VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

PSxx-OMM0006CN

D ZS-24-D X X X ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A

AS

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 8.4 12.7 22.1 12.3 17.3 KE 5/32" 9.3 7 9.6 28.8 25.1 30.1 8 33.8 10-32 UNF 16.5 26.1 21.3 11.4 3/16" 11.7 13.5 23.1 18.3 12 1/4" TMH 16 1/8" 27.5 20.4 9.3 12.7 5/32

44

Swivel Elbow KFG2V Metric Inch P. 324 P. 329 Metric Inch P. 325 P. 331 KDM KB KR KA KQG2 Straight Union KFG2H Female Connector KFG2F KG Metric Inch P. 324 P. 330 Metric Inch P. 326 P. 331 KFG2 KFG2 MS KKA KP LQ Union Tee KFG2T Union Nut KFG2N MQR Metric Inch P. 324 P. 330 Metric Inch P. 326 P. 331 T IDK 321 Stainless Steel 316 Insert Fittings Applicable Tubing: Metric Size, Connection Thread

Digital Pressure Switch

-I With bracket Bracket A 01/N01 type W1/WF1 type -66No.PS-OMM0007-I Bracket B W1/WF1 type -67No.PS-OMM0007-I Bracket D 01/N01 type W1/WF1 type -68No.PS-OMM0007-I Panel mount adapter 01/N01 type W1/WF1/M5/C4/C6 type -69No.PS-OMM0007-I Panel mount adapter + Front protective cover 01/N01 type W1/WF1/M5/C4/C6 type -70No.PS-OMM0007-I Panel cut-out dimensions -71No.PS-OMM0007-I 01/N01 type (products

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Adsorption Verification High Vacuum Set value correction by auto-shift function Adsorption Work 1 Work 2 Work n Supply pressure normal Supply pressure drop Supply pressure increase Max. A Rectified value Rectified value P-1 P-1 (Differential) Pressure (P-3) H-1 H-1 (H-2) P-2 Min.

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

2-Color Display High Precision

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A P-1 H-1 n-1 Formula for Obtaining the Set-Value Min.

2-Color Display Digital Flow Switch Series PFM

Piping Specifications / Mass P . 921 Analog Output P . 921 Internal Circuits and Wiring Examples P . 921 Dimensions P . 922 Series PFM7 , PFM5 Common Specifications Pressure Loss / Flow Characteristics P . 930 Parts Description P . 931 Construction P . 931 PFM Detection Principle P . 931 PFMV Component Parts P . 932 PF2A Series PFM3 Flow Sensor Monitor PF2W How to Order P . 933 Specifications

Booster Regulator/Air Tank

P Nil GLS P P P P P P P P P P P P -Z P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P Nil F N T Nil F N T Nil F N T 10A 11A VBA22A-03 20A 22A 40A 42A 43A VBA40A-04 Air Tank Compatibility Chart Booster regulator Air tank VBA2lA VBA1lA VBA4lA VBAT05A VBAT05S VBAT10A VBAT10S VBAT20A VBAT20S VBAT38A VBAT38S P P P P P VBA42A-04 VBA43A-04 P P 1 Booster Regulator Series

Micro Mechanical Valve Series VM1000

12 14 VMG 3 (EB) 1 (P) 5 (EA) VR 0.5 MPa supply VR51 3.5 mm T.T. 2.0 mm O.T. 1.5 mm P.T. 20 N F.O.F.

Table of Contents

Note 6) When N is specified in the end of part number of auto-drain, applicable tubing O.D should be 3/8". 14-2-22 23 F.R.L. Unit Series AC20D to 40D Dimensions AC20D A F N E P K C G G IN OUT Q F.R.L.

Mist Separator Regulator

AW-OMZ0061 PRODUCT NAME Mist Separator Regulator MODEL / Series / Product Number AWM20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWM30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWM40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3. Standard Specifications 9 4.

Ｍ icro Mist Separator Regulator

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 NAN110-N01 NAN110-N01 NAN200-N02 NAN200-N02 NAN110-N01 24 Q Q Q Technical Reference 35 19.4 Q Q Series VQZ100200300 Q 5 5

Series AS-FM/AS-M/ASD-FM

Max. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 12.7 9.6 22.1 12.3 17.3 8 7 30.1 25.1 28.8 33.8 10-32UNF 16.5 13.5 26.1

Compact and Lightweight

-N01-N01 12.7 12.7 12.7 67 42.5 27 26 NPT1/8 NPT1/8 NPT1/8 ZH07DA-N01-N01-N01 70.2 ZH10DA-N01-N01-N01 76.4 ZH13DA-N01-N02-N02 17.46 17.46 90.8 51 29.5 36.3 NPT1/4 NPT1/4 ZH15DA-N02-N03-N03 17.46 22.23 22.23 108.2 63.3 34.3 37.1 NPT1/4 NPT3/8 NPT3/8 ZH18DA-N03-N03-N03 22.23 131 73.6 41.1 39 NPT3/8 ZH20DA-N03-N04-N04 23.81 23.81 142.6 74.9 44.1 NPT1/2 NPT1/2 Inch Dimensions when the standard

9.8

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A P-1 H-1 n-1 Formula for Obtaining the Set-Value Min.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) Stroke (mm) Vacuum entry direction Vertical Male thread M18 x 1.5 M18 x 1.5 M22 x 1.5 (Rc, NPT, NPTF) 100, 125 25, 50, 75, 100 40 to 80 25, 50, 75 Mounting Connection ZX 40, 50 63, 80 100, 125 0 stroke 6.9 N 11.8 N Full stroke 0 stroke 10 N 15 N Full stroke Thread dia.