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end position. 863 Motorless Type Electric Actuator/Guide Rod Type LEYG Series Model Selection LEYG SeriessPage 868 Moment Load Graph Selection Conditions Vertical Horizontal L L L m m L Mounting orientation m m Max. speed [mm/s] SpeedVertical Work Load Graph 200 or less Over 200 Graph (Sliding bearing type) q, w t, y u, i Graph (Ball bushing bearing type) e, r o, !

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S TA N D A R D T Y P E F O R E X T E R N A L P I L O T T Y P E A S S TA N D A R D S P O O L 0 Metal 1 Rubber Courtesy of Steven Engineering, Inc. !

MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

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Branch Y: KQ2U Model H (Width across flats) D M L A Weight (g) Applicable tubing O.D.

CRB2/CRBU2/CRB1

ti g ot 9 a t 0 e o Key t 0 0 o r 2 r r 8 y +4 0 y +4 0 0 e y e e K +4 0 K K +4 0 Key Key 0 0 (40) 1 Key e g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Screw Model CRB1BW 50 CRB1BW 63 CRB1BW 80 CRB1BW100 L M6 48 M8 52 M8 60 M10 80 68 Rotary Actuator Vane Type Series CRB1 Rotary Actuator with Built-in

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ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 1 Key e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Model CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 L Screw M6 48 M8 52 M8 60 M10 80 11-4-4 70 Series CRB1 Rotary

Battery-less

A + Stroke CL + Stroke 72 Battery-less Absolute (Step Motor 24 VDC) Guide Rod Type LEYG Series Model Selection Moment Load Graph Selection conditions Vertical Horizontal L L L m m L Mounting position m m Max. speed [mm/s] SpeedWork Load Graph 200 or less Over 200 Bearing Sliding bearing Graphs q, w Graphs t, y*1 Ball bushing bearing Graphs e, r Graphs u, i Graphs o, !

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(mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 1 Key e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Model CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 L Screw M6 48 M8 52 M8 60 M10 80 11-4-4 70 Series CRB1 Rotary

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 1 Key e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Model CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 L Screw M6 48 M8 52 M8 60 M10 80 11-4-4 With One-touch Fittings

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

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Flat washer: Polished round MM Y-04D 40 22 24 10 55 M14 x 1.5 13 25 12 16 +0.3 +0.1 38 55.5 3 x 18 l Polished round 12 E1 NX NZ L Y-05D 50, 63 27 28 14 60 M18 x 1.5 15 27 12 16 +0.3 +0.1 38 55.5 3 x 18 l Polished round 12 D1 Y-08D 80 37 36 18 71 M22 x 1.5 19 28 18 28 +0.3 +0.1 55 76.5 4 x 25 l Polished round 18 A1 L1 U1 Y-10D 100 37 40 21 83 M26 x 1.5 21 38 20 30 +0.3 +0.1 61 83 4 x 30 l

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L Y 0 __D . .

High Vacuum Angle Valve

How to Order [Option] XLGV M9N 16 A 1 G L Flange size 16, 25, 40 1 q e u r t XLGV M9N 50 A 1 G L Flange size 50, 63, 80 i w y o !0 !

Made to Order

Double clevis CT 2 x N D E M Y CD hole H10, Axis d9 RR CW CU CX +0.4 +0 T L CZ 0.1 0.3 [mm] Part no.

smcmaintenancepartslist

For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

plug connector M plug connector Electrical Entry DC/ 24 V, 6 V, 12 V 48 V, 100 V 110 V ( Option) Grommet (G) Grommet terminal (E) Conduit terminal (T) DIN terminal (D), (Y) L plug connector (L) M plug connector (M) Note) Note) Light Surge voltage suppressor Note) VF1000/VF3000 only.

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y Return spring Stainless steel CAC406 u Body Dimensions: Bracket A J 4-G C 1.5 B D E L 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Valve model Bracket part no.

ZP

w r q ZPR 10 D N J 10 04 A10 y Connection thread (Male thread) R Width across flats G Buffer specification e H (Buffer body) A10 M10 x 1 A14 M14 x 1 J Rotating K Non-rotating Width across flats K J L L t Vacuum inlet (One-touch fitting) 04 4 06 6 08 8 Width across flats M Model A B C D E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.

4-channel Flow Monitor ( compatible)

U8 0x02 (2) 3: 1Sor (OUT1 turns red at ON) 4: 2SoG (OUT2 turns green at ON) 5: 2Sor (OUT2 turns red at ON) Set the connection range of PF2A5. 0: 10 L 1: 50 L 2: 100 L 3: 200 L 4: 500 L rAnG (PF2A5, Selection of connection range) Y U8 0x00 1 R/W (0) Set the connection range of PF2W5. 0: 4 L 1: 16 L 2: 40 L 3: 100 L 4: 250 L rAnG (PF2W5, Selection of connection range) Y U8 0x00 2 R/W (0) Set