Table of Contents

4 9.3 5 4 9.3 AQ240F-06-00 AQ240F-06-06 13.7 13.7 15.4 6.2 13.7 26.7 40.7 8 10.0 14.7 6 11.6 6 6 11.6 6.2 40.7 AQ340F-06-00 AQ340F-06-06 13.7 19.5 13.7 13.7 6.3 44.8 31.7 13 19.6 11.8 6 11.6 11 6 11.6 6.3 44.8 AQ240F-07-00 AQ240F-07-07 13.7 13.7 15.4 6.2 13.7 27.3 40.7 8 10.0 15.1 6.2 1/4" 12 6 1/4" 12 40.7 AQ340F-07-00 AQ340F-07-07 16.8 20.3 13.7 16.8 7.1 52.2 33.1 20.0 13 11.8 1/4" 13.2

Table of Contents

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

KQ2

(inch) Min. port size Applicable tubing Note) L Q M2 M1 Mass (g) D Model a b Applicable tubing KQ2T01-03 KQ2T01-07 KQ2T03-05 KQ2T03-07 KQ2T05-07 KQ2T07-09 KQ2T07-11 KQ2T09-11 KQ2T09-13 KQ2T11-13 10.4 13.2 11.4 13.2 13.2 15.2 17.9 17.9 21.7 21.7 18 20.5 19.5 20.5 20.5 23 26 26 29 29 4.5 5.3 4.8 5.3 5.3 6 6.6 6.6 7.8 7.8 16 17 16.5 17 17 18.5 21 21 22 22 5 8 6 8 8 11 17 17 26 28 5 32 2.5 15.5

AS

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

4/5 Port Solenoid Valve

-WO-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 125.2 Max. 10 75.4 50.1 [57.1] 64.1 34.7 54.6 49 M8 x 1 37.1 61.2 [68.2] Approx. 300 (Lead wire length) Pg7 6 6 6 6 107 [111.4] 87.4 [91.8] 65.2 58.7 18.7 45.5 45.5 45.5 45.5 105.2 17 17 17 17 17 17 17 17 42.7 127 2.7 6 6 6 6 25.2 32.6 8.5 8.5 8.5 8.5 42.6 43.5 21.5 21.5 21.5 21.5 23.7 [25.9] 33.5 [35.7] Refer to back

Table of Contents

Pressure 0.7 MPa PM: Raised up to 0.43 MPa 6 x 6 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 10 pcs. Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs.

Speed Controller with Indicator

-04 AS131FS1-M5E-06 6 10.4 20.9 20.4 36.6 8 AS131FS1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FS1-M5E-01 1/8 7.2 9.4 9 17.2 19.8 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FS1-U10/32-01 AS131FS1-M5E-03 5/32 8.2 AS131FS1-U10/32-03 AS131FS1-M5E-07 1/4 11.2 18.6 20.9 20.4 36.6 8 AS131FS1

Vacuum Unit

C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 35 Vacuum (V) port 1 Refer to page 38 for dimensions with a mounting bracket.

One-touch Fittings

[mm] 4 1/8 KQ2D04-01lS 10 8.2 15.8 23.3 24.3 13.3 5.7 6 3.2 8.2 6 6 3.6 9.2 1/4 KQ2D04-02lS 14 8.2 15.8 27.7 27.1 13.3 5.7 6 3.2 8.2 6 6 3.6 19 O N L1 M 6 1/8 KQ2D06-01lS 12 10.4 16.8 24.3 26.4 13.3 6.7 6 3.2 10.4 13.9 11 5.4 10.2 1/4 KQ2D06-02lS 14 10.4 16.8 28.7 29.2 13.3 6.7 6 3.2 10.4 13.9 11 5.4 19.1 3/8 KQ2D06-03lS 17 10.4 16.8 30.1 30.2 13.3 6.7 6 3.2 10.4 13.9 11 5.4 31 Q 8 1/8 KQ2D08

