Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel Mount Adapter)

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Connector Type: S (M12 connector type)

Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter, Operation Manual: -

1

T.T. 12 10 1 (P) 10.5 (37.1) (47.6) (A) 2 3 port 30 12 10 1 (P) 3 (R) 17 44 2 x 4.6 mounting hole 25.4 2 x M5 x 0.8 depth 4 14 8.5 * 0.5 MPa supply F.O.F.* 13 N P .T. 3.2 mm O.T. 2.3 mm T.T. 5.5 mm One way roller lever VM123-M5-02A VM133-M5-02A VM123-M5-02SA VM133-M5-02SA 10 Polyacetal or hard steel roller 46.5 29.2 (A) 2 Symbol 2 port 8 P.T. O.T. T.T.

CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

2

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 2 S G 1F M5 1 0 06 AS Body size 1 S Body size 2/3/4 2 2 0 S G 01 06 AS 1F With indicator Body size 2 1/8, 1/4 3 3/8 4 1/2 Made to Order Refer to page 512 for details. Type Seal method 2 Elbow Nil Without sealant S With sealant Control type Note) Note) Face seal type is used for the G thread type.

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-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25

5 Port Solenoid Valve Series SY3000/5000/7000/9000

20.5 P=20.5 19.5 (A, B port) 1/4 7 7 Applicable tubing O.D.: 10, 3/8" 9.4 9.4 B B B B 28.9 28.9 A A A A + + + L1 Manual override L2 6 37 (External pilot port) M5 x 0.8 (Pitch) 19.1 P=20.5 23.5 + + 42 (For mounting) 4 x 4.5 (5.5) 72.9 9.9 29 3.1 21 31.4 41.9 B B B B EB P EA X 26 26.6 21 21 80.1 110.2 112.2 PE A A A A (P , EA, EB port) 1/4 + + + + M5 x 0.8 Output no.

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(Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C

ZP

D 02 1.2 M4 x 0.7 4 04 1.6 06 08 2.5 28.4 N S U F GN GS B4 M5 x 0.8 19.5 04 06 ZP R U 02 1.2 M5 x 0.8 5 04 1.6 06 08 2.5 B5 A2 Dimensions Per Vacuum Inlet Construction p. 115 Model Adapter Assembly p. 122 D E F Fitting part min. hole size Vacuum inlet direction q Pad dia.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

5-Port Solenoid Valve

D-sub connector : p. 46 D-sub connector : p. 49 Flat ribbon cable : p. 52 Terminal block box (Spring type) : p. 63 Terminal block box : p. 72 Lead wire : p. 82 Circular connector : p. 92 EX500 (128 points) : p. 102 EX500 (64 points) : p. 108 EX600 : pp. 120, 121 EX250 : p. 130 EX260 : p. 138 EX126 : p. 146 EX120 : p. 154 Panel fitting dimensions 60 16 115 4 x M5 Mounting hole

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

4/5 Port Solenoid Valve

+ + + + + + + 20 20 stations S P P A, B port size P Nil Rc A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A B B B A, B port M5 x 0.8, C4 A M5 M5 x 0.8 F G C4 One-touch fitting for 4 N NPT N3 One-touch fitting for 5/32" T NPTF 13 Series SYJ3000 Flat Ribbon Cable Manifold Common SUP/Common EXH Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both

Metal Seal/Rubber Seal Series VQ Body Ported

F kit (D-sub connector) T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial) kit U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P F 25P T2 T1 Type Note) Note) Note) Max. points 14 8 8 16 16 16 16 16 14 Note) Due to the limitation of internal wiring.

Table of Contents

(Rc, NPT, G) GA 2-P PB (Rc, NPT, G) J K PA + Stroke GB Q (Plug) FA FB C + Stroke G S B + Stroke A + Stroke E For bore sizes 12 and 16, M5 x 0.8 is only available.

Compact Cylinder

P P Rc1/8 P P P P Rc1/8 P P Rc1/4 P P Rc1/4 P P Rc3/8 P P Rc3/8 P P P P Through-hole (Standard) Built-in magnet Pneumatic Air-hydro M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Piping Pipe thread NPT1/8 G1/8 P P P P NPT1/8 G1/8 P P P P NPT1/4 G1/4 P P P P NPT1/4 G1/4 P P P P NPT3/8 G3/8 P P P P NPT3/8 G3/8 P P P P 2.

Base Mounted Metal Seal/Rubber Seal Series VQ

T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial transmission) Kit F kit (D-sub connector) F 25P U S P 26P U S F A 15P U S P C 20P U S P 16P U S B P A 10P U S S Type T1 T2 Max. points Note) 16 Note) 16 16 16 Note) 16 14 14 8 8 Note) Due to the limitation of internal wiring.

V

I O N S 02 2 Stations 20 20 Stations H O W T O O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B O D Y P O R T E D P L U G L E A D T Y P E V A L V E 2 VQZ P O R T S I Z E 2(A) P O R T S E R I E S C3 One Touch Fitting for 3.2 (VQZ100) C4 One Touch Fitting for 4 (VQZ100/200) C6 One Touch Fitting for 6 (VQZ100/200/300) C10 One Touch Fitting for 10 (VQZ300) M5 M5 Thread (VQZ100/200) 02 Rc

0.4

[Fieldbus system]) EX600 P. 17 VQC1000/2000 S kit (Serial transmission) EX250 P. 21 VQC1000/2000 S kit (Serial transmission) EX126 P. 23 VQC1000/2000 F kit (D-sub connector) P. 25 VQC1000/2000 P kit (Flat ribbon cable) P. 27 VQC1000/2000 T kit (Terminal block box) P. 29 VQC1000/2000 L kit (Lead wire) P. 31 VQC1000/2000 M kit (Circular connector) P. 33 VQC1000/2000 Construction VQC1000/2000