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EX510 Sl unit is compatible with DeviceNet and CC-L|nk protocols and is capable to handle 128 l/O points.

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a6) Input block type (Fill out for YO unit only) .2,, Input block COM (Fill out tor l/O unit only) i4r sl unit coM Without inpul block I\r12,2 inputs I\r12,4 nputs M8, 4 inpL.its (3 pins) Leale he box bank lor the Sl !

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Tie-rod base Wiring with InpuUOutput Unit J o "Requlred for Sl unil "OW" optrbn. sssv | .w rosr T Series I Enclosure x160us Input block stations lhan Nore) n case of D0, ony DtN al rn ngs are anached Nole) Wthout Sl !nl, the symbolE n I .Inpdblocks @nnol be molnled wrlhoul Stun t ' Whenlhe DlN Ei s nclded witho!

5-Port Solenoid Valve

Sl 111 Nil Direct mounting D DIN rail mounting (With DIN rail) D0 DIN rail mounting (Without DIN rail) Serial transmission S6l EX600 123 SAm EX245 124-1 Sl EX250 131 Sl EX260 139 S4l*1 EX126 147 S3l*1 EX120 155 S8m EX180 156-1 r Valve stations D3 For 3 stations Specify a length longer than that of the standard rail.

Series AP500

volume Mass 1) 14 to 194F (10 to 90 C) for Vespel seat. 2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). 3) Mass, including individual boxed weight, may vary depending on connections or options. 2 Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL

AZ1000

If a back pressure regulator requires repair, contact SMC. 97 Technical Data/Glossary of Terms AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators 1. Applications [Tied-diaphragm] This is a regulator design in which the diaphragm and poppet are linked together.

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 5) Note 6) Note 7) 1.10-144 VQ 1000/2000 Plug-in Unit Base Mounted VV5Q21 Dust-resistant/jet-proof style (W) Sl unit output and coil numbering Mixed wiring is optional. Use the manifold specification form to specify. 0 1 3 4 5 2 6 7 8 9 1 2 3 6 7 0 4 5 Sl unit output No. Sl unit output No.

SL5200

If a back pressure regulator requires repair, contact SMC. 97 Technical Data/Glossary of Terms AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators 1. Applications [Tied-diaphragm] This is a regulator design in which the diaphragm and poppet are linked together.

Vacuum

enie MffiIE Applicable valve: NvJr(n (N.C.) / NzxloGKi 6)@@O-F SpcQ| l,/ZXl-Sl Spscs 1 .1, .r"iF. stde .orri"tg) 9 i!

Vacuum

Applicable valve: NvJr(n (N.C.) / NzxloGKi 6)@@O-F SpcQ| l,/ZXl-Sl Spscs 1 .1, .r"iF. stde .orri"tg) 9 i!

Series AP3500

(P.124) 100 Series AP3500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish

Model: 01 (Single Acting), Thread: N (NPT), Accessory: None, Suffix: SL [Copper-free / Low Temperature (-30 to 60 °C)]

Model: 20 (Three Side Style), Thread: N (NPT), Accessory: None, Suffix: SL [Copper-free / Low Temperature (-30 to 60 °C)]

Model: Three Side Style, Thread: NPT, Accessory: None, Suffix: SL [Copper-free / Low Temperature (-30 to 60 °C)]

Setting Type: Adjustable Type, Handle, Set Pressure: 0.02 to 0.5MPa, Port Size: 1/4 NPT, Accessory: None, Suffix: SL [Low Temperature (-30 to 60°C) + External Parts Copper-free]

Type: Instrumentation Auxiliary Device, Type: Single action, Thread Type: NPT, Connection Port Size: 1/4, Option: No bracket, Specification: Copper-free external parts / for low temperature (-30 to 60°C)

Type: Instrumentation Auxiliary Device, Thread Type: NPT, Connection Port Size: 1/4, Specification: Copper-free, for low temperature (-30 to 60°C), Accessory: N/A

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) 20 Cylinder tube gasket NBR 21 Cushion valve seal NBR 22 Magnet 132 CP96 Series Dimensions Basic: CP96S (D) B C (J) Bore size Stroke 32, 40 2 x EE 80, 100 PL SL PL 2 x EE port Cushion valve PL Width across flats SW KK WB WA B WA WB B D E R E R G WH A BG L2 VD L12 L9 ZZ + Stroke L8 + Stroke H VA G BG 2 x 4 x RT 80, 100 2 x 4 x RT BG

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) 21 Cushion valve seal NBR 22 Magnet 23 Retaining ring Steel for spring 125 24 Rod seal holder Stainless steel 125 25 Retaining ring Steel for spring 125 164 A C96 Series Dimensions Basic: C96S (D) B C (J) Bore size Stroke 32, 40 2 x EE 80 to 125 SL PL 2 x EE port Width across flats SW PL Cushion valve PL KK WB WA B B D E R WA WB G

Mechanically Jointed Rodless Cylinders

Note 2) L, H, LS, SL, HS, SH L, H X417 on both sides X417 on L unit side X417 on H unit side X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjustment unit is mounted on one side only.