MGP

x 1.25 M10 x 1.5 M10 x 1.5 16 16 20 20 44 44 60 70 21 22 24 24 48 48 48 52 4 4 5 5 124 124 124 128 4.5 4.5 6 6 200 200 200 200 3 3 4 4 45 46 48 50 6 6 8 8 83 84 86 88 121 122 124 124 32 40 50 63 25, 50, 75, 100, 125, 150, 175, 200 104 118 86 106 72 130 146 110 130 92 130 158 124 142 110 MGPL (ball bushing)/Dimensions A, DB, E MGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A E DB A E

Electric Actuator

Belt Drive/Series LEFB Type 1 Size Equivalent lead (mm) Stroke (mm) 2 300, 500, 600, 700, 800, 900, 1000 48 16 Step motor (Servo/24 VDC) 48 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 25 48 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 32 48 300 ,500 ,600, 700, 800, 900, 1000 16 Servo motor (24 VDC) 48 25 300, 500 ,600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000

NCG/CG1

150 171 175 196 200 221 225 246 48 22 28 59.4 156 180 181 205 206 230 231 255 56 30 30 71.4 175 200 200 228 225 253 250 278 For dimensions of pivot bracket, refer to Best Pneumatics.

Smooth Cylinder/Low Speed Cylinder

Volume GR-L-005 5 g GR-L-010 10 g GR-L-150 150 g 3. Do not wipe off grease from the sliding part of the air cylinder.

AC Servo Motor Driver (Network card type ）

PA14] = 0) 360 = 0 360 = 0 360 = 0 360 = 0 50 50 50 50 330 330 330 330 150 210 150 210 150 210 150 210 Bit 7: 0 Bit 6: 0 Bit 7: 0 Bit 6: 1 Bit 7: 1 Bit 6: 0 Bit 7: 1 Bit 6: 1 The servo motor rotates in a direction specified with a sign of the position data.

Electric Actuator/Slider Type

communication 50 100 150 SSCNET#/H and SSCNET#products are compatible.

IZx-OMT0049

) Note 47) Note 47) OFF ON Built-in sensor (green) SNSR Note 48) Note 48) Note 48) Note 48) OFF ON Key-lock (green) KEY Note 48) Note 48) Note 48) Note 48) Note 48) OFF Generate Ion generating status Note 50) Note 50) Stop Note 36) It takes 3 seconds to operate after the power is on.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For the auto switch mounting position and its mounting height, refer to page 7-6-48.

Table of Contents

) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) ZPR25 ZPR32 64 (56) 67 (54) 64 (56) 67 (54) 65 (57) 68 (55) 64 (56) 67 (54) 66 (58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

MXQ

(mm) MXQ20-40 MXQ20-75 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 MXQ20-30 MXQ20-75 MXQ20-30 0.06 MXQ20-40 MXQ20-40 MXQ20-100 MXQ20-125 MXQ20-150 MXQ20-100 MXQ20-100 MXQ20-125 MXQ20-125 MXQ20-150 MXQ20-150 0.06 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-150 MXQ20-150 MXQ20-150 0.08 MXQ20-30 MXQ20-30 MXQ20

Air Cylinder

(162) 63 13 18 0.032 0.059 98 119.2 71 150 (162) 20 30 18 55 27 15.5 10.5 66 126 (134) 25 30 19 62 32 16.5 10.5 73 133 (141) 32 35 19 62 38 18.5 10.5 73 135 (143) 40 35 19 70 48 21.5 10.5 82 150 (159) 50 40 19 78 59 24 10.5 91 170 (182) 63 40 20 78 72 24 10.5 91 170 (182) 1/4 stroke * Refer to the basic type for the female rod end.

MG

150 st 150 st or less Over 150 st 150 st or less Over 150 st 150 st or less Over 150 st 80 80 80 45.5 40.5 24 38.5 0 146.5 193 30 46.5 25 160 193 13.5 46.5 100 100 100 49 43.5 26.5 41 166 203 36 0 37 30 180 203 14 37 8-19-48 Compact Guide Cylinder Heavy Duty Guide Rod Type Series MGPS 50, 80 How to Order MX MGP 50 50 S Y7BW MTS MY CY Number of auto switches 2 pcs. 1 pc.

CG1

Note) Refer to p.1.7-11 for pivot bracket. 1-7-48

24

124 M14 x 2.0 28 11 MGPM (Slide bearing)/A, DB, E Dimensions MGPL (Ball bushing), MGPA (High precision ball bushing)/A, DB, E Dimensions [mm] [mm] Bore size [mm] A DB E Bore size [mm] A DB E 150 st or less Over 150 st 150 st or less Over 150 st 80 146.5 193 30 0 46.5 100 166 203 36 0 37 150 st or less Over 150 st 150 st or less Over 150 st 80 160 193 25 13.5 46.5 100 180 203 30 14 37 End

5

, 175, 200, 250, 300, 350, 400, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125

Air Slide Table Series MXQ

56 112 118 124 Model F 45 40 48 58 42 55 50 55 62 GA 18 18 18 22 48 73 74 96 118 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 MXQ20L10 MXQ20L20 MXQ20L30 MXQ20L40 MXQ20L50 MXQ20L75 MXQ20L-100 MXQ20L-125 MXQ20L-150 Note) Note) Note) Refer to the bottom view of MXQ20L-50. 116 Air Slide Table Series MXQ With shock absorber (20): MXQ20L-BS/BT/B Stroke Adjustable Range &&$ MXH % $ $ MXU % % *+ ''

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VFN 48 V DC None Z Precautions Plug a connector in or out vertically, never at an angle. How to Calculate the Flow Rate S 6 V For obtaining the flow rate, refer to page 3-1-10.

Electric Slide Tables

Work load m [kg] Work load m [kg] 300 0 50 100 150 200 250 300 350 600 Mey 250 500 Horizontal Vertical 200 400 m L3 [mm] L3 [mm] L3 [mm] 150 300 L3 100 200 50 100 0 0 Yawing Pitching Yawing Rolling 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L4 200 400 L4 [mm] L4 [mm] L4 [mm] 150 300 100

ZP

8 14 40 33 20 52 7 17 150 250 155 40 4 x 14 4 x 9 88 4 x 16 4 x 10 34 Symbol/Type HB: Heavy-duty (Bellows) Heavy-duty Pad 32, 150 Pad diameter For heavy or large work pieces How to Order ZP2 32 HB N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 Symbol Material NBR Silicone rubber FKM CR 32 150 N S F C Note) Silicone rubber is only applicable to the 32 pad.

5-Port Solenoid Valve

The drawing above shows when P, E port entry is D. n: Stations 2 3 4 5 6 7 8 9 10 11 12 L1 71.5 82 92.5 103 113.5 124 134.5 145 155.5 166 176.5 L2 63.5 74 84.5 95 105.5 116 126.5 137 147.5 158 168.5 L3 98 110.5 123 135.5 148 160.5 160.5 173 185.5 198 210.5 L4 87.5 100 112.5 125 137.5 150 150 162.5 175 187.5 200 L5 13.5 14.5 15.5 16.5 17.5 18.5 13 14 15 16 17 263 Plug-in Metal Base SY3000/