HRX-OM-M005

Connect the communication cables with P1, P2 and P3 as appropriate.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

F.S. p3%F.S.

1

e q w e SY No.

Adsorption Plate

A B ZCUK AMJ Rc 1/8 Rc 1/8 AFJ AMV P1 P1 ZH -X185 P1 P2 P3 Base part no. Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

Booster Regulator Series VBA1110 to 4200 1

Tank capacity (l) Tc [s] = L W Obtain the tank capacity V. Select tank from table below.

ZSM1-115/121

In the case of a switch with 2 outputs, the Output 2 is using calibration points P3 and P4. Reversal Mode reverses above operation. Window Comparator Mode can be applied in situations where the supply pressure has to be within a certain range.

Digital Pressure Switch

failure predictive pressure (P3).

SI Unit for Vacuum Manifold

(5) The release confirmation bit is set to 1 until the release pressure reaches P3 and then drops to P3-H3. -22No.EX-OMY0014-A 5. Process data 5.1. Process data on Vacuum / Release module The Vacuum / Release module occupies 2(4) bytes of input data and 2(4) bytes of output data. The number of occupied bytes differ by the selected head module.

Table of Contents

W.

Base Mounted Metal Seal/Rubber Seal Series VQ

to 6 t t Pilot valve assembly Double/3 position Pilot valve assembly Double/3 position Note) (H): 1.5 W, (Y): 0.5 W Note) (H): 1.5 W, (Y): 0.5 W 2-4-223 Series VQ Construction: VQ0/Plug Lead Unit Metal seal Rubber seal type Component Parts Component Parts Note q w e Note q w e Material Material No.

0.4

5 Port Solenoid Valve Metal Seal / Rubber Seal [Option] RoHS compliant Power saving Power saving Standard: 0.4 W Standard: 0.4 W (Reduced by 60% compared to existing model) compared to existing model) (Reduced by 60% compared to existing model) High-pressure (1 MPa, Metal seal): 0.95 W High-pressure (1 MPa, Metal seal): 0.95 W CAT.ES11-100A Series VQ1000/2000 5 Port Solenoid Valve Series

0.4

5 Port Solenoid Valve VQ1000/2000 Series Metal Seal Rubber Seal SV [Option] Power saving Power saving SYJ Standard: 0.4 W Standard: 0.4 W SZ (Reduced by 60% compared to current model) (Reduced by 60% compared to current model) VF VP4 High-pressure (1 MPa, Metal seal): 0.95 W High-pressure (1 MPa, Metal seal): 0.95 W VQ 1/2 VQ 1/2 VQ 4/5 VQC 1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 365 5 Port Solenoid

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Title not found

P3, L10 X3 S/S . P3, L10 X4 S/S . P3, L10 RX3-2-3-2 S/S. P4, L12 RX3-1-1-1 S/S. P4, L12 M8-6x6-8 S/S . P20, L78 Y8 S/S . P4, L14 3/8BK-6 S/S . P18, L69 C1 S/S. P1, L1 C2 S/S. P1, L1 C3 S/S. P1, L1 C4 S/S. P1, L1 C6 S/S. P1, L1 RC3-1 S/S . P1, L2 T1 S/S . P1, L4 T2 S/S . P1, L4 T3 S/S . P1, L4 T4 S/S . P1, L4 T6 S/S . P1, L4 RT3-1-1 S/S . P2, L5 RT3-3-1 S/S . P2, L5 RT3-1-3 S/S .

CE2

Cylinder speed < Counting speed of the counter (Cylinder speed 500 mm/sec = Counting speed of the counter 5 kcps) RS Q G RS H A RZQ MI W S Example of Recommended Pneumatic CEP1 Horizontal mounting Vertical flat mounting Vertical overhead mounting CE1 W W CE2 ML2B C J G5-S CV MVGQ Note) In the case of light load, regulate head side supply pressure.

CE2

Cylinder speed < Counting speed of the counter (Cylinder speed 500 mm/sec = Counting speed of the counter 5 kcps) RS Q G RS H A RZQ MI W S Example of Recommended Pneumatic CEP1 Horizontal mounting Vertical flat mounting Vertical overhead mounting CE1 W W CE2 ML2B C J G5-S CV MVGQ Note) In the case of light load, regulate head side supply pressure.

Model: 41 (AC/Dual AC for IZTB40 and 42 Bars, and IZT43 Nozzles), Input, Output Specification: None (or NPN, IZTC41), Power Supply Cable Length: N (None), Power Supply Cable Length (IO-Link): None, Communication Cable Entry Direction/Length: None, DIN Rail Mounting Bracket: W (DIN Rail Mounting Bracket Included)

Model: 40 (Standard, for IZTB40 Bar), Input, Output Specification: None (or NPN, IZTC41), Power Supply Cable Length: 3 (3m), Power Supply Cable Length (IO-Link): None, Communication Cable Entry Direction/Length: None, DIN Rail Mounting Bracket: W (DIN Rail Mounting Bracket Included)

PSE530/200

Information that can be copied includes the following: q Pressure set values, w Range settings, e Display Units, r Output modes, t Response times. 5% R.D. Displayed pressure value When CH1 is copied to CH2, CH3, and CH4, information of OUT1 in CH1 will be copied. When CH2, CH3, or CH4 is copied to CH1, information of OUT1 in CH2, CH3, or CH4 will be copied only to OUT1 in CH1.