Table of Contents

ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8 9.6 9.6 10.7 10.7 ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

ZP

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

Vacuum Pad

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

Vacuum Pad

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

Vacuum Pad

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

Speed Controller with Indicator

6 1/4 17 13 13.3 10.4 21.8 33 36.4 63.1 61.7 54.6 53.2 24.5 28.5 9.3 19.2 55 AS321FS-G02-08 8 13.2 22.7 33.9 14.2 AS321FS-G02-10 10 15.9 26.7 37.9 35.7 15.6 57 AS321FS-G02-12 12 18.5 29.7 40.9 34.5 17 59 AS321FS-G03-06 6 1/4 21 16.6 45 AS321FS-G03-08 8 13.2 22.7 33.9 14.2 46 AS321FS-G03-10 10 15.9 26.7 37.9 28 15.6 47 AS321FS-G03-12 12 18.5 29.7 40.9 26.8 17 49 AS421FS-G04-10 10 1/2 27 15.9

VM

Toggle lever VM220-02-08 VM230-02-08 JIS Symbol 2 port Hexagon nut thick 6, across flats 27 EXH port (3 port only) 3 port Panel mounting hole 0.5 MPa supply 2-5.5 mounting hole 12 N F.O.F.

Micro Mechanical Valve Series VM1000

F.O.F. 4.5 mm 2.0 mm 2.5 mm 6 N Applicable tube Mounting hole 2 x 3.3 Toggle lever VM1000-4N-08 VM1000-4NU-08 VM1100-4N-08 VM1100-4NU-08 Symbol/2 port 3 port Panel mounting hole (A) 2 (A) 2 12 12 10 10 Lock nut thick 2 Max. 5 1 (P) 1 (P) 3 (R) 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing VM1100-4N-08 VM1000-4N-08 T0425 TU0425, T0403, TS0425 Side ported 3 port 2 port

Vacuum Unit

C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 35 Vacuum (V) port 1 Refer to page 38 for dimensions with a mounting bracket.

ZP

Model A B C D Y Y A B C D Flat Model ZPT10D-6-A10 10 12 15 24 6 Flat with ribs U C ZPT13 -6-A10 U C ZPT16 -6-A10 U C ZPT16D-6-A10 ZPT10 -6-A10 16 18 16 25 7 10 12 15 12 21 1.7 1.8 3 13 Dimensions by Stroke 16 18 12.5 21.5 1.2 3.5 10 16 G Model Dimensions by Stroke E F E F 10, 13 16 ZPTD10-6-A10 35.5 73.5 23 36.5 74.5 G Model E F E F ZPTD20-6-A10 45.5 111.5 46.5 112.5 51 U C ZPT 20-6-A10 U

5 Port Solenoid Valve

Voltage C Specifications 24 VDC 12 VDC Symbol 5 6 Note) For symbol, refer to page 7.

Table of Contents

Cable Color List of Each Terminal No. 3 5 7 Red 9 Blue 11 13 2 4 6 8 Red Yes 10 Blue Yes 12 1 Terminal no. Lead wire color Dot marking 1 9 Gray 10 11 12 2 3 Red 4 5 6 Pink 7 Blue 8 Terminal no.

Base Mounted Metal Seal/Rubber Seal Series VQ

1 M5V Power source connector Input connector 12 9 1 Signal-N 2 A Signal-P 4 B 2 VQC Terminal +5 V 6 +5V 6 4 Shield ground 9 SIELD SQ Optical fiber (Reserve) 12 RTS Pin no. 3, 5, 7, 8, 10 and 11 marked with are open.

Metal Seal/Rubber Seal Series VQ Body Ported

to MIL-C-24308) Top entry connector [-FU] D side n Stations 8 7 6 5 4 3 2 1 U side 55.5 (L plug connector) 1(P) SUP port 2-C8 AC, Latching 50.5 (L plug connector) Indicator light 49 (L plug connector) 50 AC, Latching 40.8 38.3 24.8 22.3 20.3 44 (L plug connector) 12 31 3(R) EXH port 2-C8 2n-C4, C6, C8 12 12 7.5 C4: One-touch fitting for 4 P = 16 28 C6: One-touch fitting for 6 C8: One-touch

VM

Toggle lever VM220-02-08 VM230-02-08 JIS Symbol 2 port Hexagon nut thick 6, across flats 27 EXH port (3 port only) 3 port Panel mounting hole 0.5 MPa supply 2-5.5 mounting hole 12 N F.O.F.

Hydraulic Filters

FH440-04 FH440-06 FH440-08 FH440-10 FH440-12 FH640-03 FH640-04 FH640-06 FH640-08 FH640-10 FH640-12 3/8 3/8 10 10 FH441-04 FH441-06 FH441-08 FH441-10 FH441-12 FH441-16 FH441-20 FH441-24 FH641-04 FH641-06 FH641-08 FH641-10 FH641-12 FH641-16 15 (1/2B) 15 (1/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-59-1A SV1000-59-2A 10 Applicable fitting size d A L D Model KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 SV1000 SX3000-77-1A SX3000-77-1A 16 4 16 32 6 SV2000-59-1A SV2000-59-2A 10 6 18 35 8 SV2000 SV2000-59-3A SV2000-59-3A 16 8 20.5 39 10 SV3000 SV4000 SV3000-59-1A SV3000-59-1A 10 10 22 43 12 SY9000-57-1A SY9000-57-1A 10 12 24 44.5 14 1/8" 16 31.5 5 5/32

13

93.3 47 29.5 10 15.3 4.2 15.8 ZH15DL-10-12-12 22.45 ZR (Mounting hole) I J K L M N O P Model ZM ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28

0.4

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 Port plug VVQ1000-58A The plug is used to block the cylinder port.

V

Model A L D Applicable Fitting Size d KQP-04 16 32 6 4mm KQP-03 16 32 6 5/32 KQP-06 18 35 8 6mm KQP-07 18 35 8 1/4 KQP-08 20.5 39 10 8mm KQP-09 20.5 39 10 5/16 KQP-10 22 43 12 10mm KQP-11 22 43 12 3/8 Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !