Series IDG

Standard dew point temperature Standard dew point C 15 Symbol H Port size Symbol Bore Size Thread type 5 10 20 30 3 50 60 75 100 Nil N F Rc NPT G 01 1/8 02 1/4 04 1/2 03 3/8 Standard Specifications/Single Style (Standard Dew Point 15C [5F]) IDG3H IDG10H Standard dew point 15C (5F) Model IDG3H IDG5H IDG10H IDG20H IDG30H IDG50H IDG60H IDG75H IDG100H Compressed air Fluid Range of operating

IDG

Standard dew point temperature Symbol H Standard dew point (C) 15 Port size Symbol Bore Size Thread type 3 5 10 20 30 50 60 75 100 Rc NPT G Nil N F 01 1/8 02 1/4 04 1/2 03 3/8 Standard Specifications/Single Unit Type (Standard dew point: 15C) IDG3H Standard dew point 15C IDG10H Model IDG3H IDG5H IDG10H IDG20H IDG30H IDG50H IDG60H IDG75H IDG100H Compressed air Fluid Inlet air pressure

ZX

R1 1 ZX1 06 R ZZX1 Supply port location 01 1 Stations Arrangement (First station from the right end of the valve side is station 1.)

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) 01 1 station Note 2) The number of max. stations differs from kit to kit. (Refer to the table below.)

Vacuum Module Series ZX

If an adsorption confirmation switch is replaced for a vacuum switch on ZX100-K15LZ-PBC, indicate as ZSE2-0X-15C-D. In this case, mounting screws P3270148-39 (2 pcs.) are required. If the unit is used on its own, not combined with others, D is not required. Ex.)

HRX-OM-K003

Alarm Code.01 to 08, 10 to 19, 22, 24, 29, 30: Eliminate the error cause. Press the [RESET] key on the operation display panel or power cycle the main breaker to enable error recovery to take effect. Alarm Code.09: Eliminate the error cause.

Base Mounted Metal Seal/Rubber Seal Series VQ

Note 1) 1 station 01 16 stations Note) Number of terminals 16 Note 2) Refer to page 2-4216 for details.

ZSE1/ISE1

ZSE1-01-15CN1 pc.

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

ZSE1-01-15CN1 pc. ZS-20-5A-501 pc.

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

TABLE OF CONTENTS

SERIES 15 FLOW CHARTS 400 400 1/32 1/32 3/64 3/64 1/16 1/16 3/32 3/32 1/8 1/8 ORIFICE-INCH ORIFICE-INCH 100 100 50 50 PRESSURE PRESSURE DROP ROP PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 50 FLOW CHARTS COAST PNEUMATICS 8055 E.

CATALOG VC10

PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 58 FLOW CHARTS 97 SOLENOID VALVES . . .

Water-cooledThermo-chiller

Temperature range which can be set with the Thermo-chiller 10C to 35C Example) Facility water temperature of customers machine: 15C Temperature difference between the circulating fluid and facility water is: 50 15 = 95F (35C). 4.What is the kW for the required cooling capacity?

CATALOG

G33-4-01 G33-10-01 G43-2-01 G43-4-01 G43-10-01 G43-10-01 G43-4-01 G43-10-01 Accuracy + 3% (full span) Courtesy of Steven Engineering, Inc. !

V

) NVR1220-N02 (1/4 NPT) VR1210-01 (1/8 PT) VR1220-02 (1/4 PT) (N)VR1210 (N)VR1220 Courtesy of Steven Engineering, Inc. !

Thermo-chiller/Rack Mount Type

2 [ ] lamp Lights up when AL.01 Low level in tank abnormal or AL.02 Low level in tank alarm is generated !3 Digital display (11-segment, 1 digit) X is displayed when maintenance notification is generated. !4 [RMT] lamp Lights up during remote operation by communication function !5 [KEYLOCK] lamp Lights up when key lock setting is active !

LEC-OM02704CN

C 1. ##0064 ## 00 01 1 02 2 03 3 62 62 63 63 64 64 2. $$$0255 3. ** 4.

Table of Contents

Note 1) 01 1 station Note 2) The number of max. stations differs from kit to kit. (Refer to the table below.)

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

For details about applicable models, please contact SMC. 01 1 station Note 2) Note 3) The number of max. stations differs from kit to kit. (Refer to the table below.)

Digital Flow Switches

How to Order Integrated Display Type PF2A7 10 01 27 Flow rate range Thread type Unit specification 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51 Nil M Wiring specification With unit switching function Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow