This is a legacy product, and replaced bySYJ314M-5MOZ

SOL. VALVE, BODY PORTED, 4/5 PORT SOLENOID VALVE, O84, 21 lb

Valve, Sol, Body ported, 4/5 PORT SOLENOID VALVE, O84, 21.00000 lb

1

P.T. 1 (P) 3 (R) (A) 10.5 30 (L) XT34 With miniature indicator Pneumatic indicator 10 12 17 44 25.4 2 x 4.6 mounting hole 19.5 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply Model L A VM122-M5-00A 32.5 7.5 F.O.F.* 26 N VM132-M5-00A P .T. 1.5 mm VM123-M5-00A 28.5 3.5 O.T. 1.5 mm VM133-M5-00A T.T. 3 mm Roller lever VM123-M5-01A VM133-M5-01A VM123-M5-01SA VM133-M5-01SA 10 Polyacetal or hard steel

Table of Contents

PE port Vacuum release pressure port M5 PD port Ejector unit Non-locking push type Manual override EXH PE PE 109 PD PD PD PD 80.8 81.5 PS PS PV PV 61.5 52 50 13.5 PS PD 42 35.5 33 31.5 28 PV 17 16.5 PV PV Release flow rate adjustment needle Vacuum release pressure port M5 PD port Pilot valve supply pressure port M5 PS port 3 2.5 1 1.5 7.5 7.5 4.5 2-Rc 1/2 EXH port 2-M5 PD port Air supply

5 Port Solenoid Valve Series SY3000/5000/7000/9000

B port size: M5, C4, C6, N3, N7.

5-Port Solenoid Valve

Applicable Fittings: KQ2H, KQ2S Series Series Model Piping port Port size Fittings Applicable tubing O.D. 2 3.2 4 6 8 10 12 SY3l30-ll-M5 4A, 2B M5 KQ2H KQ2S 1P, 5EA, 3EB 1/8 KQ2H KQ2S X, PE M5 KQ2H KQ2S SY3000 SS5Y3-50/51/52 (R) Manifold base 1/8 KQ2H KQ2S 4A, 2B M5 KQ2H KQ2S Series Model Piping port Port size Fittings Applicable tubing O.D. 2 3.2 4 6 8 10 12 SY5l30-ll-01 4A, 2B 1/8 KQ2H

Vacuum Module Series ZX

PS 3(PV PD) PS 1(PV PD) PS 1(PV PD PD PD PD PE PE PE 7.5 6.3 25.5 PS PS PS PV PV ZCUK PV PV Individual air supply port PV Adapter D Individual air supply port PV Adapter D Vacuum port (V) M5 (or M6) 1 4.7 AMJ 20 5 AMV Pitch = 21 22.5 Vacuum port (V) M5 (or M6) AEP HEP Related Equipment + 79 65.1 10.7 8.5 V V V V Pitch = 21 Vacuum Port (V) M5 (or M6) 4.2 22.5 Vacuum Port (V) M5 (or M6) Vacuum

V100

9 : With light/surge voltage suppressor 3(R) 1(P) 3.5 DIN terminal (D, Y) M5 x 0.8 108.5 (PE port) Applicable cable O.D.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

M5 Note 4) (68.4) 57.3 PE Vacuum (V) port (M5) Note 4) 20.3 29.4 P V 9.7 Exhaust part 17.7 22.8 0.8 87.2 Note 1) 10 Circuit diagram 5 6 E F Note 1) The above dimensions are for ZQ1 1U-K2 L-F .

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note 2) ( ): denotes without sub-plate. 60 Base Mounted 10-SY3000/5000/7000/9000 Dimensions: Series 10-SY3000 [ ]: AC 2 position single Grommet (G), (H): 10-SY3140(R)-01 G H (A, B port) 1/8 14.5 13.5 38.1 17 19 17 19 Manual override (For mounting) 2 x 3.2 5 35 3 22 A B + B A X PE P EB EA (External pilot port) M5 x 0.8 M5 x 0.8 2 (Pilot EXH port) 44.7 66.9 [69.1]

Large Size Vacuum Module: Series ZR

) port M5 Ejector unit (600) 80 Release pressure supply (PD) port M5 EXH PE PE PD PD A 81.5 80.8 PD PD PS PS 56.5 PV PV 52 50 PD PS 42 35.5 31.5 33 28 16.5 13.5 17 PV PV PV 12 Common exhaust (EXH) port 1/2 (Rc, NPTF, G) Common release pressure supply (PD) port 2 x M5 Pilot pressure supply (PS) port M5 3 1.5 1 Common pilot supply (PS) port 2 x M5 4.5 2.5 Air pressure supply (PV) port Rc 1/

0.55

Grommet (G) Grommet (G) (H) DC without light/ surge voltage suppressor L2 L1 6.5 (Distance between ports) 28 20.5 (17) 13 72.2 53.2 53.2 50.5 (Distance between ports) PE PE PE PE R P R R R 204.7 202.3 185.7 183.3 55 71 79 P 1.3 27.5 91.7 92.9 (27.3) 3/8 [1(P), 5(R), 3(R) port] M5 x 0.8 4 x 7 (For mounting) 1.2 (PE port) (Pitch) P = 33 74.8 (Lead wire length) 30 G: Approx. 300 H: Approx. 600

Table of Contents

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

Series: JSY1 (1000 Series), Actuation: 2 (2-position, Double), Manifold Type: 20 (Body Ported), Power Saving Circuit: T (w/Power Saving Circuit), Electrical Entry: L (L Plug Connector w/Lead Wire, 300mm), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: M5 (M5 x 0.8), PE Plate: PE

Series: JSY1 (1000 Series), Actuation: 2 (2-position, Double), Manifold Type: 20 (Body Ported), Power Saving Circuit: T (w/Power Saving Circuit), Electrical Entry: M (M Plug Connector w/Lead Wire, 300mm), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: M5 (M5 x 0.8), PE Plate: PE

PE Plate: PE (JSY1: M5, JSY3: Rc1/16, JSY5: Rc1/8)

Piping: M5 x 0.8, Female Thread, Output Specification: PNP Open Collector 2 Outputs+Analog Voltage/Auto-shift Switching, Unit Specification: Unit Switching Function, Initial Value psi; Not Allowed for Use in Japan, Option: Panel Mount Adapter, Calibration Certificate: -, Lead Wire: -

Rated Pressure Range: 0.00 to -14.69 psi, Piping: M5 x 0.8, Female Thread, Output Specification: PNP Open Collector 2 Outputs+Analog Voltage/Auto-shift Switching, Unit Specification: Unit Switching Function, Initial Value psi; Not Allowed for Use in Japan, Option: Panel Mount Adapter, Calibration Certificate: -, Lead Wire: -

Series: 1000 Series, Actuation: 2-position, Double, Manifold Type: Body Ported, Power Saving Circuit: w/Power Saving Circuit, Electrical Entry: L Plug Connector w/Lead Wire, 300mm, Cable Length: None, Light/Surge Voltage Suppressor: with Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size, Thread Piping: M5 x 0.8, PE Plate: JSY1: M5, JSY3: Rc1/16, JSY5: Rc1/8