CG5-S

R V Integral clevis type (E)/CG5ENS ZZ + Stroke CD hole H10 Shaft d9 L M GA GB RR U CX LL 2P H1 Width across flats B1 LY CI D I MM AL A K LH LE KA 4-J LT C 0.1 NA LF LP LG S + Stroke Z + Stroke LZ + Stroke LV LX H 4-LD (mm) Stroke range A Bore size (mm) AL B1 C CD (hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U +0.058 0 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 0 0.3 0 0.3 20 8 16 to 200

CG5-S

Applicable bore size (mm) Dd9 t l d L m CD (snap ring) CX LD LE LF LG LH LL LP LT LV LX LY 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.065 0.117 8 8 20, 25 IY-G02SUS 20 CG-E020SUS 7.6 21 16.2 1.5 0.9 16 7 9 2 14 30 27.6 21 3 56.5 42 30 C type 8 for shaft 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 10 10 32, 40 IY-G03SUS 25, 32 CG-E032SUS 9.6 25.6 20.2 1.55 1.15 24 7

CJ5-S

RS H A R V Integral clevis style (E): CG5ENS RZQ ZZ + Stroke CD hole H10 Shaft d9 M GA GB L RR U CX LL 2-RcP H1 Width across flats B1 MI W S LY CEP1 CI D CE1 I MM LH AL A K LE KA 4-J CE2 LT C0.1 NA ML2B LF LP LG LV LX S + Stroke Z + Stroke LZ + Stroke H 4-LD C J G5-S Stroke range A Bore size (mm) CV AL B1 C CD(Hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U + 0.058 0 0 0.2 0 0.2 0 0.2

CJ5-S

RS H A R V Integral clevis style (E): CG5ENS RZQ ZZ + Stroke CD hole H10 Shaft d9 M GA GB L RR U CX LL 2-RcP H1 Width across flats B1 MI W S LY CEP1 CI D CE1 I MM LH AL A K LE KA 4-J CE2 LT C0.1 NA ML2B LP LG LF LV LX S + Stroke Z + Stroke LZ + Stroke H 4-LD C J G5-S Stroke range A Bore size (mm) CV AL B1 C CD(Hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U + 0.058 0 0 0.2 0 0.2 0 0.2

Table of Contents

RS H A R V Integral clevis style (E): CG5ENS RZQ ZZ + Stroke CD hole H10 Shaft d9 M GA GB L RR U CX LL 2-RcP H1 Width across flats B1 MI W S LY CEP1 CI D CE1 I MM LH AL A K LE KA 4-J CE2 LT C0.1 NA ML2B LP LG LF LV LX S + Stroke Z + Stroke LZ + Stroke H 4-LD C J G5-S Stroke range A Bore size (mm) CV AL B1 C CD(Hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U + 0.058 0 0 0.2 0 0.2 0 0.2

Thread: N (NPT)

Thread: NPT, Seal: -, Options: -

Series AP500

The high pressure (inlet) port is labeled with an HP mark and the low pressure (outlet) port is labeled with an LP mark. In the case of two stage regulator, the monitor port of first stage outlet pressure is labeled with MP mark. Make sure to connect the port labeled with HP mark, to the high pressure.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

ML1C

LP-01 ML1C LC-01 25 32 40 Series Mounting position A B ML1C 177.5 128.5 152.5 123.5 147.5 172.5 D-M5 D-M5W D-M5T Lead wire cap Lead wire clamp Auto switch 14 11 Lead Wire Clamp/Lead Wire Cap (Option) 22 22 B A Lead wire clamp Lead wire cap Series LC-01 LP-01 ML1C (mm) 25 32 40 Mounting position Series A B 124.8 148.8 173.8 ML1C 113.2 137.2 162.2 Minimum Stroke for Auto Switch Mounting Operating

