LEC-OM07605CN

1A.1 (1) LECSS2T (2) (2) [Pr.

5 Port Solenoid Valve

-19 (M3 x 26) 2 VF Valve + Restrictor spacer (VVQ4000-20A1 5 ) q AXT632-17-10 (M3 x 62) 3 VP4 q w w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Gasket Hexagon socket head screw Pilot valve assembly Sub-plate assembly 13 14 15 NBR Steel AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) Refer to How to Order Pilot Valve Assembly on page 1233.

Valve Single Unit

SX3000 SY3000-26-9A SX5000 SY5000-26-20A SX7000 SY7000-26-22A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no.

Table of Contents

VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector Mounting screws (2 pcs.)

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Alarm No.: 1A Name: Servo motor combination error Alarm content The combination of driver and servo motor is incorrect. Display Detail name Cause Check method Check result Action Target 1A.1 Servo motor combination error (1) The driver and the servo Check the model name of the servo motor and corresponding driver. The combination is incorrect. Use them in the correct combination.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Adapter Plate Assembly SYJ500-3-2A SYJ500-3-1A SYJ500-3-1A-1-Q SYJ500-3-1A-2-Q Round head combination screw Round head combination screw Round head combination screw A Round head combination screw Round head combination screw Gasket Gasket Round head combination screw Round head combination screw Round head combination

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

VFR

Material Description AXT632-3(M3 x 32) VFR3000-26-4 VFR31 VFR3000-26-4 VFR32 AXT632-3(M3 x 32) VFR3000-26-4 VFR33/34/35 NBR Hexagon socket head screw Gasket !1 AXT632-3(M3 x 32) Refer to How to Order Pilot Valve Assembly on page 3-5-30. Refer to How to Order Sub-plate Assembly on page 3-5-31. Steel !2 !

SZ3000

SZ3000-73-1A-L6 SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.

SZ3000

SZ3000-73-1A-L6 SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Note SJ3160-5CUCO 2 sets SJ3000-76-1A SJ2000 SJ3000 With power supply terminal (for PC wiring) SJ3000-120-1A-C8 1 set SJ3000-76-2A-05 Note) When ordering with an intermediate connector block assembly installed in the manifold, please order using the manifold specification sheet.

VFS

Material Description NVF2000-48 VFS21 VFS22 AXT624-19-1 AXT624-20-2 AXT624-20-2 AXT624-20-2 AXT624-26 AXT624-26 AXT624-26 !2 Detent assembly AXT624-11A VFS23/24/25 Return spring Gasket !1 Steel Hexagon socket head screw Stainless steel !0 o NBR !

Vacuum System Peripherals:

26 e Valve Model SX340 is for internal pilot.

5 Port Solenoid Valve

pins, 20 pins MIL Standard MIL Standard MIL Standard 20 pins Page 15 Page 19 Page 23 Page 45 Page 49 Page 53 Page 57 Page 61 Page 65 Page 79 2 Series S0700 Options Slim Compact Plug-in Manifold Bar Base / Options Blanking plate SS0700-10A-3 Individual EXH spacer SS0700-R-3-Cl Individual SUP spacer SS0700-P-3-Cl Blanking plate with output SS0700-1C3-l Page 26 Page 26 Page 26 Page 26 Plug-in

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

SYJ300/500/700

Example 10-SS3YJ3-20-03 1 set (Manifold base) 10-SYJ312M-5LZ-M3 2 sets (Valve) SYJ300-10-1A 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

0.4

Note) Electric current should be 1A or less (including the mounted valves).

3 Port Solenoid Valve

/set Tension bolt (With hexagon nut) r Note) If a bracket is intended to be mounted, select q Connector block assembly, w SUP/EXH end block assembly 1A or 3A, and e End block assembly 1A with mounting nut (Metric size: M3). Connector Block Assembly Part No.

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25