-2002-A 03-A 02-A IS10E-3003-A 04-A Cross spacer

AS

Model Meter-out type Rod and applicable tubing O.D. 4 6 ) ) 8 ) 10 ) Meter-in type AS1000P-04-04 AS2000P-04-04 AS2000P-06-06 AS2500P-06-06 AS3000P-08-08 AS3000P-10-10 AS1010P-04-04 AS2010P-04-04 AS2010P-06-06 AS2510P-06-06 AS3010P-08-08 AS3010P-10-10 ) ) The lock nut provides identification.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Modular F.R.L. Units

)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve 6 VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter 6 E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06-A 10-A 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter 6 01-A IS10E-2002-A 03-A 02-A IS10E-3003-A 04-A Cross spacer 6 Y14-M5-A Y24

Secondary Batteries

Port size Body size Port size Symbol 2 3 4 02 03 04 06 1/4 3/8 1/2 3/4 *Specifications and dimensions for the 90-series are the same as standard products.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Note) Metric size Inch size Control type KE 0 1 Meter-out Meter-in 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 AS-FG 6 8 AS-FP With One-touch fitting 10 AS-FM AS-FM For low speed control Note) For applicable tubing O.D. selection, refer to the Model on page 716. Use 1/8" tube.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

Series AS-FM/AS-M/ASD-FM

Type 2 3 Elbow Universal Applicable tube outside diameter Metric size Inch size 3.2 4 6 8 10 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 23 04 06 08 10 Control system 0 1 Meter-out Meter-in Use a 1/8" tube.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

Compact Vacuum Unit

Recommended fittings: KQ2S06-01S, KQ2S04-01S, KJS06-01S 2. When mounting or removing the fittings, etc. to and from the manifold base, hold the manifold base with a wrench. If the ejector/vacuum pump system is held, it may cause air leakage or damage to the product. 2.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

KFx-OMV0007

Elbow connector Union nut Sleeve Body Swivel elbow connector Piping Method Equivalent tightening torque [Nm] KF-04 1/6 to 1/3 3 to 7 KF-06 1/6 to 1/3 3 to 7 KF-08 1/6 to 1/3 3 to 7 KF-10 1/6 to 1/3 5 to 10 KF-12 1/6 to 1/3 5 to 10 Fitting size Appropriate tightening rotations Caution 1. Insertion of tube 1) Take a tube having no flaws on its periphery and cut it off at right angles.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Recommended tube fittings: KQ2S06-01S, KQ2S04-01S (2) Follow the tightening instructions shown below for each thread. 1/8 (PV port): First, tighten the fitting by hand, then use a B wrench appropriate to tighten it a further two or three turns. Tightening torque is 3 to 5N as a guide.