Compact Manifold Regulator Series ARM5

Metric size Inch size Stations Symbol 1 2 3 4 5 6 7 8 9 M Elbow Straight Elbow OUT side Mounting position Elbow Straight Elbow OUT side Mounting position IN side Straight 6 IN side Straight 1/4 1 station Fitting type Fitting type 2 stations 8 6 8 4 6 4 6 1/4 1/4 1/4 5/16 5/16 5/32 5/32 Symbol Symbol 3 stations 07 08 09 10 19 20 21 22 26 27 28 29 33 34 35 36 57 58 59 60 69 70 71 72 76

VM

8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

Proposals for Energy Saving

D L1 56 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Nozzles for Blowing Series KN Nozzle for One-touch fitting/KN (mm) Model Nozzle size D Connection size L1 A 1 1.5 2 1.5 2 2 2.5 2.5 3 6 6 6 8 8 10 10 12 12 35 35 35 39 39 43 43 45.5 45.5 18 18 18 20.5 20.5 22 22 24 24 KN-Q06-100 KN-Q06-150 KN-Q06-200 KN-Q08-150 KN-Q08-200 KN-Q10-200 KN-Q10-250 KN-Q12

Fluoropolymer Piping Equipment

33.5 46.5 35 LQ1E32-T-R1 C L2 10 M A side 20 17 23 SMC 6 x 4 5 9 6 36.6 28.6 15 3.9 LQ1E32-T-R8 10 x 8 10 33.6 20 5.5 LQ1E32-T-R9 12 x 10 12 37.6 24 LQ1E32-T-R10 19 x 16 19 33.5 46.5 35 LQ1E41-T-R1 6 8 (E) C H L1 8 LQ1E41-T-R2 8 x 6 8 6 LQ1E41-T-R3 6 x 4 6 30 15 3.9 LQ1E41-T-R8 19 x 16 19 39.6 49 35 9.4 LQ1E41-T-R9 25 x 22 25 41 60 46 LQ1E51-T-R8 19 25 x 22 25 29 26 48.5 66.5 46

V

Wiring Specs 20 20 Applicable up to 20 Solenoid M A N I F O L D O P T I O N S PORT PLUGS Applicable Fitting Size d A L D Model 16 32 6 KQP-04 4mm 16 32 6 KQP-03 5/32 18 35 8 KQP-06 6mm 18 35 8 KQP-07 1/4 20.5 39 10 KQP-08 8mm 20.5 39 10 KQP-09 5/16 Inserts easily into an unused cylinder port and/or SUP/EXH Ports.

Speed Controller with One-touch Fitting

Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

90

size: 4 Inch size: 5/32" 3.5 38.5 A 16.5 1 Suction filter 15 Vacuum (V) port 78.8 A C V port type 06 08 07 09 6 8 1/4" 5/16" 8.25 11.4 10.8 11.4 4 6 4.76 6 1 Refer to page 22 for dimensions with a bracket mounted.

AC Servo Motor Driver (Pulse input type/Positioning type ）

DI0 DI0 DI0 PD12 20 DICOM DICOM DICOM 21 DICOM DICOM DICOM 22 O (Note 6) (Note 6) (Note 6) CPO PD23 CPO CPO 23 O (Note 6) ZP (Note 6) ZP (Note 6) ZP PD24 24 or less O INP INP INP PD25 25 O (Note 6) (Note 6) (Note 6) MEND PD26 MEND MEND 26 27 I (Note 3) (Note 3) (Note 3) TLA TLA TLA 28 LG LG LG 29 30 LG LG LG 31 32 33 O OP OP OP 34 LG LG LG 35 (Note 8) I (Note 10) (Note 10) (Note 10) PD46

VM

8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

LEC-OM071xx

1 6 Utility Functions (Fn) 6.

LVQ

Type of fitting Tubing size Symbol Nil 1 Symbol 03 04 05 06 07 06 08 10 07 11 Symbol 10 12 11 13 12 13 19 19 25 Tubing O.D. 1/8" (3) 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" Tubing O.D. 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1". 25 Applicable fitting LQ2 LQ1 Body class Applicable fitting Body class Applicable fitting 4 LQ1,LQ2 2 Body class LQ2 Symbol 2 3 4 5 6 LQ2 Applicable fitting Body class