CM2

100 101 to 150 151 to 200 201 to 300 12.5 25 37.5 50 75 142 155 167 180 205 151 164 176 189 214 20 12.5 25 37.5 50 75 146 159 171 184 209 155 168 180 193 218 25 12.5 25 37.5 50 75 151 164 176 189 214 163 176 188 201 226 32 12.5 25 37.5 50 75 180 193 205 218 243 192 205 217 230 255 40 Built-in One-touch fitting With air cushion Pivot bracket (mm) Bore Bore Bore WA N1 G LD WB P LF Q LG LH LP

A

15 0.153 0.132 0.380 46 20 0.153 0.132 0.380 46 25 0.190 0.165 0.464 50 30 0.190 0.165 0.464 52.5 Model Max Loading Weight MXU6 100 MXU10 200 MXU16 400 Ly: Distance between table and loading point (mm) Cy: Moment center position distance compensation amount (mm) St: Stroke (mm) Lr: Distance between table and loading point (mm) Cr: Moment center position distance compensation amount (mm) Lp

ML1

40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C ML1C LC-01 B 113.2 137.2 162.2 25 32 40 Mounting position Series ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 4.7-11

MXU

Expression of Calculation of Allowable Fp, Fy, Fr Pitch moment Yaw moment Roll moment Fp = Lp x Cp x (St/12) (N) Fy = Lr x Cy (N) Fy = Ly x Cy x (St/12) (N) Lp: Distance between table and loading point (mm) Cp: Correction value of moment center position distance (mm) St: Stroke (mm) Ly: Distance between table and loading point (mm) Cy: Correction value of moment center position distance (

VFR

02 Nil F G Rc Non plug-in VFS2000 LS 02 T0806 x 1 m C N NPT T NPTF T1075 x 1 m D Series VFR2000 Rc1 4 Plug-in VFR2000 LP B 02 T1209 x 1 m E Non plug-in VFS2000 LS B 02 Piping port (P, A, B port) Note) Mounting bolts and gaskets are not attached. 01 02 1 8 1 4 1 8 EA, EB port: Rc 3-5-11 12 Series VFR2000 Construction 2 position single 2 position double VFR210 VFR220 Courtesy

Table of Contents

02 Nil F G Rc Non plug-in VFS2000 LS 02 T0806 x 1 m C N NPT T NPTF T1075 x 1 m D Series VFR2000 Rc1 4 Plug-in VFR2000 LP B 02 T1209 x 1 m E Non plug-in VFS2000 LS B 02 Piping port (P, A, B port) Note) Mounting bolts and gaskets are not attached. 01 02 1 8 1 4 1 8 EA, EB port: Rc 3-5-11 12 Series VFR2000 Construction 2 position single 2 position double VFR210 VFR220 Courtesy

21

3.5 15 23.5 20.5 22 10 33 20 14 32 16 13.5 8 42 8 46.4 Width across flats 12 length 3.5 15 MM M8 x 1.25 NA 24 NN M20 x 1.5 P M5 x 0.8 RR 9 S 55 U 11.5 Z 98 ZZ 107 Bore size 20 25 32 40 M10 x 1.25 30 M26 x 1.5 M5 x 0.8 9 56 11.5 102 111 M10 x 1.25 34.5 M26 x 1.5 Rc1/8 12 62 14.5 111 123 M14 x 1.5 42.5 M32 x 2 Rc1/8 12 67 14.5 124 136 Pivoting Clevis Bracket (mm) LD 6.8 LF 15 LG 30 LH 30 LP

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Plug-in Nil F G Rc T0806 x 1 m 02 VFS2000 LS C Non plug-in N NPT T1075 x 1 m D Series VFR2000 Rc 1 4 T NPTF VFR2000 LP B 02 Plug-in T1209 x 1 m E VFS2000 LS B 02 Non plug-in Piping port (P, A, B port) Note) Mounting bolts and gaskets are not attached. 01 02 1 8 1 4 1 8 EA, EB port: Rc 1234 Series VFR2000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in

Air Slide Table Series MXJ

Note -X MXJ-LP Common for all models Individual -X 1.5 0.002 0.014 3 175 Series MXJ The graphs below show the table displacement when the static moment load is applied to the table. The graphs do not show the loadable mass. Refer to the Model Selection for the loadable mass.