Table of Contents

16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

A

, 250, 300 50 190 210 140 160 11 12 115 200 M10 63 228 250 158 180 14 12 135 234 M12 80 262 284 178 200 14 16 155 268 M12 100 300 326 200 226 16 16 175 310 M14 D I M E N S I O N S B A S I C T Y P E L O N G S T R O K E Bore size (mm) Stroke range (mm) R Y 20 250 ~ 400 14 88 25 350 ~ 500 14 88 32 350 ~ 600 14 90 40 350 ~ 800 15 101 50 350 ~ 1000 16 116 63 350 ~ 1100 16 119 80 350 ~ 1200 23

AC Servo Motor Driver (Pulse input type/Positioning type ）

16 16.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3120-C6 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5120-01 800 700 600 500 400 300 200 100 0 SY7120-02 800 700 600 500 400 300 200 100 0 SY9120-03 Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load

Made to Order

25 25 228 250 158 180 14 12 135 234 M12 60 228 58.5 19 12.5 15 5 65 117 135 180 66 100 75, 100, 125 150, 200 250, 300 230 25 27 262 284 178 200 14 12 155 268 M12 70 262 68 23 17.5 12 9 75 138 160 214 76 115 280 30 30 300 326 200 226 16 16 175 310 M14 80 304 81 33 22 18 11.5 85 153 190 245 80 125 280 32 30 300 326 200 226 16 16 175 310 M14 80 304 96 37.5 25 20 17 85 153 190 245 80 125 Long

Air Slide Table

Metal stopper with bumper Rubber stopper Shock absorber L1 L1 L1 10 1 48 15 16 20 20 1 58 15 16 20 30 6.5 58 7 9 12 40 6.5 58 6 8 11 50 6.5 58 6 8 11 75 12 58 16 17 21 100 21 88 16 17 21 125 7 88 16 17 21 150 33 88 16 17 21 Stroke K MZ Adjustment range L1 Nut mounting direction of the extension stroke end adjuster Low thrust with high rigidity type MXQB Single side-ported type MXQC Height

24

= 200 mm/s or less (16) L = 100 mm, V = 200 mm/s or less 50 40 50 100 40 100 80 30 30 80 50, 63 50, 63 50, 63 20 20 32, 40 50, 63 32, 40 32, 40 25 32, 40 10 10 25 Load mass m [kg] Load mass m [kg] 20 20 5 5 16 25 20 16 25 20 16 16 1 1 0.5 10 20 25 26 50 100 200 400 0.5 10 20 25 26 50 100 200 400 Stroke [mm] Stroke [mm] (17) L = 50 mm, V = 400 mm/s (18) L = 100 mm, V = 400 mm/s 50 50 40 100

MG

25 10 10 25 CX 20 20 5 5 D16 16 -X 201 1 Data 0.5 10 10 50 100 200 0.5 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) (3) 25 Stroke, V = 400 mm/s (4) Over 25 Stroke, V = 400 mm/s 300 300 100 100 200 200 80 80 100 100 63 63 50 50 50 Load weight m (kg) Load weight m (kg) 50 40 40 32 32 10 10 25 25 5 5 20 20 16 16 1 1 0.5 50 100 200 0.5 50 100 200 10 10 Eccentric distance l(

Battery-less

6: LESYH16 EB Work load [kg] Work load [kg] 10 10 Lead 12: LESYH16 EA 8 8 6 6 Lead 12: LESYH16 EA 4 4 2 2 0 0 0 100 200 300 400 500 0 100 200 300 400 500 Speed [mm/s] Speed [mm/s] LESYH25mE Vertical Horizontal 24 24 Lead 8: LESYH25 EB 20 20 Lead 8: LESYH25 EB 16 16 Work load [kg] Work load [kg] Lead 16: LESYH25 EA 12 12 Lead 16: LESYH25 EA 8 8 4 4 0 0 0 100 200 300 400 500 0 100 200 300

Mechanically Jointed Rodless Cylinder Series MY1

75, 100 125, 150, 175, 200 20, 25, 32 MY1C(W) 100 to 2000 2001 to 5000 (3000 for 16 only, 3000 for MY1CW) 16, 20, 25, 32, 40, 50, 63 CX2 25 to 200 225, 250, 275, 300 15, 25 225, 250, 275, 300 (CXWM16 to 25) 225, 250 (CXWM32) 16, 20, 25, 32 MY1H 50 to 600 601 to 1500 (1000 for 16 to 20 only) 16, 20, 25, 32, 40 CXWM MY2C 100 to 2000 2001 to 5000 (Up to 3000 for 16) 16, 25, 40 25 to 200 CXWL

