1

V V V V V V V V V V Standard CM2 V V V V V V V V V V V D CG1 v CJ2l-lA MB V v v v Note 8) 10-, 11CA2 CQ2 CQS v v v v v v v v v v v 25ALuberetainer 20JA v v v v v v v v v XB6 MXH v v v v v v v v XB7 MXQ v XB9 MGP XB13 CY CX v v v v XC3 CK1 C(L)K v v v v v v v XC8 C(L)KU v v v Note 9) XC9 CKQ v v v v v v v v v XC10 CKZ2N v v v Note 9) XC11 WRF v v v v v v v v

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A96V A96 5 V Grommet Yes 12 V A93 A93V 24 V 100 V Relay, PLC 2-wire 3-wire (NPN) M9N M9NV IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) M9B M9BV 2-wire 12 V F9NW F9NWV Relay, PLC 3-wire (NPN) Diagnostic indication IC circuit 5 V, 12 V 24 V Grommet Yes 3-wire (PNP) F9PW F9PWV (2-color display) F9BW F9BWV Improved water resistance (2-color display) 2-wire 12 V F9BA Though it is possible

Rotary Table/

, D-A93(V), D-A96(V) Auto Switch Specifications Grommet Electrical entry: In-line D-A90, D-A90V (without indicator light) Auto switch part no.

Magnetically Coupled Rodless Cylinder

, PLC 2-wire IC circuit 5 V, 12 V 12 V 100 V or less 24 V Connector IC circuit 5 V, 12 V Solid state auto switches marked with are produced upon receipt of order.

Table of Contents

D-M9N(V)/D-M9P(V)/D-M9B(V) Direct Mounting Style . D-Y59A, B /D-Y69A, B /D-Y7P(V) Direct Mounting Style . 2-color Indication Type . D-F79W/D-F7PW/D-J79W Rail Mounting Style. D-Y7NW(V)/D-Y7PW(V)/D-Y7BW(V) Direct Mounting Style ... D-F9NW(V)/D-F9PW(V)/D-F9BW(V) Direct Mounting Style . 2-color Indication Type with Diagnostic Output. D-F79F Rail Mounting Style.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

) 12 V 5 V, 12 V IC circuit Diagnosis (2-color indication) Grommet Yes Relay, PLC 3-wire (PNP) 24 V 2-wire 12 V 3-wire (NPN) 5 V, 12 V IC circuit Water resistant (2-color indication) 3-wire (PNP) 2-wire 12 V Auto switches marked with a symbol are produced upon receipt of order.

Made to Order

state auto switch Reed auto switch Terminal conduit 24 V Relay, PLC IC circuit Yes 5 V, 12 V Diagnostic indication (2-color) 12 V Grommet Water resistant (2-color indicator) 5 V, 12 V 12 V 3-wire (NPN equivalent) IC circuit A96 5 V Yes Grommet A93 A90 A33 A34 A44 100 V 100 V or less Relay, PLC No 2-wire IC circuit PLC 12 V 24 V Terminal conduit Yes Relay, PLC 100 V, 200 V Din terminal

15

12 V IC circuit 12 V 5 V, 12 V IC circuit Relay, PLC Diagnostic indication (2-color indicator) 24 V Yes Grommet 12 V 5 V,12 V 12 V IC circuit Water resistant (2-color indicator) 3-wire (NPN equivalent) Grommet 24 V Reed auto switch A96V A96 IC circuit 5 V Yes A93V2 A90V A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V No 100 V or less 1 Water resistant type auto switches can be mounted

1

U RA XC XL VA VB XB 12 16 20 25 18 19 25 28.5 34 38 47 55 13 15 12.5 12.5 7 13 9 14 14 16 18 48 54 70 33 33 37 RB0806 RB0806 M4 x 0.7 3 3 10 10 50 56 3 3 6 6 6 6 5 5 37 38 3.5 M5 x 0.8 M12 x 1.5 41 46 54 56 62 81 8 10 10.5 13.5 15 18 21.5 28 4.5 4.5 5.5 5.5 7.5 7.5 9 9 22 25 30 23 24 4.3 4.3 5.6 5.6 6.6 6.6 8.6 8.6 10 12 13 15 20 20 22 22 8 8 9.5 9.5 11 11 14 14 M5 x 0.8 M5 x 0.8 Rc 1/8

ZISE20B-L.eng

Units specification Pressure range Default setting ISE20B: 0.050 MPa/ZSE20B: 5.0 kPa/ ZSE20BF: 5.0 kPa Hysteresis ISE20B MPa "Nil" or M ZSE20B(F) kPa Delay time 0.00 sec.

ISE20B-L-S is a digital pressure sensor with all the standard features of the ISE20B, while integrating an M12 connection and supporting the IO-Link communication protocol. When paired with an IO-Link master, measured values and settings can be accessed from the HMI screen of a PLC.

ISE20B-L-S is a digital pressure sensor with all the standard features of the ISE20B, while integrating an M12 connection and supporting the IO-Link communication protocol. When paired with an IO-Link master, measured values and settings can be accessed from the HMI screen of a PLC.

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel Mount Adapter + Front Protection Cover)

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter + Front Protection Cover, Operation Manual: -

Table of Contents

Pitch = 21 Individual vacuum supply port Individual vacuum supply port PV Adapter D Adapter D M5 x 0.8 (or M6) Vacuum pad connection port (V port) M5 x 0.8 (or M6) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) Adsorption nozzle piping port 13-2-57 57 Series ZX Vacuum pad connection V port Vacuum pad connection V port Vacuum Pump System Manifold: Type K1 Common EXH Common

Air Cylinder

) Note 13) v v v v v XC9 Note 15) Note 14) Note 14) v v v v v v v XC10 v v v v v v v XC11 v v v v v XC12 v v v v XC13 v v v v XC20 Note 15) v v v XC22 Note 2) v v v v v v XC27 v v v v v v v XC29 v v v v XC35 v v v v v v v XC37 v v v v v XC42 v v v XC85 X446 Note 8) Copper-free for the externally exposed part.

CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

Compact Rotary Actuator Series CRQ2

12 V Reed switch Solid state switch 12 V IC circuit Diagnostic indication (2-color display) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9BAV 12 V 3-wire (NPN equiv.)

Possible to transfer a workpiece at low-speed.

12 V Reed auto switch Solid state auto switch 12 V IC circuit Diagnostic indication (2-color indicator) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equiv.)