CV/MVGQ

13 63.5 17 32 6 8 19.5 M26 x 1.5 34.5 15 M10 x 1.25 12.2 45 37.5 22 13 68 17 32 6 8 21 M32 x 2 42.5 21.5 M14 x 1.5 14.2 50 46.5 24 16 76 22 41 8 10 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Symbol QY Q Bore (mm) S ZZ S ZZ ZZ S ZZ S ZZ S 20 25 32 40 20 25 32 40 14 19.8 65.3 191 137 166 112 141 87 14 22

CA2

Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.

Air Cylinder Series CA2

Bore size Standard stroke Long stroke (L and F only) CS1 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 Symbol Specifications CS2 -XA Change of rod end shape 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 500, 600 -XB5 Oversized rod 50, 63 1200 Heat resistant (150C) -XB6 -XC3 Special port positions 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400

Magnetically Coupled Rodless Cylinder

Order 50, 100, 150, 200 300 6 50, 100, 150, 200, 250, 300 500 10 Symbol Specifications 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 15 -XB9 -XB13 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Low speed (15 to 50 mm/s) 1000 20 Ultra low speed (7 to 50 mm/s) 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Air-hydro 1500 32 Helical insert thread 100, 150, 200, 250, 300, 350

CL

) CLM2F40SCLM240, #4 (#1+4+#12) CAD 3.1-22 Fine Lock Cylinder/Double Acting Single Rod Series CLM2 Single Clevis (C) CLM2C Bore size Stroke CL MLGC CNA CB CV/MVG (mm) BN 80 90 90 Bore A 18 22 22 24 AL 15.5 19.5 19.5 21 B1 13 17 17 22 BC 38 45 45 52 BP 1/8 1/8 1/8 1/8 BQ BZ 57.5 69 69 76 CD 9 9 9 10 CX 10 10 10 15 D 8 10 12 14 F 13 13 13 16 GA 73.5 83.5 83.5 90.5 GC 8 9 9 8 GD 55 64.5 64.5

AC Servo Motor Driver (Network card type ）

) 0007A120h (50) 2 250 000F4240h (10) 001E8480h (20) ns 1C32h Impossible 3 2 2 4 0025h 0025h (35) 5 250 0003D090h (250) ns 6 222722 0h to Fh 9 0 0h 12 0 0h Note.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

, 300 30, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 7 15 29 7 17 35 10 22 44 Force [N] Note 3) (Set value: 45 to 90%) 65 to 131 127 to 255 242 to 485 79 to 157 154 to 308 294 to 588 98 to 197 192 to 385 368 to 736 Max. speed [mm/s] 900 450 225 1200 600 300 1000 500 250 Pushing speed [mm/s] Note 4) 35 or

0.4

mA Note 2) 15 V 250 100 k Input impedance 0.05% F .S.

Table of Contents

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

MGP

Before tightening the plug, wrap pipe tape around it. 140 214 50 66 116 170 M12 x 1.75 M16 x 2 32 47 18 22 24 30 34 40 46 58 54 62 41 46 54 64 78 86 110 124 156 188 10 12 14 18 22 22 27 27 33 39 8 10 12 15 18 18 22 22 28 33 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 50 80 12 16 20 25 32 40 50 63 80 100 Correct tightening torque Nm 7 to

Air Slide Table

D A [mm] Rubber Stopper A Model A B C D E MXQ6(A) 41.5 27 22 25 20 MXQ8(A, C) MXQ6B 41.5 27 21 25 19 MXQ12(A, C) MXQ8B 46.5 28 21 27 20 MXQ16(A) MXQ12B 51.5 30 21 28 20 MXQ20(A) MXQ16B 58.5 32 22 31 21 MXQ25(A) MXQ20B 65.5 34 22 33 21 Cap bracket RJ-X2300 A cap bracket is mounted to lengthen the A dimension.

Proposals for Energy Saving

(Panel adaptor A + Panel adaptor B + Mounting bracket) ZS-22-D (With 4 pcs. of M3 tapping screws) ZS-22-E Panel adaptor A ZS-22-03 Panel adaptor B ZS-22-02 Mounting bracket ..

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Dimension L Weight (g) 21 360.5 91.2 27 435.5 110.2 20 348 88 22 373 94.4 23 385.5 97.5 24 398 100.7 25 410.5 103.9 26 423 107 28 448 113.3 29 460.5 116.5 No.

5 Port Solenoid Valve

L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

Combination Cylinder

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

Table of Contents

19 41 562 MHKL2-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

AC Servo Motor Driver (Pulse input type/Positioning type ）

MBR, DB, or ALM is assigned to the CN1-22 pin, CN1-23 pin, or CN124 pin. ACD2 (CN1-22) Variable gain selection CDPS CDPS turns on during gain switching. DO1 Absolute position undetermined ABSV ABSV turns on when the absolute position is undetermined. DO1 ABS transmission data bit 0 ABSB0 (CN1-22) This is used to output ABS transmission data bit 0.

Series SV

7 185.5 175 146 23 8 198 187.5 156.5 24 9 198 187.5 167 19 10 210.5 200 177.5 20 11 223 212.5 188 21 12 235.5 225 198.5 22 13 248 237.5 209 23 14 260.5 250 219.5 24 15 260.5 250 230 18.5 16 273 262.5 240.5 19.5 17 285.5 275 251 20.5 18 298 287.5 261.5 21.5 L1 L2 L3 L4 67 Series SV Flat Ribbon Cable Dimensions: Series SV2000 for Flat Ribbon Cable 1in = 25.4mm Cassette base manifold: SS5V2

C95

26 25 30 30 40 Max. 157 Min. 30 275 315 335 375 130 170 170 200 70 90 90 110 70 90 90 110 Max. 26 90 115 135 165 Max. 25 8 9 12 14.5 270 320 345 380 250 300 320 350 90 115 135 165 16 18 22 26 Max. 50 145 170 185 205 199 242 257 289 25 32 32 40 25 32 32 40 160 200 250 320 Max. 160 180 230 270 330 Max. 224 Max. 157 125 160 200 250 Max. 209 Min. 35 Max. 31 Max. 25 Max. 50 Max. 220 Max. 280

Electric Actuator

5 Series LECP6 20 7.5 12 to 500 12 LEFS25 100 to 600 20 15 6 to 250 6 Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (24 VDC) Series LECA6 11 2.5 12 to 500 12 LEFS25A