Electric Actuator

30 to 200 30 to 300 30 to 300 Size 16 25 32 CAT.NAS100-83 Slider Type Step Motor (Servo/24 VDC) Servo Motor (24 VDC) AC Servo Motor (100/200/400 W) Ball Screw Drive Belt Drive Ball Screw Drive Series LEFS Series LEFB Series LEFS Size Stroke Size Stroke Size Stroke 25 32 40 16 25 32 16 25 32 40 100 to 600 100 to 800 200 to 1000 300 to 1000 300 to 2000 300 to 2000 100 to 400 100 to 600 100

MGP

m (kg) 25 16 20 25 16 20 16 16 1 1 0.1 10 20 25 26 50 100 200 0.1 10 20 25 26 50 100 200 Stroke (mm) Stroke (mm) 17 l = 50mm V = 400mm/s 18 l =100mm V = 400mm/s 100 50 50 80 100 50, 63 80 50, 63 50, 63 40 50, 63 40 32 40 32 32, 40 32 10 10 25 25 5 5 Load weight m (kg) 20 20 25 16 20 16 25 20 16 1 1 16 0.1 10 20 25 26 50 100 200 0.1 10 20 25 26 50 100 200 25 Series MGP Compact Guide Cylinder

Electric Actuator/Slider Type

6: LEFS25B 10 10 Lead 12: LEFS25A 5 5 Lead 12: LEFS25A 0 0 0 100 200 300 400 500 600 Speed: V [mm/s] 0 100 200 300 400 500 600 Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 50 50 Lead 8: LEFS32B 40 40 Work load: W [kg] Work load: W [kg] 30 30 Lead 16: LEFS32A Lead 8: LEFS32B 20 20 10 10 Lead 16: LEFS32A 0 0 Speed: V [mm/s] 0 100 200 300 400 500 600 0 100 200 300 400 500 600

V100

Station n L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 4-4-27 28 Series SYJ500

NCQ8

(1.4) 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 012 (1/8"), 025 (1/4"), 037 (3/8") 050 (1/2"), 062 (5/8"), 075 (3/4") 087 (7/8"), 100 (1"), 125 (1-1/4") 150 (1-1/2"), 175 (1-3/4"), 200 (2") 250 (2-1/2"), 300 (3") 350 (3-1/2"), 400 (4") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 8.87 16.4 30.8 65.7 121 201 14.6 27.0 50.8 108 200 330

Electric Actuator

700, 800, 900, 1000 20 5 Servo motor (24 VDC) 16 100, 200, 300, 400 10 3 6 Clean room compatible 25 100, 200, 300, 400, 500, 600 12 6 25 100, 200, 300, 400, 500, 600 12 AC servo motor 8 3 32 100, 200, 300, 400, 500, 600, 700, 800 16 Clean room compatible 10 200, 300, 400, 500, 600, 700, 800, 900, 1000 40 20 1 The size corresponds to the bore of the air cylinder with an equivalent force.

NCQ8

Applicable bore size 056(9/16") 075(3/4") 106(1 1/16") 150(1 1/2") 200(2"), 250(2 1/2") 300(3") 400(4") Applicable bore size Part no.

MY1

PP 12 17 18.5 QQ 16 16 24 VV 16 19 23 TT 14.5 16 20 WW 12.5 16 19.5 UU 15 16 22 XX 28 32 36 SS 6 4 10.5 RR 16 23 27 Model MY1H25G MY1H32G MY1H40G "P" indicates cylinder supply ports.

Air Cylinder Series MB

47 51 58 58 72 72 46 52 65 75 95 114 33.5 38.5 45 50 62 71.5 32.5 38 46.5 56.5 72 89 45 52.5 59 64 76.5 86 12 16 20 20 25 30 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 9 12 13 13 16 16 6 6 7 7 10 10 30 35 40 45 45 55 15 21 21 21 30 30 13 13 14 14 20 20 16 16 16 16 16 16 13 14 15.5 16.5 19 19 4 4 5 5 5 5 21 27 27.5 28.5 37 37 -W Stroke range (mm) Bore size (mm) MO N NB P RF S MM

1

7 7 7 8 8 6 7 8.5 9 11 11 14 16 63 63.5 69.5 76 82 87 106.5 126 16 16 20 20 22 22 28 35 5 5 6 6 6 6 6 9 MGPL, MGPA (Ball bushing bearing) A, E, HT Dimensions A 30 st or less Over 200 st Over 30 st to 100 st E HT Bore size (mm) 20 25 Over 100 st to 200 st 30 st or less Over 200 st Over 30 st to 100 st 10 16 27 32 51 51 69 68.5 80 93 Over 100 st to 200 st 73 79.5 90 95.5 114 114.5 132 132 50